JPS5998294A - Alarm and controller for semiconductor plant or the like - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed Description of the Invention] This invention detects the occurrence of a fire when there is a leakage of processing gas that occurs during the manufacturing process in a VLSI factory, etc.
The present invention relates to disaster prevention devices such as fire extinguishing equipment, and alarm and control devices in semiconductor factories and the like that appropriately control manufacturing processes.

Semiconductor factories for ultra-LSIs, which have made great strides in recent years, use 7J silane gas when forming insulating films on silicon wafers! - Use Toya Moshin→→,
These processing gases are harmful and their concentration is
When the gas reaches 5- or more, it is dangerous because it reacts with oxygen in the air and ignites and burns, and a fire that was thought to be caused by these gases occurred at a very large scale integrated circuit factory, resulting in only a - amount of damage.

In view of the above points, this invention immediately detects the state in which leaked process gas reacts with oxygen in the air and burns, generating combustion products, and the cause of the fire can be identified in advance in an appropriate manner at the initial stage of the fire. The purpose of this invention is to provide an alarm and control device for semiconductor factories, etc., which can be controlled.

An embodiment of the present invention will be described below using a CVD apparatus (Chemical
Vapor Deposition) b and its peripheral equipment will be explained with reference to the drawings. In Fig. 1, 1 is a silane gas cylinder, 2 is an ammonia gas cylinder, 3 is a storage box for storing these cylinders, 6
8 is a nitride film forming device (CVD) that supplies silane gas and ammonia gas through piping 4.5 to form an insulating film on a semiconductor wafer, and 8 supplies acid purple to unreacted silane gas flowing out from device 6 through piping 7. 10 is a detection box thrown between piping 9 to monitor the state of the gas discharged from the abatement device 8 to the exhaust duct 11; A vacuum pump 13 evacuates the inside of the forming apparatus 6, an exhaust port 13 exhausts indoor air, and a damper J4 is provided in a pipe 15 connecting the storage box 3 and the exhaust duct 11. Furthermore, the storage box 3 and the detection box 10 are provided with fire detectors Di and D2 that detect combustion products produced when processing gases such as silanga and gas leak, react with oxygen in the air, and burn. . In this case, photoelectric smoke detectors and ionization smoke detectors can be used as fire detectors to detect combustion products; the vertical axis shows the output of each sensor, and the horizontal axis shows the concentration of silane gas combustion products. According to the characteristic curve diagram shown in Figure @3, h
Ionization type smoke detectors are more sensitive to silane gas combustion products than photoelectric type smoke detectors a, and can detect their occurrence earlier. Further, the sensor D1. D2 is 2g2
As shown in the figure, a fire detector D installed in the storage box 3
i is directly connected to the fire detector D2 installed in the detection box 10;
is connected to the OR circuit OR through impark 1, and its output is a fire alarm;b is a disaster prevention device such as a fire extinguisher; fruit.

Next, the operation of the sand making process will be explained. In the nitride film forming apparatus 6, a semiconductor wafer is placed in it, the vacuum is evacuated by a vacuum pump 12, and then a silane gas cylinder 1 and an ammonia gas cylinder 2 are supplied to the apparatus 6 to supply silane gas and ammonia gas to the semiconductor wafer. A necessary nitride film, that is, an insulating film is formed. The treated gas containing unreacted gas is forcibly oxidized in the abatement device 8 and is discharged from the exhaust duct 11 through the piping 9 as a safe one. When the silane gas from the silane gas cylinder 1 reacts with oxygen in the air and burns, the combustion product activates the fire detector D1, and the OR circuit O
Disaster prevention equipment such as a fire alarm and fire extinguishing system (not shown) is opened via R to fully open the damper 14 and release the leaked gas to the tallite 11.
Is there a relay device that controls J? make it work. In the detection box 10, when the aftereffects device 8 is normal and the product is incinerated, the combustion products are incinerated through the pipe 9, and the exhaust duct is discharged through the pipe 9. Since it is discharged to 11,
The fire detector o2 is activated by the action of the inn A-41 ((), and the OR circuit OR is not activated.
Fire detector Tl 2 is ORed by the action of Inno Kuichita.
9. Operate the circuit OR gold. Through the OR circuit OR, there are disaster prevention devices such as fire extinguishing devices and fire alarms.
) operates a relay device that controls the manufacturing process.As described above, this invention is applicable to semiconductor manufacturing processes and other places where toxic and combustible process gases such as silane gas are used. By installing fire detectors to detect combustion products, it is possible to carry out appropriate control in the early stages of a fire. This has the effect of providing obituary notification and control equipment in semi-submersible and submersible factories. −

[Brief explanation of the drawing]

Figure 1 is a schematic diagram of an embodiment of the present invention, Figure 2 is its circuit diagram, and Figure 3 is a menacing curve diagram of a photoelectric smoke detector and an ionization smoke detector. 1... Silane gas cylinder, 3... KQ box, 6-...
- Nitride film forming device, 8... Harm removal device, 10-... Detection box, 11... Exhaust duct, 1) 19D2... Fire detector that detects combustion products. Tongshi'11i Mountain (person f'1'',, beauty 12 et al disaster-1',
Industry stock price ratio Figure 1 Figure 1 Figure 2 Figure 3 Concentration

Claims (1)

[Claims] 1. Combustion products produced when toxic and flammable processing gases such as silane gas are leaked in semiconductor manufacturing processes, react with oxygen in the air, and burn. An alarm and control device for a semiconductor factory, etc., which is equipped with a fire detector that detects a fire, and issues an alarm based on a change in the output of the detector, and also controls a disaster prevention device such as a fire extinguisher, a semiconductor manufacturing process, etc. 2. An alarm and control device for a semiconductor factory or the like as set forth in claim 1, wherein a fire detector equipped with an inverter on the output side is installed on the secondary side of the abatement device. 3. The alarm and control device in a semiconductor factory or the like as set forth in claim 1, wherein the fire detector is provided in a storage box containing processing gas cylinders. 4. An alarm and control device for a semiconductor factory or the like as set forth in either claim 1(t) or 3(b), wherein the fire detector is an ionized smoke detector.