JPS5990024A - Infrared detecting element - Google Patents
Infrared detecting elementInfo
- Publication number
- JPS5990024A JPS5990024A JP20066582A JP20066582A JPS5990024A JP S5990024 A JPS5990024 A JP S5990024A JP 20066582 A JP20066582 A JP 20066582A JP 20066582 A JP20066582 A JP 20066582A JP S5990024 A JPS5990024 A JP S5990024A
- Authority
- JP
- Japan
- Prior art keywords
- opening
- support
- made incident
- hole
- pyroelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims abstract description 7
- 238000005530 etching Methods 0.000 claims description 5
- 241000257465 Echinoidea Species 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000011358 absorbing material Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000013316 zoning Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G08—SIGNALLING
- G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
- G08B13/00—Burglar, theft or intruder alarms
- G08B13/18—Actuation by interference with heat, light, or radiation of shorter wavelength; Actuation by intruding sources of heat, light, or radiation of shorter wavelength
- G08B13/189—Actuation by interference with heat, light, or radiation of shorter wavelength; Actuation by intruding sources of heat, light, or radiation of shorter wavelength using passive radiation detection systems
- G08B13/19—Actuation by interference with heat, light, or radiation of shorter wavelength; Actuation by intruding sources of heat, light, or radiation of shorter wavelength using passive radiation detection systems using infrared-radiation detection systems
- G08B13/191—Actuation by interference with heat, light, or radiation of shorter wavelength; Actuation by intruding sources of heat, light, or radiation of shorter wavelength using passive radiation detection systems using infrared-radiation detection systems using pyroelectric sensor means
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は焦電材料を使用した焦′亀型の赤外線検出素子
に関する。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a pyro-tortoise type infrared detection element using a pyroelectric material.
従来列の構成とその問題点
焦電型赤外線検出器は温度変化を検出するセンサーであ
るため、チョッパーを用いるか、センサーをハニング動
作させるか、被測定物体が動くかした時に出力を生じる
。そこで防犯センサーに用いる時妃は第１図に示すよう
に被測定物体７である人間が移動した時に空間的にチョ
ッピングするようにセグメント状球面ミラー２を用いる
。このミラー２により被測定物体７がらの赤外線６を焦
電型赤外線検出器１に集める。被測定物体７が移動する
と、隣りのセグメントミラーに入射赤外光６が移動する
ことになり、空間的にチョッピングがかかる。Conventional array configuration and its problems Pyroelectric infrared detectors are sensors that detect temperature changes, so they generate output when a chopper is used, when the sensor is operated in a Hanning operation, or when the object to be measured moves. Therefore, when used as a security sensor, a segmented spherical mirror 2 is used so as to spatially chop the object 7 to be measured, ie, a person, as shown in FIG. 1 when the person moves. This mirror 2 collects infrared rays 6 from the object to be measured 7 onto the pyroelectric infrared detector 1 . When the object to be measured 7 moves, the incident infrared light 6 moves to an adjacent segment mirror, causing spatial chopping.
この場合検出器１とミラー２の組合せを作るためにｔま
両者の位１醒合せが必要となり、まだ防犯センサーとし
ても大形なものとなる。それに加えてより微細な移動物
体の検出には適していない。In this case, in order to create a combination of the detector 1 and the mirror 2, it is necessary to assemble the two, and the security sensor is still large. In addition, it is not suitable for detecting finer moving objects.
発明の目的
本発明は構造が簡単でしかも小型であり、しかも小さな
移動物体の検出も作品を赤外線検出素子を提供すること
を目的どするものである。OBJECTS OF THE INVENTION The object of the present invention is to provide an infrared detection element that is simple in structure, compact, and capable of detecting small moving objects.
発明の構成
本発明は傾斜を有する貫通孔をあけた支持体の貫通孔の
広開Ｉ−１側に、開口の幅より狭く、開口長より長い第
１の焦電素子全プリ７ジ状Ｊ／ｒｃ没け、支持体の狭間
口囮に開口をには覆うようにパα２の焦′亀素子を１没
はて、第１の焦電素ｒ−１１１１１，１こり赤外光を入
射させるよう１７こしたものである１、実施例の説明
以下本発明の一実施例を詳細に説明する。第２図は本発
明による赤外線検出素子の実施例を示す断面嘲、Ｈ’、
３図はその平ｌｎｉ図である。Structure of the Invention The present invention is characterized in that a first pyroelectric element is provided in the wide opening I-1 side of the through hole of a support body having a through hole having an inclination. /rc is sunk, and the first pyroelectric element r-11111 is made to inject infrared light by inserting the first pyroelectric element R-11111 into the narrow opening decoy of the support so as to cover the opening. 1. DESCRIPTION OF EMBODIMENTS An embodiment of the present invention will be described in detail below. FIG. 2 is a cross-sectional view showing an embodiment of the infrared detection element according to the present invention, H',
Figure 3 is its flat lni diagram.
