JPS5958349A - Gas detecting element - Google Patents

Gas detecting element

Info

Publication number
JPS5958349A
JPS5958349A JP17012582A JP17012582A JPS5958349A JP S5958349 A JPS5958349 A JP S5958349A JP 17012582 A JP17012582 A JP 17012582A JP 17012582 A JP17012582 A JP 17012582A JP S5958349 A JPS5958349 A JP S5958349A
Authority
JP
Japan
Prior art keywords
gas
oxide
zirconium
titanium
contg
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17012582A
Other languages
Japanese (ja)
Other versions
JPS6222414B2 (en
Inventor
Yoshihiko Nakatani
吉彦 中谷
Masayuki Sakai
界 政行
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP17012582A priority Critical patent/JPS5958349A/en
Publication of JPS5958349A publication Critical patent/JPS5958349A/en
Publication of JPS6222414B2 publication Critical patent/JPS6222414B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Abstract

PURPOSE:To provide high sensitivity for gaseous methane as well by using a compsn. contg. 0.1-50mol% tin, zirconium and titanium in total of additives respectively in terms of stannic oxide, zirconium oxide and titanium oxide as a gas sensitive element. CONSTITUTION:At least one among tin (Sn), zirconium (Zr) and titanium (Ti) are added as an additive to magnesium ferrite (MgFe2O4) contg. 0.005-10wt% sulfate ions. The compsn. contg. 0.1-50mol% said elements in total of additives respectively in terms of stannic oxide (SnO2), zirconium oxide (ZrO2) and titanium oxide (TiO2) is used as a gas sensitive element. Then the high sensitivity for gaseous methane is obtd. even at a relatively low operating temp. of 400 deg.C without adding any noble metal catalyst at all.

Description

【発明の詳細な説明】 産業上の71J用分野 本発明は可燃性ガスの検知に使用する複合金属酸化物半
導体を用いたガス検知素子に関するものである。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Use 71J The present invention relates to a gas detection element using a composite metal oxide semiconductor used to detect combustible gases.

従来例の構成とその問題点 iEL年−■」i2!< PIガスの検知素子イl′・
1について種々の研究開y;?’、が/11、重化して
きている1、これd、一般家庭を中心に名IIIj工、
腸などで−LIJ炒)性ガスによるi暴発事故\・翁市
ノノスによる中毒用故が多発し、大きな?L会問題と乙
、・でいることに強く起因しCい2)。
Conventional configuration and its problems iEL year-■ "i2! < PI gas detection element I'・
Various researches have been conducted regarding 1. ', 11, 1, this is getting worse, 3rd grade construction, mainly in general households,
In the intestines, etc. - LIJ) Accidents caused by sexual gases \・Accidents due to poisoning caused by Okinaichi Nonos have been occurring frequently, and is it a big problem? This is strongly caused by the L-party problem and the fact that it is C2).

!11にグHz;7カスQ、]1、炸゛、発下限界(L
EL)が低く、かつ比中がr)−気よりも大きく、部屋
に停tliljしやすいだめに°J1故があとを断たず
、毎年多数σ)死傷者を出している0 近年にな−っで、酸化第二錫(SnO2)やノノンマ型
酸化第二鉄(γ−P′e203)などの金属酸化物を用
いたガス検知素子が実用化され、ガス漏れ腎報著冷など
に応用されている。そして、カス曲れ斤どの事態が発生
してもLELに至るまでの間(て、)°[Jパンガスの
存在をいち早く検知し、′8発を未然に防げる」二うに
4−っている。
! 11 Hz; 7 CasQ, ] 1, explosion, lowering limit (L
In recent years - Therefore, gas detection elements using metal oxides such as stannic oxide (SnO2) and non-ma type ferric oxide (γ-P'e203) have been put into practical use, and have been applied to gas leak detection, cooling, etc. ing. And, no matter what kind of situation occurs, the presence of J-pan gas can be detected as soon as possible until the LEL is reached, and an attack can be prevented.''

ところで、[1本でもメタンガスを主成分とする液化天
然ガス(LNG)が一般家庭用としてjllいられるよ
うになり、徐々に普及して来ている。したがって、この
LNGの主成分であるメタンガスを感度よく検出するガ
ス検知素子の要請も非常に大きくなってきている。
By the way, even one bottle of liquefied natural gas (LNG), whose main component is methane gas, is now available for general household use, and it is gradually becoming popular. Therefore, the demand for gas detection elements that can detect methane gas, which is the main component of LNG, with high sensitivity has become extremely large.

