JPH0332852B2 - - Google Patents

Info

Publication number
JPH0332852B2
JPH0332852B2 JP57197966A JP19796682A JPH0332852B2 JP H0332852 B2 JPH0332852 B2 JP H0332852B2 JP 57197966 A JP57197966 A JP 57197966A JP 19796682 A JP19796682 A JP 19796682A JP H0332852 B2 JPH0332852 B2 JP H0332852B2
Authority
JP
Japan
Prior art keywords
lens
aperture
magnetic
sample
electrostatic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57197966A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5987742A (ja
Inventor
Tatsuya Adachi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP57197966A priority Critical patent/JPS5987742A/ja
Publication of JPS5987742A publication Critical patent/JPS5987742A/ja
Publication of JPH0332852B2 publication Critical patent/JPH0332852B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/145—Combinations of electrostatic and magnetic lenses

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP57197966A 1982-11-11 1982-11-11 荷電粒子用レンズ Granted JPS5987742A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57197966A JPS5987742A (ja) 1982-11-11 1982-11-11 荷電粒子用レンズ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57197966A JPS5987742A (ja) 1982-11-11 1982-11-11 荷電粒子用レンズ

Publications (2)

Publication Number Publication Date
JPS5987742A JPS5987742A (ja) 1984-05-21
JPH0332852B2 true JPH0332852B2 (enrdf_load_stackoverflow) 1991-05-15

Family

ID=16383280

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57197966A Granted JPS5987742A (ja) 1982-11-11 1982-11-11 荷電粒子用レンズ

Country Status (1)

Country Link
JP (1) JPS5987742A (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS535962A (en) * 1976-07-06 1978-01-19 Matsushita Electric Ind Co Ltd Electron microscope

Also Published As

Publication number Publication date
JPS5987742A (ja) 1984-05-21

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