JPS5975422A - Thin film magnetic head - Google Patents

Abstract

PURPOSE:To obtain a track width having high accuracy by forming at least the 1st magnetic layer of the 1st and the 2nd magnetic layers of a thin film, providing a groove in a substrate in such a way as to regulate the track width on the top surface of said thin film and forming a magnetic film in the groove. CONSTITUTION:A resist or mask 11 is provided on a substrate 1 apart by a prescribed size l3 therefrom and a groove 12 is formed on the substrate 1 by etching, whereafter the 1st magnetic layer 13 is laminated in the groove 12. After the layer 13 is flattened flush with the substrate 1, an insulation layer 3 is formed and the 2nd magnetic layer 10 is formed on the layer 13. Otherwise, the magnetic layer is formed on the substrate 1 and thereafter a mask for regulating a track width l2 is provided thereon and the magnetic layer is etched to form a lower magnetic layer 8 of a trapezoidal shape, then a nonmagnetic layer 9 of SiO2 or the like is formed on the substrate and is lapped flush with the magnetic layer. The 2nd magnetic layer 10 is provided after the formation of the layer 3. The easy formation of the track width having high accuracy in thus made possible.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a thin film magnetic head, and particularly to a thin film magnetic head having a structure suitable for achieving highly accurate track width.

A recent challenge in magnetic recording is how to improve recording density. Accordingly, there is a need to develop a magnetic head with a narrow track with high precision.

In particular, when a metal powder tape with high coercive force is assumed as a recording medium, in a thin-film magnetic head using a magnetic thin film, the thickness of the magnetic thin film must be made relatively thick in order to improve recording performance. However, it is difficult to narrow the track with high accuracy using a thick magnetic thin film with a thin film magnetic head having a conventional structure. The prior art will be explained below using FIGS. 1 to 4.

[Prior art]

FIG. 1 is a sectional view of a thin film magnetic head, FIG. 2 is a structural diagram of a recording medium sliding surface of a conventional thin film magnetic head, and FIGS. 6 and 4 are illustrations of the manufacturing process of FIG. 2. In FIGS. 1 and 2, 1 is a substrate made of ferrite or glass, 2 is a first magnetic layer, 3 is an insulating layer made of St Ot or pigeon 03 which becomes a magnetic gap, and 4 is a conductor forming a coil. 5 is an insulator made of 5 int, AP, 20S or polyimide resin; 6 is a second magnetic layer forming a magnetic circuit with the first magnetic layer 2; 1st. second magnetic layer 2,
6 is made of Fe--Ni alloy, Fe-5t, -AH alloy, or amorphous alloy.

The track width of this magnetic head is shown in FIG.

The dimensions are shown in . Track width! , as shown in FIG. 6, a first magnetic layer 2, an insulating layer 6,
After forming the second magnetic layer 6, a resist 7 is applied thereon to have a length of mask dimension l. Thereafter, as shown in FIG. 4, the second magnetic layer 6 is dry or etched to ensure a track width l. In this case, if the second magnetic layer 6 has a taper angle θ and the thickness of the second magnetic layer 6 is h, then the track width 11 is t,=12+2h possible θ...・・・・・・
...It becomes il+.

As described above, in a thin film magnetic head having such a structure, the track width l has the relationship of the mask dimension G+the film thickness of the second magnetic layer 6 and the etching taper angle θ. Incidentally, although the dimension 12 of the mask can be determined with considerable precision, it is difficult to accurately control the film thickness of the second magnetic layer 6 and the etching taper angle θ. It varies depending on the temperature, etching rate, and etching method (dry or soet). Furthermore, as mentioned above, the film thickness of the second magnetic layer 6 must be increased in order to improve recording efficiency, and therefore the track width is reduced due to variations in the taper angle θ. , the variation in track width increases! ,
There is a problem in that it is difficult to achieve high accuracy.

[Purpose of the invention]

The present invention has been made in view of the above, and an object of the present invention is to provide a thin film magnetic head that can provide a highly accurate track width.

[Summary of the invention]

The features of the present invention are as follows. The present invention is characterized in that at least the first magnetic layer of the second magnetic layer is formed of a magnetic thin film, and the track width is regulated on the upper surface of the magnetic thin film.

[Embodiments of the invention]

Embodiments of the present invention shown in FIGS. 5 and 6 and 7.
This will be explained in detail with reference to FIGS.

FIG. 5 is a structural diagram of a recording medium sliding surface showing an embodiment of the thin film magnetic head of the present invention. In FIG. 5, 1 is a substrate made of a non-magnetic material, 8 is a first magnetic layer made of a magnetic thin film formed on the substrate 1, and the first magnetic layer 8 is the second magnetic layer of the conventional example. Etching was carried out using the same method as in the etching method B, and the dimension 12 of the mask was made equal to the track width l to ensure a highly accurate track width.

