JPS61117715A - Thin film magnetic head - Google Patents

Abstract

PURPOSE:To give an excellent electromagnetic conversion characteristic to a thin film magnetic head by providing a projecting part with an organic insulating material in the position corresponding to a back gap and forming the second magnetic layer on this projecting part when plural layers of coils are formed between the first magnetic layer and the second magnetic layer through a gap layer on a substrate. CONSTITUTION:A positive photoresist with a novolak resin as the base is patterned on a substrate 1 to form a projecting part 2 having prescribed diameter and thickness in the position where a back gap 5 of the thin film magnetic head should be formed, and this projecting part 2 is hardened by heating. A lower magnetic layer 3 and a gap layer 4 are formed on the substrate 1 and the projecting part 2, and two layers of coils 7 and three layers of insulating films 6 are formed alternately, and an upper magnetic layer 8 is formed. Since the projecting part 2 is provided, the photoresist layer used for patterning of the magnetic layer 8 is prevented from being extremely thick near the back gap. Thus, a recessed part 5a of the gap part 5 of the magnetic layer 8 is reduced to form the uniform magnetic layer 8, thereby obtaining the thin film magnetic head superior in electromagnetic conversion characteristic.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Applications] The present invention relates to a thin film magnetic head, and more particularly to a thin film magnetic head that makes full use of electromagnetic induction effects to read and write to a magnetic recording medium.

[Conventional technology]

An example of the configuration of a conventional thin film magnetic head [In FIG.
- Through the back gap 15 in the part of one friend and the other:
The upper magnetic layer 18 is directly connected to the lower magnetic layer 13 at the
is formed.

An insulating film 16 is provided between the lower magnetic layer 13 and the upper magnetic layer 118.
The next coil 7 is formed into =9 which is intermittently insulated from each other.
is formed. This L-sized magnetic head is, for example,
It is described in Japanese Patent No. 5-84020.

In this L-shaped thin film magnetic head, the coil 70
Nine-way Vci, coil 7t that increases the number of turns and increases the output
- It is necessary to stack two or more layers.

[Problem that the invention seeks to solve]

However, coil 7? When the I-multilayer is used, the distance between the lower magnetic layer 13 and the upper magnetic layer 18 becomes larger, and the distance between the lower magnetic layer 13 and the upper magnetic layer 18 becomes larger.
The spacing is 0 μm or more. the result,
The coating thickness of the photoresist used for patterning (forming the film into a desired shape) the upper magnetic layer 18 becomes extremely thick in the vicinity of the back gap 15, and as a result, the ultraviolet rays used for patterning are exposed to the lower layer 1 of the photoresist. The disadvantage is that the desired buttering is impossible because it is difficult to reach the desired pattern.

Therefore, an object of the present invention is to provide a thin film magnetic head structure in which it is easy to form a multilayer coil.

[Means for deciding the issue]

The Vc structure of the present invention includes a first magnetic layer formed on a substrate, a coil disposed on the first magnetic layer and having a diameter of 2/ii or more, and a coil formed on the coil and outside the coil. A second magnetic layer that is connected to the first magnetic layer 1 through a gap layer and directly connected to the first magnetic layer at a back gap near the center of the coil, and a back gap between the first magnetic layer and the substrate. The organic insulator Vc is formed at the position corresponding to the gap with nine convex parts? To have? Features thin I! An I magnetic head is obtained.

〔Example〕

Next, the present invention will be described in detail with reference to the drawings showing one embodiment of the present invention.

In Figure 1, a photoresist (a positive photoresist based on novolac resin T) is placed on the substrate 1.
When patterning, the thickness is about 3 μm and the diameter is 50 mm.
A convex portion 2 of approximately μm size is formed. By keeping the convex portion 2 in an ambient temperature of about 200 to 250° C. for an appropriate time, polymerization of the VC process is promoted, and the material is baked into a Bakelite-like substance. The lower magnetic layer 3, the gear ring 4, the insulating M6, the coil 7, and the upper magnetic layer 8 are fabricated by conventional methods such as sputtering, photolithography, and gluing. The back gap 5 is formed on the protrusion 2.

Because of the presence of the convex portion 2, the concave portion 5a of the upper magnetic layer 8P of the notched gear lug 5 is smaller than that of a conventional thin film magnetic head. As a result, it is possible to prevent the photoresist layer used in patterning the upper magnetic layer 8 from becoming extremely thick near the back gap. Therefore, it becomes possible to form the upper magnetic layer 8 into a predetermined shape.

FIG. 3 shows a second embodiment of the invention. In this embodiment, the structure of the convex portion is tangled so that the convex portion B22b is stacked on the lower convex portion A22a to form a double structure. The convex portion A 22a is formed by the same method as described in the first embodiment, and the convex portion B 22b is formed on the multiplication convex portion A22a by the same method as described above.

The back gap 25 has a convex portion B 2 as in the first embodiment.
2b. It is possible to increase the thickness of the convex part by making the convex part multi-layered in this area, which makes it possible to increase the number of coil layers to three or more.

Note that the convex portions can be formed by the same manufacturing method as above even if Vc photosensitive polyimide full width is used instead of the above-mentioned 7 photoresist.

〔Effect of the invention〕

As described in detail above, in the thin exchanging permanent head of the present invention, exposure and development can be carried out while completely preventing the thickness of the photoresist used for patterning the upper magnetic layer from increasing in the vicinity of the back gap. It is possible to easily form the upper S magnetic layer into a predetermined shape, and the effect is that a thin film magnetic head with a high output power can be obtained using a multilayer coil. In addition, when the upper magnetic layer is formed by T-plating, it is possible to reduce the level difference between the frame and the back gear lug, and the non-uniformity of the composition of the upper magnetic layer is reduced. It is also possible to obtain a thin-film magnetic head with high performance.

[Brief explanation of drawings]

FIG. 1 is a cross-sectional view of the first embodiment of the present invention. FIG. 2 is a sectional view of an example of a conventional thin film magnetic head. FIG. 3 is a cross-sectional view (not shown) of a second embodiment of the present invention. $／I! r Figure 2

Claims (1)

[Claims] a first magnetic layer formed on a substrate; a two or more layer coil disposed on the first magnetic layer; and a first magnetic layer formed on the coil outside the coil. a second magnetic layer connected via a gap layer and directly connected to the first magnetic layer at a back gap near the center of the coil; and the back gap between the first magnetic layer and the substrate. What is claimed is: 1. A thin film magnetic head comprising a convex portion formed of an organic insulator at a position corresponding to the convex portion.