JPS636847Y2 - - Google Patents

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Publication number
JPS636847Y2
JPS636847Y2 JP10051082U JP10051082U JPS636847Y2 JP S636847 Y2 JPS636847 Y2 JP S636847Y2 JP 10051082 U JP10051082 U JP 10051082U JP 10051082 U JP10051082 U JP 10051082U JP S636847 Y2 JPS636847 Y2 JP S636847Y2
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JP
Japan
Prior art keywords
slit
moving
axis
movement
holders
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10051082U
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English (en)
Japanese (ja)
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JPS595869U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10051082U priority Critical patent/JPS595869U/ja
Publication of JPS595869U publication Critical patent/JPS595869U/ja
Application granted granted Critical
Publication of JPS636847Y2 publication Critical patent/JPS636847Y2/ja
Granted legal-status Critical Current

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  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
JP10051082U 1982-07-02 1982-07-02 可変スリツト装置 Granted JPS595869U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10051082U JPS595869U (ja) 1982-07-02 1982-07-02 可変スリツト装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10051082U JPS595869U (ja) 1982-07-02 1982-07-02 可変スリツト装置

Publications (2)

Publication Number Publication Date
JPS595869U JPS595869U (ja) 1984-01-14
JPS636847Y2 true JPS636847Y2 (enrdf_load_stackoverflow) 1988-02-26

Family

ID=30237739

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10051082U Granted JPS595869U (ja) 1982-07-02 1982-07-02 可変スリツト装置

Country Status (1)

Country Link
JP (1) JPS595869U (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2993682A1 (en) * 2014-09-04 2016-03-09 Fei Company Method of performing spectroscopy in a transmission charged-particle microscope

Also Published As

Publication number Publication date
JPS595869U (ja) 1984-01-14

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