JPS595973A - テストヘツド - Google Patents

テストヘツド

Info

Publication number
JPS595973A
JPS595973A JP11593782A JP11593782A JPS595973A JP S595973 A JPS595973 A JP S595973A JP 11593782 A JP11593782 A JP 11593782A JP 11593782 A JP11593782 A JP 11593782A JP S595973 A JPS595973 A JP S595973A
Authority
JP
Japan
Prior art keywords
test head
test
contact
measured
main body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11593782A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6338103B2 (en, 2012
Inventor
Hideo Matsui
秀夫 松井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP11593782A priority Critical patent/JPS595973A/ja
Publication of JPS595973A publication Critical patent/JPS595973A/ja
Publication of JPS6338103B2 publication Critical patent/JPS6338103B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G01R1/07378—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate adapter, e.g. space transformers

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP11593782A 1982-07-02 1982-07-02 テストヘツド Granted JPS595973A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11593782A JPS595973A (ja) 1982-07-02 1982-07-02 テストヘツド

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11593782A JPS595973A (ja) 1982-07-02 1982-07-02 テストヘツド

Publications (2)

Publication Number Publication Date
JPS595973A true JPS595973A (ja) 1984-01-12
JPS6338103B2 JPS6338103B2 (en, 2012) 1988-07-28

Family

ID=14674872

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11593782A Granted JPS595973A (ja) 1982-07-02 1982-07-02 テストヘツド

Country Status (1)

Country Link
JP (1) JPS595973A (en, 2012)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6139253A (ja) * 1984-07-30 1986-02-25 Pioneer Electronic Corp 磁気記録再生装置
JPH01288781A (ja) * 1988-05-17 1989-11-21 Tokyo Electron Ltd 検査装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5339876A (en) * 1976-09-24 1978-04-12 Takeda Riken Ind Co Ltd Ic tester

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5339876A (en) * 1976-09-24 1978-04-12 Takeda Riken Ind Co Ltd Ic tester

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6139253A (ja) * 1984-07-30 1986-02-25 Pioneer Electronic Corp 磁気記録再生装置
JPH01288781A (ja) * 1988-05-17 1989-11-21 Tokyo Electron Ltd 検査装置

Also Published As

Publication number Publication date
JPS6338103B2 (en, 2012) 1988-07-28

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