傾斜のつい／こ貫通孔８をあけた支持台６の口のすばま
っだ１ｌＩＩＩに焦電素子４を受光面を支持体Ｓ側にし
て取り１τＪける。まだ支持体５の広口１１川１では両
面に受光゛成極を形成した焦心素子３をブリッジの如く
素子３の両端を支持台らに接着してとりつける。焦電素
子３ば、その幅は穴８の広１」側の開１］の幅より狭く
、かつ長さｄ二開１］長より良く形成される。リード線
（ｌＩＸｌ示せす）は各焦電素子３，４から直接あるい
は支持台６を１４ｉｉ ｊ、てとり出すことができる。The pyroelectric element 4 is placed in the wide opening 1lIII of the support base 6 having an inclined through hole 8 therein, with the light-receiving surface facing the support S side. At the wide opening 11 of the support 5, a focusing element 3 with light-receiving polarization formed on both sides is attached by gluing both ends of the element 3 to the support base like a bridge. The pyroelectric element 3 is formed so that its width is narrower than the width of the opening 1 on the wide side of the hole 8, and the length d is greater than the length d2. Lead wires (IIXl shown) can be taken out from each pyroelectric element 3, 4 directly or by using the support 6 14ii j.
支持台５の傾斜のついた内面ｌ／ζは赤外反射Ａ′、Ａ
利９をコーテメングする。入射赤外線６が平行であるな
らば、領域へ、Ｅより入射し７た赤外線は焦電素子３の
裏面に入射［７、領域Ｃより入射した赤外線は焦電素子
３の表面に入射する。丑だ領域１３．Ｄより入射した赤
外線は焦心素子４に入射する。この様に領域Ａ、Ｂ、Ｃ
，Ｄ、Ｅと入射赤外光６を移動することにより焦心素子
３（裏）。The inclined inner surface l/ζ of the support base 5 has infrared reflections A', A
Cortemend the profit 9. If the incident infrared rays 6 are parallel, the infrared rays that entered the area from E will be incident on the back surface of the pyroelectric element 3 [7, and the infrared rays that have entered from area C will be incident on the surface of the pyroelectric element 3. Ushida area 13. The infrared rays incident from D enter the focusing element 4. In this way, areas A, B, C
, D, E and the focusing element 3 (back side) by moving the incident infrared light 6.
４．３（表）、４．３（裏）と受光素子が変化すること
になり、素子側から見ると空間的にチヨ・ノピングして
いるととになる。この様に本発明の構（戊により一討の
焦心素子を、用いて空間ゾーン分割（拝能な赤外検出素
子を作製できる。次に具体的実施例を示す。The light-receiving element changes from 4.3 (front) to 4.3 (back), and when viewed from the element side, it appears as if the light is being rotated spatially. As described above, an infrared detecting element capable of spatial zone division can be produced using the structure of the present invention using a focusing element.Next, specific examples will be shown.
ンリコ／ウェノ・−十に熱酸化、父ばＣＶＤにより酸化
膜を作製し、り第１・エツチングにより酸化膜の中央部
を除去してパターニングする。この酸化膜をマスクにし
てエチレンジアミン−プロカテコール系のエツチング液
を用いた異方性エツチングを行なうと、中央部に傾斜を
有する貫通孔が形成さ〕しる。穴あけエツチング終了後
必要寸法に外側を切断し、支持台５とする。焦電素子３
、４には電極上してＮ ｉ Ｃｒ等の赤外吸収イ」才
゛［を蒸着する。First, an oxide film is formed by thermal oxidation and first by CVD, and then the central part of the oxide film is removed by etching and patterned. When this oxide film is used as a mask and anisotropic etching is performed using an ethylenediamine-procatechol based etching solution, a through hole having an inclination in the center is formed. After drilling and etching are completed, the outside is cut to the required dimensions to form the support stand 5. Pyroelectric element 3
, 4, an infrared absorbing material such as NiCr is deposited on the electrodes.
この焦心素子３，４を規定寸法１て切断し、支持台６に
接着剤で同定する。この時の各々の寸法は最適設計があ
るか、概略で述べるとＳｉ 支持台の厚さが約４０Ｑ
ｐであり、開口部が約ｊ Ｔｎｍｘ １−５ｍｍ、口の
せばまった所が約０．４５ｍ１＋ｌＸ ０．９５龍、焦
心素子３か約○−２Ｆ５ｍｍ×２．Ｏ朋、焦電素子４が
約１ｉ１Ｘ１．５ｍｍとすれば、各ゾーンＡ−Ｈの分割
幅は０．２〜０．２５ ｍｍ位となる。従ってかなり祐
１かい分割が可能であり、ファインラインの熱パターン
を検査することも可能となる。ｔだレンズ系等をＪｒＪ
いればもっと大きな視野での使用も可曲となる。The focusing elements 3 and 4 are cut to a specified size and attached to a support base 6 with adhesive. Is there an optimal design for each dimension at this time?Roughly speaking, the thickness of the Si support is approximately 40Q.
p, the opening is about j Tnmx 1-5mm, the narrow part is about 0.45m1+lX 0.95mm, the focusing element is 3 or about ○-2F5mm x 2. If the size of the pyroelectric element 4 is about 1×1.5 mm, the division width of each zone A to H will be about 0.2 to 0.25 mm. Therefore, it is possible to perform a fairly large division, and it is also possible to inspect fine-line thermal patterns. JrJ lens system etc.
