JPS595869U - 可変スリツト装置 - Google Patents

可変スリツト装置

Info

Publication number
JPS595869U
JPS595869U JP10051082U JP10051082U JPS595869U JP S595869 U JPS595869 U JP S595869U JP 10051082 U JP10051082 U JP 10051082U JP 10051082 U JP10051082 U JP 10051082U JP S595869 U JPS595869 U JP S595869U
Authority
JP
Japan
Prior art keywords
slit
movement amount
slit device
variable slit
moving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10051082U
Other languages
English (en)
Japanese (ja)
Other versions
JPS636847Y2 (enrdf_load_stackoverflow
Inventor
小山 忠男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP10051082U priority Critical patent/JPS595869U/ja
Publication of JPS595869U publication Critical patent/JPS595869U/ja
Application granted granted Critical
Publication of JPS636847Y2 publication Critical patent/JPS636847Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
JP10051082U 1982-07-02 1982-07-02 可変スリツト装置 Granted JPS595869U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10051082U JPS595869U (ja) 1982-07-02 1982-07-02 可変スリツト装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10051082U JPS595869U (ja) 1982-07-02 1982-07-02 可変スリツト装置

Publications (2)

Publication Number Publication Date
JPS595869U true JPS595869U (ja) 1984-01-14
JPS636847Y2 JPS636847Y2 (enrdf_load_stackoverflow) 1988-02-26

Family

ID=30237739

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10051082U Granted JPS595869U (ja) 1982-07-02 1982-07-02 可変スリツト装置

Country Status (1)

Country Link
JP (1) JPS595869U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105405734A (zh) * 2014-09-04 2016-03-16 Fei公司 在透射带电粒子显微镜中执行光谱术的方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105405734A (zh) * 2014-09-04 2016-03-16 Fei公司 在透射带电粒子显微镜中执行光谱术的方法
JP2016057294A (ja) * 2014-09-04 2016-04-21 エフ イー アイ カンパニFei Company 透過型荷電粒子顕微鏡内で分光を実行する方法
CN105405734B (zh) * 2014-09-04 2018-03-02 Fei 公司 在透射带电粒子显微镜中执行光谱术的方法

Also Published As

Publication number Publication date
JPS636847Y2 (enrdf_load_stackoverflow) 1988-02-26

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