JPH0221651U - - Google Patents
Info
- Publication number
- JPH0221651U JPH0221651U JP9848488U JP9848488U JPH0221651U JP H0221651 U JPH0221651 U JP H0221651U JP 9848488 U JP9848488 U JP 9848488U JP 9848488 U JP9848488 U JP 9848488U JP H0221651 U JPH0221651 U JP H0221651U
- Authority
- JP
- Japan
- Prior art keywords
- pellicle
- air
- excitation means
- attaching
- vibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005284 excitation Effects 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 3
- 239000000428 dust Substances 0.000 description 1
Description
第１図は本考案のペリクル貼り付け装置の概略
構成図、第２図は本考案の実施例を示すペリクル
貼り付け装置の要部平面図、第３図は第２図のＡ
−Ａ線断面図、第４図は従来のペリクルの斜視図
、第５図は従来のペリクル貼り付け装置の構成図
、第６図はペリクルにおける発塵のメカニズムを
示す図である。
１……ペリクル、７……フオトマスク基板、１
４……固定部、１５……ペリクルホルダー、１６
……加振装置、２０……加振手段付きペリクルホ
ルダー、２１……エアー源、２２……エアー導入
経路、２３……エアーノズル口、２４……噴出し
たエアー。
FIG. 1 is a schematic configuration diagram of a pellicle pasting device of the present invention, FIG. 2 is a plan view of essential parts of a pellicle pasting device showing an embodiment of the present invention, and FIG. 3 is A of FIG.
-A sectional view, FIG. 4 is a perspective view of a conventional pellicle, FIG. 5 is a configuration diagram of a conventional pellicle pasting device, and FIG. 6 is a diagram showing the mechanism of dust generation in the pellicle. 1... Pellicle, 7... Photomask substrate, 1
4... Fixed part, 15... Pellicle holder, 16
... Vibration device, 20 ... Pellicle holder with vibration excitation means, 21 ... Air source, 22 ... Air introduction path, 23 ... Air nozzle port, 24 ... Spouted air.
Claims (1)
リクル貼り付け装置において、 ペリクルに振動を与える加振手段を具備するよ
うにしたことを特徴とするペリクル貼り付け装置
。 (2) 前記加振手段はエアー発生源と、エアー導
入経路及びエアー噴出口からなる請求項１記載の
ペリクル貼り付け装置。[Claims for Utility Model Registration] (1) A pellicle attaching device for attaching a pellicle to a photomask substrate, characterized in that the device is equipped with an excitation means for applying vibration to the pellicle. (2) The pellicle pasting device according to claim 1, wherein the vibration excitation means comprises an air generation source, an air introduction path, and an air outlet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9848488U JPH0221651U (en) | 1988-07-27 | 1988-07-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9848488U JPH0221651U (en) | 1988-07-27 | 1988-07-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0221651U true JPH0221651U (en) | 1990-02-14 |
Family
ID=31324795
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9848488U Pending JPH0221651U (en) | 1988-07-27 | 1988-07-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0221651U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005010700A (en) * | 2003-06-23 | 2005-01-13 | Toppan Printing Co Ltd | Exposure plate inspection apparatus and inspection method |
-
1988
- 1988-07-27 JP JP9848488U patent/JPH0221651U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005010700A (en) * | 2003-06-23 | 2005-01-13 | Toppan Printing Co Ltd | Exposure plate inspection apparatus and inspection method |
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