If there is, it can be used in a larger field of view.
発明の効果
以上のように、本発明は傾斜を治する貫通孔をあけた支
持体の貫通孔の広開口側に、開口幅より狭く開口長より
長い第１の焦心素子をブリッジ状に設け、一方狭開口側
に、開口をほぼ榎うように、π２の焦心素子を設けて第
１の焦電素子側から赤外光を入射さぜるようにしたもの
であり、検出素子自身が視野のゾーン分割機能を有して
おり、構成が小型でかつ節１）（であり、しかもより機
紐１な空同分′削がｒ５Ｊ能となり、小さな移動物体の
検出力可能と４、る。この場合支持台の厚さを厚くすれ
ば、Ｊν滴分割幅は大きくなるので、必要に応じて最適
設刷はなされ得る。Effects of the Invention As described above, the present invention provides a first focusing element narrower than the opening width and longer than the opening length in a bridge shape on the wide opening side of the through hole of a support having a through hole for correcting inclination. On the other hand, a π2 focusing element is provided on the narrow aperture side so as to almost cover the aperture, and the infrared light is incident from the first pyroelectric element side, and the detection element itself covers the field of view. It has a zone division function, has a compact configuration, and is capable of cutting the air in parallel with the machine, making it possible to detect small moving objects.4. In this case, if the thickness of the support base is increased, the Jv droplet division width becomes larger, so that the optimum printing size can be achieved as necessary.
第１図−一空間ゾーン分割を利用した従来の赤外線検出
器の原理構成図、第２図は本発明による赤外線検出素子
の実施例を示す断面図、第３図は同マＦ面図である。
１・・・・・・焦電型赤外線検出器、２・・山・セグメ
ント状球面ミラー、３，４・・・・・・焦心素子、Ｓ・
・・・・・支持台、６・・・山入射赤外光、了・・山・
被測定物体、８・・・・・・貫通孔、９山川赤外反射利
才」。
代理人の氏名 弁理士 中尾 敏 凋 ほか１名・Ｓ
１ 図
第３図Fig. 1 - Principle configuration diagram of a conventional infrared detector using spatial zoning, Fig. 2 is a sectional view showing an embodiment of an infrared detection element according to the present invention, and Fig. 3 is a F-side view of the same. . 1... Pyroelectric infrared detector, 2... Mountain/segment shaped spherical mirror, 3, 4... Focusing element, S...
...Support stand, 6...Mountain incident infrared light, end...Mountain...
Object to be measured, 8...through hole, 9 Yamakawa infrared reflector. Name of agent Patent attorney Toshiaki Nakao and 1 other person S
1 Figure 3
Claims (2)
の広開口側に開口幅より狭く開口長より長い両面感光の
第１の焦電素子をブリッジ状に設け、前記貫通孔の狭量
口側に開口をほぼ覆う」：うに第２の焦電素子を設けた
ことを特徴とする赤外線検出素子。(1) A through hole having an inclination of 1 is provided in the wide opening side of the through hole of the support body in the form of a bridge with a double-sided photosensitive first pyroelectric element narrower than the opening width and longer than the opening length; An infrared detection element characterized in that a second pyroelectric element is provided on the narrow opening side of the sea urchin.
が異方性エツチングで形成されたものである特許請求の
範囲第１項記載の赤外線検出素子。(2) The infrared detecting element according to claim 1, wherein the support is made of a 7-recon wafer, and the through holes are formed by anisotropic etching.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20066582A JPS5990024A (en) | 1982-11-15 | 1982-11-15 | Infrared detecting element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20066582A JPS5990024A (en) | 1982-11-15 | 1982-11-15 | Infrared detecting element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5990024A true JPS5990024A (en) | 1984-05-24 |
| JPS645247B2 JPS645247B2 (en) | 1989-01-30 |
Family
ID=16428186
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20066582A Granted JPS5990024A (en) | 1982-11-15 | 1982-11-15 | Infrared detecting element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5990024A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5369280A (en) * | 1990-04-26 | 1994-11-29 | The Commonwealth Of Australia | Semiconductor film bolometer thermal infrared detector |
| JP2014199254A (en) * | 2013-03-12 | 2014-10-23 | 株式会社リコー | Backside illumination type infrared sensor and method of manufacturing backside illumination type infrared sensor |
-
1982
- 1982-11-15 JP JP20066582A patent/JPS5990024A/en active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5369280A (en) * | 1990-04-26 | 1994-11-29 | The Commonwealth Of Australia | Semiconductor film bolometer thermal infrared detector |
| JP2014199254A (en) * | 2013-03-12 | 2014-10-23 | 株式会社リコー | Backside illumination type infrared sensor and method of manufacturing backside illumination type infrared sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS645247B2 (en) | 1989-01-30 |
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