JPS5997039A - 発光分光分析装置 - Google Patents
発光分光分析装置Info
- Publication number
- JPS5997039A JPS5997039A JP20807782A JP20807782A JPS5997039A JP S5997039 A JPS5997039 A JP S5997039A JP 20807782 A JP20807782 A JP 20807782A JP 20807782 A JP20807782 A JP 20807782A JP S5997039 A JPS5997039 A JP S5997039A
- Authority
- JP
- Japan
- Prior art keywords
- housing
- spectrometer
- flat plate
- emission spectrometer
- condenser lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0216—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using light concentrators or collectors or condensers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20807782A JPS5997039A (ja) | 1982-11-26 | 1982-11-26 | 発光分光分析装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20807782A JPS5997039A (ja) | 1982-11-26 | 1982-11-26 | 発光分光分析装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5997039A true JPS5997039A (ja) | 1984-06-04 |
JPS642892B2 JPS642892B2 (enrdf_load_stackoverflow) | 1989-01-19 |
Family
ID=16550257
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20807782A Granted JPS5997039A (ja) | 1982-11-26 | 1982-11-26 | 発光分光分析装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5997039A (enrdf_load_stackoverflow) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62125454U (enrdf_load_stackoverflow) * | 1986-01-30 | 1987-08-10 | ||
US4875773A (en) * | 1988-05-06 | 1989-10-24 | Milton Roy Company | Optical system for a multidetector array spectrograph |
US4966458A (en) * | 1988-05-06 | 1990-10-30 | Milton Roy Company | Optical system for a multidetector array spectrograph |
-
1982
- 1982-11-26 JP JP20807782A patent/JPS5997039A/ja active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62125454U (enrdf_load_stackoverflow) * | 1986-01-30 | 1987-08-10 | ||
US4875773A (en) * | 1988-05-06 | 1989-10-24 | Milton Roy Company | Optical system for a multidetector array spectrograph |
US4966458A (en) * | 1988-05-06 | 1990-10-30 | Milton Roy Company | Optical system for a multidetector array spectrograph |
Also Published As
Publication number | Publication date |
---|---|
JPS642892B2 (enrdf_load_stackoverflow) | 1989-01-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5832054A (en) | Fluorescent x-ray analyzer with quickly evacuable cover cases | |
US6233307B1 (en) | Compact X-ray spectrometer | |
JP4303499B2 (ja) | 化学剤の探知装置 | |
US4417355A (en) | X-Ray fluorescence spectrometer | |
JPH06186157A (ja) | 微粒子分析装置および微粒子分析方法 | |
JPH06273333A (ja) | 分光蛍光光度計 | |
JPS5997039A (ja) | 発光分光分析装置 | |
JP2009300167A (ja) | アウトガス捕集装置および捕集方法 | |
US3876305A (en) | Demountable sputtering cathode for atomic absorption spectroscopy | |
US7359049B2 (en) | Light source device and spectrophotometer with the light source device | |
US3430041A (en) | Far ultraviolet non-dispersive analyzer utilizing resonant radiant energy from the periphery of the vapor cloud of the source | |
US5153674A (en) | Semiconductor production control and/or measuring unit | |
Huffman et al. | Fluorescence and Pre‐Ionization in Nitrogen Excited by Vacuum Ultraviolet Radiation | |
US6519030B1 (en) | Flame photometer detector | |
JPH0524046Y2 (enrdf_load_stackoverflow) | ||
JP3198127B2 (ja) | X線分光装置 | |
JP2002195965A (ja) | オージェ電子分光分析装置およびそれを用いた分析方法 | |
CN116759324B (zh) | 一种oes终点检测装置和半导体芯片加工装置 | |
JPS5941533B2 (ja) | 酸化膜の評価方法 | |
JPH07103897A (ja) | 発光分光分析装置 | |
JPS636674Y2 (enrdf_load_stackoverflow) | ||
JP2001215194A (ja) | 発光分光分析装置 | |
RU2030736C1 (ru) | Флуоресцентный рентгеновский спектрометр | |
JPH09196851A (ja) | 発光分光分析装置 | |
JP2003215073A (ja) | 波長分散形蛍光x線分析装置 |