勿論、すでにメタンガスに感応するガス検知素子は開発
されてはいるが、その多くQ:」感応体4E料に増感剤
として貴金属触婬を月1いているため−;111j々の
ガスによる触媒被毒の問題−メタンガスに対する感度が
小さい点、あるいrj′l’、’+件の経時変化が大き
い点などの課題を抱えている。
Of course, gas detection elements sensitive to methane gas have already been developed, but most of them are catalyzed by gases such as Problems with toxicity - Problems include low sensitivity to methane gas and large changes in rj'l' and '+ over time.

例えば、メタンガスはそれ自身非常に安定なカスである
だけに、これに十分な感度化・イJする検知素子は非常
に高活性である心安があるが、従来はメタンガスに対し
て大きな感度イ〔実現するだめに、貫金属触媒を感応体
拐料に添加l−で月1いるか、あるいは感応体を例えば
460”″C以上のかなり高い温度で動作させるなどの
工夫がなされてきた。しかしながら、実用に際して未だ
不十分な特性であるのが現状である。
For example, since methane gas itself is a very stable gas, there is peace of mind that a detection element with sufficient sensitivity and high activity is highly active. In order to achieve this, various measures have been taken, such as adding a transmetallic catalyst to the susceptor carrier once a month, or operating the susceptor at a considerably high temperature, for example, 460''C or higher. However, the current situation is that the properties are still insufficient for practical use.

発明の目的 本発明はこのような状況に鑑みてなされたもので、貴金
属触0.−1を一切添加することなく一寸た4 00 
”にと比較的低い動作温度でも対メタン感度の大きいガ
ス検知素子を実現するものである。
OBJECT OF THE INVENTION The present invention has been made in view of the above circumstances, and is based on the use of precious metals. 400 without adding any -1
The goal is to realize a gas detection element with high sensitivity to methane even at relatively low operating temperatures.

発明の構成 本発明はマダイ、ノウムノエシイl−(MgFe204
)をガス感応体とl−で用いたガス検知素子において−
これに含7トれる種々の陰イオンのガス感応特性に及ぼ
す影響ならびに添加物の効果について倹d−1シている
中で見い出されたものである○ すなわち本発明のガス検知素子は、硫酸イメ”ンが0.
005〜10重尾6%含有されたMgFe204に、添
加物としく: Sn 、 ZrおよびT1のうち少なく
とモヒとつが、それぞれSnO2,ZrO2およびTi
O2に換饅しC添加’l’/71VC:、量で0.1〜
60モル%含むものをガスム・Y芯体として用いたもの
であり、こitはガス感L1°。、(体の1さ)拐料で
ある硫酸イメーンを含有するL(gFe20+ K S
n 、 Zrあるいは1°1 と添加することにより、
ガス感応特性とその信頼性が飛躍的に向上し、しかも先
述のメタンガスに対しても実fTJ上十分大きな/it
?:度を実現し得ることを見出したことによってなされ
たものである。
Structure of the Invention The present invention is directed to the use of red sea bream, Noumunoeshii l-(MgFe204
) in a gas sensing element using a gas sensitive body and l-
This was discovered while conducting research on the effects of various anions contained in this gas on the gas sensitivity characteristics as well as the effects of additives. In other words, the gas sensing element of the present invention “N is 0.
Additives to MgFe204 containing 6% of 005-10: at least one of Sn, Zr and T1 are added to SnO2, ZrO2 and Ti, respectively.
Exchanging O2 and adding C 'l'/71VC: 0.1~ in amount
A material containing 60 mol% was used as the Gasm Y core, and the gas feeling was L1°. , (1st part of the body) L(gFe20+ K S
By adding n, Zr or 1°1,
The gas sensitivity characteristics and its reliability have been dramatically improved, and the actual fTJ is sufficiently large even for the aforementioned methane gas.
? : This was achieved by discovering that it was possible to achieve a certain degree.

