JPS5987742A - 荷電粒子用レンズ - Google Patents
荷電粒子用レンズInfo
- Publication number
- JPS5987742A JPS5987742A JP57197966A JP19796682A JPS5987742A JP S5987742 A JPS5987742 A JP S5987742A JP 57197966 A JP57197966 A JP 57197966A JP 19796682 A JP19796682 A JP 19796682A JP S5987742 A JPS5987742 A JP S5987742A
- Authority
- JP
- Japan
- Prior art keywords
- lens
- iris
- magnetic
- ion
- electrostatic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002245 particle Substances 0.000 title claims description 5
- 238000004804 winding Methods 0.000 claims abstract description 5
- 239000002131 composite material Substances 0.000 claims 1
- 238000010884 ion-beam technique Methods 0.000 abstract description 11
- 238000010894 electron beam technology Methods 0.000 abstract description 8
- 150000002500 ions Chemical class 0.000 description 7
- 238000004458 analytical method Methods 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 240000001548 Camellia japonica Species 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 235000018597 common camellia Nutrition 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000000682 scanning probe acoustic microscopy Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/145—Combinations of electrostatic and magnetic lenses
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57197966A JPS5987742A (ja) | 1982-11-11 | 1982-11-11 | 荷電粒子用レンズ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57197966A JPS5987742A (ja) | 1982-11-11 | 1982-11-11 | 荷電粒子用レンズ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5987742A true JPS5987742A (ja) | 1984-05-21 |
| JPH0332852B2 JPH0332852B2 (enrdf_load_stackoverflow) | 1991-05-15 |
Family
ID=16383280
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57197966A Granted JPS5987742A (ja) | 1982-11-11 | 1982-11-11 | 荷電粒子用レンズ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5987742A (enrdf_load_stackoverflow) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS535962A (en) * | 1976-07-06 | 1978-01-19 | Matsushita Electric Ind Co Ltd | Electron microscope |
-
1982
- 1982-11-11 JP JP57197966A patent/JPS5987742A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS535962A (en) * | 1976-07-06 | 1978-01-19 | Matsushita Electric Ind Co Ltd | Electron microscope |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0332852B2 (enrdf_load_stackoverflow) | 1991-05-15 |
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