9 is a non-magnetic layer made of Sin, M, 03, etc. that is laminated on the substrate 1 after etching the first magnetic layer 8; It is flattened so that it is the same as the top surface. For this flattening, a lift-off method may be used in addition to techniques such as wrapping. 3 is an insulating layer (non-1iyX) laminated on the upper surface of the first magnetic layer 8 and non-magnetic layer 9 to a predetermined thickness to form a magnetic gap. This is the second magnetic layer laminated in this manner. However, it goes without saying that the cross-sectional view of this thin film magnetic head is similar to that in FIG.

According to the embodiment of the present invention described above, the first magnetic layer 8 is formed of a magnetic thin film, and the track width is increased by etching the first magnetic layer 8. 1, so the track width! The accuracy of , is determined only by the dimensional accuracy of the mask, and does not depend on the taper angle θ or the film thickness as in the conventional case, so it is possible to achieve a highly accurate track width.

FIG. 6 is a diagram corresponding to FIG. 5 showing another embodiment of the present invention. Further, FIGS. 7 to 9 are explanatory diagrams of steps for manufacturing the thin film magnetic head shown in FIG. 6. First, as shown in FIG. 7, a resist or mask 11 is formed on a flat substrate 1 by opening a predetermined dimension l, and then, as shown in FIG. 8, the substrate is etched by dry or wet etching. 1 to form grooves 12.

Thereafter, as shown in FIG. 9, a first magnetic layer 16 is stacked and formed within the groove 12, and is planarized in the same manner as the upper surface of the substrate 1 by a technique such as lapping. Next, as shown in FIG. 6, an insulating layer (non-magnetic) 6 and a second magnetic layer 10, which serve as a magnetic gap, are sequentially laminated on the upper surfaces of the substrate 1 and the first magnetic layer 16. In this case, the substrate 1 may be made of photosensitive crystalline glass 7, and the grooves 12 shown in FIG. 8 may be formed by the difference in etch seam 1 between the exposed and non-exposed areas. .

In this case, the track width is as shown in Figure 6! , and since this accuracy of /3 is determined only by the mask dimensional accuracy, high accuracy of the track width can be achieved as in the case of FIG. 5.

In addition, in the embodiment shown in FIGS. 5 and 6, the second
A magnetic thin film is adopted as the magnetic layer 10 of the first magnetic layer 8 or 1'!, but the second magnetic layer 10 does not necessarily have to be a thin film. A bulk-shaped magnetic material having a width equal to or larger than the upper surface of I may be used, and the effect will not change thereby.

〔Effect of the invention〕

As described above, according to the present invention, a thin film magnetic head with a highly accurate track width can be obtained.

[Brief explanation of drawings]

Fig. 1 is a cross-sectional view of a thin film magnetic head, Fig. 2 is a structural diagram of a recording medium sliding surface of a conventional thin film magnetic head, Figs. 6 and 4 are explanatory diagrams of the manufacturing process of Fig. 2, and Fig. 5 The figure is a structural diagram of a recording medium sliding surface showing one embodiment of the thin film magnetic head of the present invention, FIG. 6 is a structural diagram corresponding to FIG. 5 showing another embodiment of the present invention, and FIGS. FIG. 9 is an explanatory diagram of the manufacturing process of FIG. 6. 1......Substrate 3...Insulating layer 4...Conductor 8, 13,...・First magnetic layer 9...
...Nonmagnetic layer 10...Second magnetic layer 12...Groove Figure 1 Sugar Figure 2 Story 3 Figure η4 Figure Whisper S Figure Absolute 6 pictures

Claims (1)

[Claims] 1. A first magnetic layer, an insulating layer forming a magnetic gap, a conductor forming a coil, and a second magnetic layer forming a magnetic circuit with the first magnetic layer are each formed into predetermined shapes on a substrate. In the thin film magnetic head formed by sequentially laminating at least the first
1. A thin film magnetic head characterized in that the magnetic layer is formed of a magnetic thin film, and the track width is regulated on the upper surface of the magnetic thin film. 2. The thin film magnetic head according to claim 1, wherein the second magnetic layer is made of a bulk magnetic material having a width wider than the upper surface of the first magnetic layer. 3. The substrate is made of photosensitive crystalline glass, and the first substrate is made of photosensitive crystalline glass.
3. A thin film magnetic head according to claim 1, wherein a groove is formed in which a magnetic layer is laminated.