JPS5990007A - 光学式寸度測定装置 - Google Patents

光学式寸度測定装置

Info

Publication number
JPS5990007A
JPS5990007A JP57200753A JP20075382A JPS5990007A JP S5990007 A JPS5990007 A JP S5990007A JP 57200753 A JP57200753 A JP 57200753A JP 20075382 A JP20075382 A JP 20075382A JP S5990007 A JPS5990007 A JP S5990007A
Authority
JP
Japan
Prior art keywords
light
year
split
reflected light
reflected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57200753A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0363001B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Shiyouhei Kobayashi
章兵 小林
Kenichi Ito
憲一 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp, Olympus Optical Co Ltd filed Critical Olympus Corp
Priority to JP57200753A priority Critical patent/JPS5990007A/ja
Publication of JPS5990007A publication Critical patent/JPS5990007A/ja
Priority to US06/875,508 priority patent/US4726685A/en
Publication of JPH0363001B2 publication Critical patent/JPH0363001B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
JP57200753A 1982-11-16 1982-11-16 光学式寸度測定装置 Granted JPS5990007A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP57200753A JPS5990007A (ja) 1982-11-16 1982-11-16 光学式寸度測定装置
US06/875,508 US4726685A (en) 1982-11-16 1986-06-18 Optical measuring device for detecting surface characteristics of object

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57200753A JPS5990007A (ja) 1982-11-16 1982-11-16 光学式寸度測定装置

Publications (2)

Publication Number Publication Date
JPS5990007A true JPS5990007A (ja) 1984-05-24
JPH0363001B2 JPH0363001B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-09-27

Family

ID=16429597

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57200753A Granted JPS5990007A (ja) 1982-11-16 1982-11-16 光学式寸度測定装置

Country Status (2)

Country Link
US (1) US4726685A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPS5990007A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6182209U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1984-11-02 1986-05-31
JPS6184508U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1984-11-06 1986-06-04
JPS6184510U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1984-11-07 1986-06-04
JPS61219805A (ja) * 1985-03-27 1986-09-30 Olympus Optical Co Ltd 表面形状測定器
JPS6266112A (ja) * 1985-09-19 1987-03-25 Tokyo Optical Co Ltd 位置検出装置
JPS63250552A (ja) * 1987-04-08 1988-10-18 Yasunaga Tekkosho:Kk 光学式傷変位計測装置
JPH01259208A (ja) * 1988-04-08 1989-10-16 Olympus Optical Co Ltd 光学的表面形状測定装置
US4971445A (en) * 1987-05-12 1990-11-20 Olympus Optical Co., Ltd. Fine surface profile measuring apparatus
US5206702A (en) * 1989-10-09 1993-04-27 Olympus Optical Co., Ltd. Technique for canceling the effect of external vibration on an atomic force microscope

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62132242A (ja) * 1985-12-04 1987-06-15 Hitachi Ltd 光デイスク装置
JPH04281231A (ja) * 1990-11-30 1992-10-06 Toshiba Corp 光集束光学系
DE4229313A1 (de) * 1992-09-02 1994-03-03 Betr Forsch Inst Angew Forsch Verfahren und Vorrichtung zur hochgenauen Abstandsmessung von Oberflächen
US5870199A (en) * 1992-09-02 1999-02-09 Betriebsforschungsinstitut Vdeh Institut Fur Angewandte Forschung Gmbh Method and apparatus for highly accurate distance measurement with respect to surfaces
JP3639607B2 (ja) * 1992-10-21 2005-04-20 キヤノン株式会社 光磁気情報記録再生装置
US5839199A (en) * 1993-09-07 1998-11-24 Kabushiki Kaisha Topcon Laser gradient setting device
US5606802A (en) * 1995-02-22 1997-03-04 Kabushiki Kaisha Topcon Laser gradient setting device
RU2148790C1 (ru) * 1993-11-12 2000-05-10 Бетрибсфоршунгсинститут Фдех Институт Фюр Ангевандте Форшунг ГмбХ Способ и устройство для высокоточного бесконтактного измерения расстояний поверхностей
US5654799A (en) * 1995-05-05 1997-08-05 Measurex Corporation Method and apparatus for measuring and controlling the surface characteristics of sheet materials such as paper
JP3523754B2 (ja) 1995-06-05 2004-04-26 オリンパス株式会社 走査型プローブ顕微鏡
US5859364A (en) * 1995-06-05 1999-01-12 Olympus Optical Co., Ltd. Scanning probe microscope
US7721725B2 (en) * 2004-08-11 2010-05-25 Acushnet Company Method and apparatus for heating golf balls
US7692138B1 (en) * 2006-10-23 2010-04-06 David James Ray Integrated scanning probe microscope and confocal microscope
CN102175311B (zh) * 2011-02-19 2012-11-28 欧阳国平 一种激光光束参数测量装置
CN108204890B (zh) * 2017-12-27 2021-05-11 四川大学 照明系统光场均匀性的测试方法及其检测装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB856006A (en) * 1956-12-31 1960-12-14 Zeiss Jena Veb Carl Improvements in measuring apparatus having optical and photoelectric means
US4037959A (en) * 1975-12-15 1977-07-26 The United States Of America As Represented By The Secretary Of The Navy Means for real-time laser source characterization
JPS53135653A (en) * 1977-05-01 1978-11-27 Canon Inc Photoelectric detecting optical device
JPS567246A (en) * 1979-06-25 1981-01-24 Olympus Optical Co Ltd Method and unit for focus detection
JPS5737742A (en) * 1980-08-19 1982-03-02 Olympus Optical Co Ltd Method and device for optical information recording
JPS5752005A (en) * 1980-08-19 1982-03-27 Olympus Optical Co Ltd Focus detecting method
JPS5752006A (en) * 1980-08-19 1982-03-27 Olympus Optical Co Ltd Method and device for detecting focus
JPS5753832A (en) * 1980-09-12 1982-03-31 Olympus Optical Co Ltd Method and device for recording of optical information
JPS57108811A (en) * 1980-12-26 1982-07-07 Hitachi Ltd Optical focus position detector
JPS57131039A (en) * 1981-02-07 1982-08-13 Olympus Optical Co Ltd Defect detector

