JPS5989417A - マスク設定方法 - Google Patents

マスク設定方法

Info

Publication number
JPS5989417A
JPS5989417A JP57200062A JP20006282A JPS5989417A JP S5989417 A JPS5989417 A JP S5989417A JP 57200062 A JP57200062 A JP 57200062A JP 20006282 A JP20006282 A JP 20006282A JP S5989417 A JPS5989417 A JP S5989417A
Authority
JP
Japan
Prior art keywords
mask
alignment
wafer
mark
objective lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57200062A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6352767B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Naoki Ayada
綾田　直樹
Yasumi Yamada
山田　保美
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP57200062A priority Critical patent/JPS5989417A/ja
Priority to US06/550,097 priority patent/US4655599A/en
Publication of JPS5989417A publication Critical patent/JPS5989417A/ja
Publication of JPS6352767B2 publication Critical patent/JPS6352767B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP57200062A 1982-11-15 1982-11-15 マスク設定方法 Granted JPS5989417A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP57200062A JPS5989417A (ja) 1982-11-15 1982-11-15 マスク設定方法
US06/550,097 US4655599A (en) 1982-11-15 1983-11-09 Mask aligner having a photo-mask setting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57200062A JPS5989417A (ja) 1982-11-15 1982-11-15 マスク設定方法

Publications (2)

Publication Number Publication Date
JPS5989417A true JPS5989417A (ja) 1984-05-23
JPS6352767B2 JPS6352767B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-10-20

Family

ID=16418201

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57200062A Granted JPS5989417A (ja) 1982-11-15 1982-11-15 マスク設定方法

Country Status (1)

Country Link
JP (1) JPS5989417A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62167602A (ja) * 1986-01-20 1987-07-24 Sony Corp ビデオテ−プレコ−ダの回転ヘツド装置
JPS62299029A (ja) * 1986-06-18 1987-12-26 Fujitsu Ltd 位置合わせ装置
JPH01191005A (ja) * 1988-01-27 1989-08-01 Canon Inc マーク検知装置及び方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62167602A (ja) * 1986-01-20 1987-07-24 Sony Corp ビデオテ−プレコ−ダの回転ヘツド装置
JPS62299029A (ja) * 1986-06-18 1987-12-26 Fujitsu Ltd 位置合わせ装置
JPH01191005A (ja) * 1988-01-27 1989-08-01 Canon Inc マーク検知装置及び方法

Also Published As

Publication number Publication date
JPS6352767B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-10-20

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