JPS5986950U - 研磨加工装置 - Google Patents
研磨加工装置Info
- Publication number
- JPS5986950U JPS5986950U JP13754483U JP13754483U JPS5986950U JP S5986950 U JPS5986950 U JP S5986950U JP 13754483 U JP13754483 U JP 13754483U JP 13754483 U JP13754483 U JP 13754483U JP S5986950 U JPS5986950 U JP S5986950U
- Authority
- JP
- Japan
- Prior art keywords
- tank
- utility
- polishing
- processing apparatus
- model registration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005498 polishing Methods 0.000 title claims description 6
- 239000000463 material Substances 0.000 claims description 4
- 230000005540 biological transmission Effects 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims description 2
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 claims 1
- 239000006061 abrasive grain Substances 0.000 claims 1
- 238000004026 adhesive bonding Methods 0.000 claims 1
- 229910001570 bauxite Inorganic materials 0.000 claims 1
- 239000000919 ceramic Substances 0.000 claims 1
- 229910000423 chromium oxide Inorganic materials 0.000 claims 1
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 229910003460 diamond Inorganic materials 0.000 claims 1
- 239000010432 diamond Substances 0.000 claims 1
- 238000010030 laminating Methods 0.000 claims 1
- 229910010271 silicon carbide Inorganic materials 0.000 claims 1
- 239000003082 abrasive agent Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13754483U JPS5986950U (ja) | 1983-09-05 | 1983-09-05 | 研磨加工装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13754483U JPS5986950U (ja) | 1983-09-05 | 1983-09-05 | 研磨加工装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5986950U true JPS5986950U (ja) | 1984-06-12 |
| JPH0518048Y2 JPH0518048Y2 (enExample) | 1993-05-13 |
Family
ID=30308908
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13754483U Granted JPS5986950U (ja) | 1983-09-05 | 1983-09-05 | 研磨加工装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5986950U (enExample) |
-
1983
- 1983-09-05 JP JP13754483U patent/JPS5986950U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0518048Y2 (enExample) | 1993-05-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US20040166788A1 (en) | Sanding disc | |
| JPS5986950U (ja) | 研磨加工装置 | |
| US1587843A (en) | Polishing tool | |
| JP2002126981A (ja) | 円板状部材周縁部研磨装置 | |
| JP3128259B2 (ja) | 床研磨機及び床研磨方法 | |
| JPH10315121A (ja) | 平面研磨装置 | |
| JPH02303759A (ja) | ウェハ周縁部の研磨方法 | |
| JPH08521U (ja) | 研磨用具 | |
| JPH04129656A (ja) | 半導体ウエハの面取加工装置 | |
| JP3024557U (ja) | 扁平な円筒の外周面に、布状の研磨材を巻きつけた研磨用具 | |
| JP3004012U (ja) | 回転砥石 | |
| JPH10100064A (ja) | 研磨装置及び研磨方法 | |
| JPH069869U (ja) | 研磨具 | |
| JP2585486Y2 (ja) | 半導体ウェハの研磨装置 | |
| JPS5875665U (ja) | 磁気ヘツド用円筒研磨機 | |
| JPS6176278A (ja) | 複合式回転研摩材 | |
| JPS58211864A (ja) | 両面サンド研磨材 | |
| JPH04109849U (ja) | 碍子サンド部の研磨装置 | |
| US3579925A (en) | Abrasive wheel | |
| JPS58126050A (ja) | 円錐形または円とう形物体の表面研磨装置 | |
| JPH0290058U (enExample) | ||
| JPS62141463U (enExample) | ||
| JPS63136865U (enExample) | ||
| JPH063564U (ja) | 積層した研磨材を有する研磨装置 | |
| JPH09309074A (ja) | 研磨ホイール |