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6182209U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1984-11-02 1986-05-31
JPS6184508U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1984-11-06 1986-06-04
JPS6184510U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1984-11-07 1986-06-04
JPS61219805A (ja) * 1985-03-27 1986-09-30 Olympus Optical Co Ltd 表面形状測定器
JPS6266112A (ja) * 1985-09-19 1987-03-25 Tokyo Optical Co Ltd 位置検出装置
JPS63250552A (ja) * 1987-04-08 1988-10-18 Yasunaga Tekkosho:Kk 光学式傷変位計測装置
US4971445A (en) * 1987-05-12 1990-11-20 Olympus Optical Co., Ltd. Fine surface profile measuring apparatus
JPH01259208A (ja) * 1988-04-08 1989-10-16 Olympus Optical Co Ltd 光学的表面形状測定装置
US5206702A (en) * 1989-10-09 1993-04-27 Olympus Optical Co., Ltd. Technique for canceling the effect of external vibration on an atomic force microscope

Also Published As

Publication number Publication date
JPH0363001B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-09-27
US4726685A (en) 1988-02-23

Similar Documents

Publication Publication Date Title
JPS5990007A (ja) 光学式寸度測定装置
US4660980A (en) Apparatus for measuring thickness of object transparent to light utilizing interferometric method
US4514083A (en) Distance measuring apparatus
JPS58200137A (ja) 定在波干渉計
EP0792438B1 (en) Method and device for determining the thickness of a layer applied to an optical fiber
CN109084692B (zh) 带有折射镜的差分式位移传感器及其测量方法
JPH0467889B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
US5870199A (en) Method and apparatus for highly accurate distance measurement with respect to surfaces
US5051575A (en) Optical surface roughness measuring apparatus using double-focus lens for producing parallel and converged beams for measurement
JPS5979122A (ja) レ−ザパワ−測定装置
JPH07113547B2 (ja) 試料面位置測定装置
JPS6262208A (ja) 距離測定装置および距離測定方法
JPS5983116A (ja) 光学系の調整装置
JPS5946808A (ja) 光フアイバによる物体の変位測定方法
JPS63153442A (ja) ビ−ムスプリツタの光学特性測定装置
JPH0534437A (ja) レーザ測距装置
RU1775598C (ru) Способ измерени параметров прозрачных труб и устройство дл его осуществлени
RU2148790C1 (ru) Способ и устройство для высокоточного бесконтактного измерения расстояний поверхностей
JPS61265539A (ja) 光学装置
JPH0210282A (ja) レーザレーダ装置
RU1796901C (ru) Устройство дл бесконтактного измерени профил деталей
JPS58200436A (ja) 焦点検出装置
JPH0560557A (ja) 光学式微小変位測定方法及び装置
SU1730533A1 (ru) Устройство дл измерени углового положени объекта
JPH0476071B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)