実施例の説明 以臼て本発明の詳細な説明する。1ず実施例1において
は、MgFe2O4に含有さ)l、る(u15酸イオン
の量を一定にし、添加物であるSn 、 Zrあるいは
T1 の添加量ならびにそれらの組み合わせを変えた場
合について述べることにする。
DESCRIPTION OF EMBODIMENTS The present invention will now be described in detail. First, in Example 1, we will discuss the case where the amount of acid ions contained in MgFe2O4 is kept constant, and the amount of additives Sn, Zr, or T1 and their combinations are changed. do.

〔実施例1〕 酸化マグネ7ウム(MgO)の市販試薬を20,9、酸
化第二鉄(Fe20+)  の市販試薬を80.ゾぞJ
zぞノ1.秤f′I′y、L、これをステンレススチー
ル製のポットで5時間溝式混合した。この混合物ケ乾燥
、粉砕し、然る後に1300゛Cの蒲、度で211.’
41i!l熱処:T!t! した。これを再度粉砕し、
これに硫酸・fオン6−含有させるため添加物として、
硫酸第二鉄(Fe 2 (so 4 )3−、IF12
0)試薬を25.!7添加し、らいかい磯で2時間混合
した。これらの混合物をいくつかに等分割し、これにそ
れぞれ市販の酸化第二錫(sno2)、酸化ジルコニウ
ム(Zr02)および酸化チタン(TiO2)試・12
謁7、単独あるいは複数の組み合わせで添加し7だ。そ
してそれぞれの粉体をさらにL゛ツいかい機−C311
,’j間乾乾式混合た。そしてこれらにそれぞれイ」(
フパイングーを加えてioo〜200μの大きさの粒−
工に整粒した。次にこれらの粉体を的方体形状に加圧成
型し、空気中で600パCのど1情度で1時間)尭成し
−だ。次にこの焼結体の表面にAu を蒸箔しく一−一
対の櫛形電極を形成(7、その裏面にrl′白金1v、
熱体イC無機接着剤で貼りつけてヒータとし検知素了不
二作製した。、この発熱体に電流を:l[uじ−−i−
の電b11゛、価を調節して素子の動作温IWを制御し
た1、斗(AL i’!□111度を400′”Cに保
持して、そのガス感応’l ’+’ l’lを1l11
しドした。
[Example 1] A commercially available reagent for magnesium oxide (MgO) was used at 20.9, and a commercially available reagent for ferric oxide (Fe20+) was used at 80.9. Zozo J
zzono 1. Balance f'I'y, L was used for groove mixing in a stainless steel pot for 5 hours. This mixture was dried, ground and then heated to 1300°C at 211°C. '
41i! l Heat treatment: T! T! did. Grind it again and
As an additive to add sulfuric acid/f-on 6- to this,
Ferric sulfate (Fe 2 (so 4 ) 3-, IF12
0) Add the reagent to 25. ! 7 was added and mixed for 2 hours on a raikai rock. These mixtures were equally divided into several parts, and commercially available stannic oxide (sno2), zirconium oxide (Zr02) and titanium oxide (TiO2) samples were added to each part.
Audience 7, added singly or in combination is 7. Then, each powder is further milled using the L miller-C311.
,'j was dry-mixed for a period of time. And for each of these
Add Fupain Gu and make grains of ioo~200μ in size.
The particles were carefully sized. Next, these powders were pressure-molded into a target shape and molded in air at 600 PaC for 1 hour. Next, on the surface of this sintered body, a pair of comb-shaped electrodes were formed by vaporizing Au (7, on the back side, 1v rl' platinum,
A sensing element was created by pasting the heating element IC with an inorganic adhesive and using it as a heater. , apply current to this heating element: l[uji-i-
The operating temperature IW of the element was controlled by adjusting the electric current b11゛ and the value of the element. 1l11
I felt sad.

空気中に1.・ける抵抗値(Ra)については、乾燥し
た空気が:’+1.流のできない程度にゆっくり攪拌さ
れてい/)容積sogの測定容器中で測定し、ノjス中
での抵4″:+、値(Ilg)はこの容器の中に純度9
9%以」二のメタン(CH4)及び水素(H2)の各ノ
jスを8量比率にして1o ppm7秒の割合で流入さ
せ5.その濃度が0.2容量%に達した時にそI″1.
ぞ′It涜11定した。測定するガス濃度を0.2%に
選んだのけ、ガス検知素子として実用上要望される検知
ffl’!: I」xがそのガスの爆発下限界濃度(L
EL)の数10分の1から数分の1の範囲であり、上記
のガスのそれぞれのLELが約2容量%から5容量タロ
であるからである。
1 in the air. -The resistance value (Ra) of dry air is: '+1. It was measured in a measuring container with a volume of sog, and the value (Ilg) was measured in a measuring container with a volume of sog.
5. Inject methane (CH4) and hydrogen (H2) of 8% or more at a rate of 10 ppm for 7 seconds. When the concentration reached 0.2% by volume, I''1.
It's blasphemy 11. By choosing the gas concentration to be measured as 0.2%, the detection ffl'!, which is practically required as a gas detection element, can be achieved. : I'x is the lower explosive limit concentration (L
This is because the LEL of each of the above gases is approximately 2% by volume to 5% by volume.

