JPS5997046A - 光電子分光分析装置 - Google Patents

光電子分光分析装置

Info

Publication number
JPS5997046A
JPS5997046A JP57208075A JP20807582A JPS5997046A JP S5997046 A JPS5997046 A JP S5997046A JP 57208075 A JP57208075 A JP 57208075A JP 20807582 A JP20807582 A JP 20807582A JP S5997046 A JPS5997046 A JP S5997046A
Authority
JP
Japan
Prior art keywords
generating means
ray generating
sample
sample chamber
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57208075A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0136901B2 (cs
Inventor
Hiroshi Yamauchi
洋 山内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP57208075A priority Critical patent/JPS5997046A/ja
Publication of JPS5997046A publication Critical patent/JPS5997046A/ja
Publication of JPH0136901B2 publication Critical patent/JPH0136901B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP57208075A 1982-11-26 1982-11-26 光電子分光分析装置 Granted JPS5997046A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57208075A JPS5997046A (ja) 1982-11-26 1982-11-26 光電子分光分析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57208075A JPS5997046A (ja) 1982-11-26 1982-11-26 光電子分光分析装置

Publications (2)

Publication Number Publication Date
JPS5997046A true JPS5997046A (ja) 1984-06-04
JPH0136901B2 JPH0136901B2 (cs) 1989-08-03

Family

ID=16550222

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57208075A Granted JPS5997046A (ja) 1982-11-26 1982-11-26 光電子分光分析装置

Country Status (1)

Country Link
JP (1) JPS5997046A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61281954A (ja) * 1985-06-07 1986-12-12 Anelva Corp 光電子分析装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61281954A (ja) * 1985-06-07 1986-12-12 Anelva Corp 光電子分析装置

Also Published As

Publication number Publication date
JPH0136901B2 (cs) 1989-08-03

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