JPS599444A - クリーンルームの空気供給制御装置 - Google Patents

クリーンルームの空気供給制御装置

Info

Publication number
JPS599444A
JPS599444A JP57119519A JP11951982A JPS599444A JP S599444 A JPS599444 A JP S599444A JP 57119519 A JP57119519 A JP 57119519A JP 11951982 A JP11951982 A JP 11951982A JP S599444 A JPS599444 A JP S599444A
Authority
JP
Japan
Prior art keywords
static pressure
clean room
hole
signal
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57119519A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0245097B2 (OSRAM
Inventor
Jiro Kakizaki
柿崎　治郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Takenaka Komuten Co Ltd
Original Assignee
Takenaka Komuten Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Takenaka Komuten Co Ltd filed Critical Takenaka Komuten Co Ltd
Priority to JP57119519A priority Critical patent/JPS599444A/ja
Publication of JPS599444A publication Critical patent/JPS599444A/ja
Publication of JPH0245097B2 publication Critical patent/JPH0245097B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/20—Control of fluid pressure characterised by the use of electric means
    • G05D16/2006—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
    • G05D16/2013—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Air Conditioning Control Device (AREA)
JP57119519A 1982-07-08 1982-07-08 クリーンルームの空気供給制御装置 Granted JPS599444A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57119519A JPS599444A (ja) 1982-07-08 1982-07-08 クリーンルームの空気供給制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57119519A JPS599444A (ja) 1982-07-08 1982-07-08 クリーンルームの空気供給制御装置

Publications (2)

Publication Number Publication Date
JPS599444A true JPS599444A (ja) 1984-01-18
JPH0245097B2 JPH0245097B2 (OSRAM) 1990-10-08

Family

ID=14763277

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57119519A Granted JPS599444A (ja) 1982-07-08 1982-07-08 クリーンルームの空気供給制御装置

Country Status (1)

Country Link
JP (1) JPS599444A (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6475322A (en) * 1987-09-18 1989-03-22 Toyo Seikan Kaisha Ltd Cylinder feed-in device
EP3224546A4 (en) * 2014-11-26 2018-08-01 Si-tecno OY Method for measuring pressure differences between different premises in a building

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55166327U (OSRAM) * 1979-05-18 1980-11-29

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55166327U (OSRAM) * 1979-05-18 1980-11-29

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6475322A (en) * 1987-09-18 1989-03-22 Toyo Seikan Kaisha Ltd Cylinder feed-in device
EP3224546A4 (en) * 2014-11-26 2018-08-01 Si-tecno OY Method for measuring pressure differences between different premises in a building
US10481035B2 (en) 2014-11-26 2019-11-19 Si-Tecno Oy Method for measuring pressure differences between different premises in a building

Also Published As

Publication number Publication date
JPH0245097B2 (OSRAM) 1990-10-08

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