JPS5965491A - ピエゾ式微小変位装置 - Google Patents

ピエゾ式微小変位装置

Info

Publication number
JPS5965491A
JPS5965491A JP57174523A JP17452382A JPS5965491A JP S5965491 A JPS5965491 A JP S5965491A JP 57174523 A JP57174523 A JP 57174523A JP 17452382 A JP17452382 A JP 17452382A JP S5965491 A JPS5965491 A JP S5965491A
Authority
JP
Japan
Prior art keywords
piezo element
piezo
displacement device
contraction
expansion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57174523A
Other languages
English (en)
Japanese (ja)
Other versions
JPS639759B2 (enrdf_load_stackoverflow
Inventor
Yukio Kenbo
行雄 見坊
Tomohiro Kuji
久迩　朝宏
Nobuyuki Akiyama
秋山　伸幸
Mitsuyoshi Koizumi
小泉　光義
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP57174523A priority Critical patent/JPS5965491A/ja
Publication of JPS5965491A publication Critical patent/JPS5965491A/ja
Publication of JPS639759B2 publication Critical patent/JPS639759B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Microscoopes, Condenser (AREA)
JP57174523A 1982-10-06 1982-10-06 ピエゾ式微小変位装置 Granted JPS5965491A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57174523A JPS5965491A (ja) 1982-10-06 1982-10-06 ピエゾ式微小変位装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57174523A JPS5965491A (ja) 1982-10-06 1982-10-06 ピエゾ式微小変位装置

Publications (2)

Publication Number Publication Date
JPS5965491A true JPS5965491A (ja) 1984-04-13
JPS639759B2 JPS639759B2 (enrdf_load_stackoverflow) 1988-03-01

Family

ID=15980007

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57174523A Granted JPS5965491A (ja) 1982-10-06 1982-10-06 ピエゾ式微小変位装置

Country Status (1)

Country Link
JP (1) JPS5965491A (enrdf_load_stackoverflow)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62173711U (enrdf_load_stackoverflow) * 1986-04-22 1987-11-05
JPS6317060A (ja) * 1986-07-09 1988-01-25 Nec Corp 印字エレメント
JPS63146011A (ja) * 1986-12-09 1988-06-18 Nippon Telegr & Teleph Corp <Ntt> 視野可動拡大結像装置
JPH0192158U (enrdf_load_stackoverflow) * 1987-12-08 1989-06-16
JPH0192159U (enrdf_load_stackoverflow) * 1987-12-09 1989-06-16
JPH0192157U (enrdf_load_stackoverflow) * 1987-12-08 1989-06-16
JPH01153660U (enrdf_load_stackoverflow) * 1988-04-05 1989-10-23
JPH0233978U (enrdf_load_stackoverflow) * 1988-08-27 1990-03-05
JPH0296758U (enrdf_load_stackoverflow) * 1989-01-20 1990-08-01
JPH0296756U (enrdf_load_stackoverflow) * 1989-01-19 1990-08-01

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57120910A (en) * 1981-01-21 1982-07-28 Hitachi Ltd Minutely displacing device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57120910A (en) * 1981-01-21 1982-07-28 Hitachi Ltd Minutely displacing device

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62173711U (enrdf_load_stackoverflow) * 1986-04-22 1987-11-05
JPS6317060A (ja) * 1986-07-09 1988-01-25 Nec Corp 印字エレメント
JPS63146011A (ja) * 1986-12-09 1988-06-18 Nippon Telegr & Teleph Corp <Ntt> 視野可動拡大結像装置
JPH0192158U (enrdf_load_stackoverflow) * 1987-12-08 1989-06-16
JPH0192157U (enrdf_load_stackoverflow) * 1987-12-08 1989-06-16
JPH0192159U (enrdf_load_stackoverflow) * 1987-12-09 1989-06-16
JPH01153660U (enrdf_load_stackoverflow) * 1988-04-05 1989-10-23
JPH0233978U (enrdf_load_stackoverflow) * 1988-08-27 1990-03-05
JPH0296756U (enrdf_load_stackoverflow) * 1989-01-19 1990-08-01
JPH0296758U (enrdf_load_stackoverflow) * 1989-01-20 1990-08-01

Also Published As

Publication number Publication date
JPS639759B2 (enrdf_load_stackoverflow) 1988-03-01

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