JPS61255518A - Production of magnetic head - Google Patents

Abstract

PURPOSE:To improve the reproduction output of a magnetic head by forming and flattening a photosensitive nonmagnetic insulated layer on the space of a coil after formation of the coil, forming a nonmagnetic insulated layer on the coil and the photosensitive nonmagnetic insulated layer and providing an upper magnetic pole on the nonmagnetic insulated layer. CONSTITUTION:A conduction coil 5 is made of Cu, etc. by a selective etching process, etc. and a nonmagnetic insulated layer 6' is formed only in a coil space. Then the layer 6' is exposed to light with the prescribed prebaking and then developed so that the layer 6' remains only at a place between coil spaces. Then a photosensitive nonmagnetic insulated layer 6 is coated and exposed for development within a desired range with prebaking. The layer 6 is flattened with baking and an upper magnetic pole 3 with no recessed/projected part is formed.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method of manufacturing a magnetic head used for recording and reproducing magnetic recording such as a VTR1 magnetic disk.

[Summary of the invention]

The present invention provides a method for manufacturing a thin film magnetic head in which, after forming the coil, a photosensitive nonmagnetic insulating layer is formed in the space of the coil, flattened, and then a nonmagnetic insulating layer is formed on the coil and the photosensitive nonmagnetic insulating layer. This thin-film magnetic head is characterized by having a top magnetic layer formed on top of the top magnetic layer, and by flattening the nonmagnetic insulating layer, the unevenness of the top magnetic pole is eliminated and deterioration in magnetic performance is prevented. This is a manufacturing method.

[Conventional technology]

FIG. 2 shows the cross-sectional structure of the thin film magnetic head.

It consists of a lower magnetic pole 2 formed on a substrate 1, a magnetic gear lug layer 4 located on the lower magnetic pole 2 and sandwiched between an upper magnetic pole 5, a nonmagnetic insulating layer 5, and a conductor coil 6.

Now, the magnetic properties of the lower magnetic pole 2 and the upper magnetic pole 6 are important factors in the thin film magnetic head, and especially when used in a high frequency band, high frequency magnetic permeability is desired. The lower magnetic pole 2 is therefore formed on a well-polished substrate. A surface roughness of 500A or less is desired. However, although the upper magnetic pole 3 is formed on the lower magnetic pole, a magnetic gap layer 4, a nonmagnetic insulating layer 5, and a conductor coil 6 are sandwiched therebetween.

Therefore, the upper magnetic pole 3 is ultimately formed on the nonmagnetic insulating layer 5. As shown in FIG. 4(b), after forming the coil 6, a non-magnetic insulating layer is coated on a predetermined area and exposed and developed, but the space between the coils becomes depressed and the top of the coil becomes convex, resulting in non-magnetic insulation. The layer becomes uneven. Since the upper magnetic pole 3 is formed thereon, the upper magnetic pole 3 naturally becomes uneven. [Problems and objects to be solved by the invention] Therefore, in the prior art, the upper magnetic pole 5 is formed as described above. Because of the severe unevenness, the magnetic properties deteriorate, especially the high-frequency magnetic permeability becomes low. As a result, the performance of the magnetic head deteriorates, the signal-to-noise ratio deteriorates, and the reproduction output also decreases.

Therefore, the present invention aims to improve such drawbacks, and its purpose is to flatten the non-magnetic insulating layer under the upper magnetic pole, eliminate unevenness of the upper magnetic pole, and form an upper magnetic pole with good magnetic properties. It is in.

[Means for solving problems]

The present invention relates to a method for manufacturing a thin film magnetic head comprising a plurality of layers of non-magnetic insulation between upper and lower magnetic poles made of a soft magnetic material and a coil made of a conductive material. It is characterized in that a photosensitive nonmagnetic insulating layer is applied to the area, the photosensitive nonmagnetic insulating layer is formed only in the space between the coils, and an upper magnetic pole is formed on the top layer.

[Effect]

According to the present invention, it is possible to flatten the non-magnetic insulating layer, and the upper electrode formed on the upper layer is also flattened, making it possible to prevent deterioration of magnetic properties due to unevenness and forming an upper magnetic pole. The inherent magnetic properties of the soft magnetic material can be brought out without causing a decrease in the S/N ratio or reproduction output.

