JPS5978433A - 電磁式対物レンズ - Google Patents
電磁式対物レンズInfo
- Publication number
- JPS5978433A JPS5978433A JP57187869A JP18786982A JPS5978433A JP S5978433 A JPS5978433 A JP S5978433A JP 57187869 A JP57187869 A JP 57187869A JP 18786982 A JP18786982 A JP 18786982A JP S5978433 A JPS5978433 A JP S5978433A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic pole
- objective lens
- pole piece
- lower magnetic
- saturation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005284 excitation Effects 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 5
- 230000004907 flux Effects 0.000 claims description 4
- 239000002245 particle Substances 0.000 claims description 4
- 230000004075 alteration Effects 0.000 description 12
- 238000010894 electron beam technology Methods 0.000 description 7
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 229910000859 α-Fe Inorganic materials 0.000 description 2
- 229910001209 Low-carbon steel Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57187869A JPS5978433A (ja) | 1982-10-26 | 1982-10-26 | 電磁式対物レンズ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57187869A JPS5978433A (ja) | 1982-10-26 | 1982-10-26 | 電磁式対物レンズ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5978433A true JPS5978433A (ja) | 1984-05-07 |
| JPH0234417B2 JPH0234417B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-08-03 |
Family
ID=16213636
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57187869A Granted JPS5978433A (ja) | 1982-10-26 | 1982-10-26 | 電磁式対物レンズ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5978433A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0613009A (ja) * | 1993-04-26 | 1994-01-21 | Hitachi Ltd | 走査形電子顕微鏡 |
| JP2009205936A (ja) * | 2008-02-28 | 2009-09-10 | Hitachi High-Technologies Corp | 走査電子顕微鏡 |
-
1982
- 1982-10-26 JP JP57187869A patent/JPS5978433A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0613009A (ja) * | 1993-04-26 | 1994-01-21 | Hitachi Ltd | 走査形電子顕微鏡 |
| JP2009205936A (ja) * | 2008-02-28 | 2009-09-10 | Hitachi High-Technologies Corp | 走査電子顕微鏡 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0234417B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-08-03 |