JPS597732Y2 - 分析電子顕微鏡 - Google Patents

分析電子顕微鏡

Info

Publication number
JPS597732Y2
JPS597732Y2 JP5786278U JP5786278U JPS597732Y2 JP S597732 Y2 JPS597732 Y2 JP S597732Y2 JP 5786278 U JP5786278 U JP 5786278U JP 5786278 U JP5786278 U JP 5786278U JP S597732 Y2 JPS597732 Y2 JP S597732Y2
Authority
JP
Japan
Prior art keywords
sample
heating
detector
power source
electron microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5786278U
Other languages
English (en)
Japanese (ja)
Other versions
JPS54159956U (enExample
Inventor
好則 青木
滋賢 桜井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP5786278U priority Critical patent/JPS597732Y2/ja
Publication of JPS54159956U publication Critical patent/JPS54159956U/ja
Application granted granted Critical
Publication of JPS597732Y2 publication Critical patent/JPS597732Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP5786278U 1978-04-28 1978-04-28 分析電子顕微鏡 Expired JPS597732Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5786278U JPS597732Y2 (ja) 1978-04-28 1978-04-28 分析電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5786278U JPS597732Y2 (ja) 1978-04-28 1978-04-28 分析電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS54159956U JPS54159956U (enExample) 1979-11-08
JPS597732Y2 true JPS597732Y2 (ja) 1984-03-09

Family

ID=28956142

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5786278U Expired JPS597732Y2 (ja) 1978-04-28 1978-04-28 分析電子顕微鏡

Country Status (1)

Country Link
JP (1) JPS597732Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0610614Y2 (ja) * 1986-08-18 1994-03-16 株式会社島津製作所 表面分析装置における励起銃の保護構造

Also Published As

Publication number Publication date
JPS54159956U (enExample) 1979-11-08

Similar Documents

Publication Publication Date Title
JP5744394B2 (ja) 電子顕微鏡用x線検出器
JPS6327419Y2 (enExample)
JP2009003094A (ja) 箱型顕微鏡装置
US20250231100A1 (en) Analysis device
JPS597732Y2 (ja) 分析電子顕微鏡
US2826701A (en) Low temperature chamber for electronoptics instruments
JPH01255143A (ja) 電子顕微鏡におけるx線分析装置
US5588999A (en) Thin film forming device
JPH06338281A (ja) 走査電子顕微鏡
Medley et al. Periscope‐camera system for visible and infrared imaging diagnostics on TFTR
JP2010066121A (ja) X線回折装置およびx線回折方法
JPH0465490B2 (enExample)
JPS6021464B2 (ja) X線管及びそれを見えるx線けい光分析装置
US10269536B2 (en) Electron microscope
JPH07253472A (ja) 放射線検出器用ヘリウム3クライオスタットおよび分析装置
US20170236680A1 (en) Charged Particle Beam System
US3209146A (en) Apparatus for adjusting position of a sample for electron probe x-ray microanalyzer
US4214166A (en) Magnetic lens system for corpuscular radiation equipment
JP2008039500A (ja) 放射線検出装置及び放射線分析装置
JPS5850611Y2 (ja) 保護用遮蔽体機構
JP2004037345A (ja) 試料ホルダ及びx線装置
JP3222572B2 (ja) X線分析装置
JP2006226800A (ja) 超伝導x線検出装置及びそれを用いた超伝導x線分析装置
EP3220135B1 (en) X-ray analyzer
FULLER Variable-temperature sample system for ion implantation at-192 to+ 500 deg C(exchange-gas coupling)