〔Example〕

Hereinafter, the present invention will be explained in detail with reference to Examples.

Embodiment 1 FIG. 1 shows a sectional view of a completed thin film magnetic head completed according to the present invention. FIG. 2 is a sectional view of a completed thin film magnetic head according to the conventional method. FIG. 3 shows a process diagram after the coil is completed according to the present invention, and FIG. 744 shows a process diagram after the coil is completed according to the conventional method.

First, the conductive coil 6 is formed by selective deposition, selective etching, or a lift-off method, as shown in FIG. 3(,). This material is selected in consideration of the coil forming process, electrical resistance, etc., and the present inventors used Cu.

Next, as shown in FIG. 5(b), a nonmagnetic insulating layer is formed only in the coil space. As a method, a photosensitive nonmagnetic insulating material, ie, a photoresist, is applied to the entire surface. Next, a predetermined break baking is performed to form the nonmagnetic insulating layer 5'.
is exposed and developed so that it remains only between the coil spaces.

As a result, as shown in the pps diagram (b), the nonmagnetic insulating layer 5' is formed at approximately the same height as the coil. The inventors used a positive photoresist. After development, 1
Post-baking was carried out at 30C for 1 hour, then at 24C
Hard baking was performed at 0CX for 1 hour.

Next, a photosensitive nonmagnetic insulating layer was applied again, and break baking was performed, and the nonmagnetic insulating layer was exposed and developed to the required extent. Thereafter, bost baking and bird baking were performed in the same manner as described above. As shown in FIG. 3(c), the non-magnetic insulation I-6 is flattened.

Next, the upper magnetic pole 5 is formed.

Since the upper magnetic pole 3 is formed on the flattened nonmagnetic insulating layer 6, the upper magnetic pole 3 naturally becomes a layer with no unevenness.

Example 2 Following Example 1, after forming the non-magnetic insulating layer 6' between the coil spaces, a photosensitive non-magnetic insulating layer 4 was further formed.
S10. Or A2,0. It is also possible to use inorganic materials such as. In other words, since a photosensitive nonmagnetic insulating layer is formed and flattened in the coil space, the material of the nonmagnetic insulating layer thereon is Sin.

It is also possible to use Since this lI"910. or A@!03 is sputtered on the entire surface, a metal mask method or a lift-off method may be used. The present inventors sputtered SIO on the entire surface, and by the lift-off method, the necessary range of 810. patterned.

As a result, similar to Example 1, a flattened layer was obtained.

〔Effect of the invention〕

According to the present invention, since a photosensitive non-magnetic insulating layer is completely formed in the coil space, even if a non-magnetic insulating layer is formed in the coil space, it is flattened, and the upper magnetic pole is also flattened without any unevenness. Since the magnetic head is formed in a similar shape, there is no deterioration of magnetic properties due to unevenness, and a thin film magnetic head with a good signal-to-noise ratio and good reproduction output is provided.

[Brief explanation of drawings]

FIG. 1 is a completed sectional view of a thin film magnetic head according to the present invention, FIG. 2 is a completed sectional view of a thin film magnetic head according to a conventional method, and FIGS. 3 (&) to (d) are manufacturing process diagrams of a thin film magnetic head of the present invention. , No. 4+9 (a) to (c) are manufacturing process diagrams of a la air head by a conventional method. 1. Substrate 2 Lower magnetic pole 5 Upper magnetic pole 4 Gap layer & Conductor 1 coil & Non-magnetic insulating layer 6: Photosensitive non-magnetic insulating layer. Above note 1 picture 21! 1

Claims (1)

[Claims] In a method for manufacturing a thin film magnetic head in which a coil made of a plurality of nonmagnetic insulating layers and a conductive material is sandwiched between upper and lower magnetic poles made of a soft magnetic material, a photosensitive nonmagnetic material is applied to a predetermined region after forming the coil. A thin film characterized by applying an insulating layer, exposing and developing it so that a photosensitive non-magnetic insulating layer remains only in the spaces between the coils, then further forming a non-magnetic insulating layer, and forming an upper magnetic pole on top of the non-magnetic insulating layer. A method of manufacturing a magnetic head.