まだガス感応体に含まれる硫酸イオン(304−)の存
在は赤外線吸収スペクトルで確認し、含有されているt
iiIi、T G −D T A l1lI線及び螢光
X線分析から同定した。その結果、これらの焼結感応体
に含まれている硫酸イオンの量はo、14〜0.18屯
量%であった。
The presence of sulfate ions (304-) still contained in the gas sensitive material was confirmed by infrared absorption spectrum, and the contained t
iii, identified from T G - D T A Ill I line and fluorescent X-ray analysis. As a result, the amount of sulfate ions contained in these sintered sensitive bodies was 14 to 0.18 tonne %.

第1図〜第3図に、添加物をそれぞれ申独で添加した場
合のガス感応特性の添IJII耽依有性を示す。
FIGS. 1 to 3 show the dependence of gas sensitivity characteristics when additives are added independently.

M3応!1ヶ件は、(1)ガス感IBI (Ra71g
) −(io抵抗経時変化率ΔR(感応体を400 ”
(1,の温度で2000時間保持した場合の抵抗値の初
jυ(11台に対する変化率)で評価した。また第1表
には、添加物を組み合わせてJ[1いた場合のやはりガ
ス感度(Ra71g )と、抵抗経時変化率(ΔR)を
示す。なおへRは表中の()内しこ記載した。
M3 response! One case is (1) Gas feeling IBI (Ra71g
) −(IO resistance aging rate ΔR(sensor 400 ”
(Evaluation was made using the initial jυ (change rate for 11 units) of the resistance value when held at a temperature of 1, for 2000 hours. Table 1 also shows the gas sensitivity ( Ra71g) and resistance change rate over time (ΔR) are shown.R is indicated in parentheses in the table.

第1図〜・第3図、および第1表から明らかなように、
Sn 、 Zr f)るいはT1を中独ないしは糸[1
み合わせて添加することにより、ガス感応特性(ガス感
度: 1Fta/Rg)が大きく同上している。址だ注
目すべきは抵抗値の経時変化てあり、こハ1゛っの添力
ロ物を加えることによりその変化率が人「lJに減少し
ている。このようVcSn 、 ZrあるいはT1の添
加によりガス感応’l’!+’ (jl−と信頼性の飛
躍的な向上が実現できることがわかる。
As is clear from Figures 1 to 3 and Table 1,
Sn, Zr f) or T1 in China or yarn [1
By adding them together, the gas sensitivity characteristics (gas sensitivity: 1 Fta/Rg) are greatly improved. What should be noted is the change in resistance value over time, and by adding this one additive, the rate of change is reduced to 1J. It can be seen that the gas sensitivity 'l'!+' (jl-) and the reliability can be dramatically improved.

本発明において添加物総4;″を0.1〜50モル%に
限定t7にのケ:J:、 o、1モル%未111〜では
、第1図〜第3図および第1表に見られるように−ガス
感応特性ならびに信頼性を向上せしめる効果が見られず
、逆に60モル%を超えると抵抗(尚自身が高くなり、
また特性の安定性に欠けるからである。表中で半印を伺
1〜だものがこれらに該当するものであり、第1表の中
では比較例として記載しておいた。
In the present invention, the total amount of additives 4;'' is limited to 0.1 to 50 mol%. - No effect on improving gas sensitivity characteristics and reliability can be seen; on the other hand, if it exceeds 60 mol%, the resistance (and the resistance itself increases).
This is also because the characteristics lack stability. In the table, those marked with a half mark and 1 to 1 correspond to these, and are listed as comparative examples in Table 1.

第1表 杉 末 米 比較例 ところで、一般的に感応体はある程度非晶質の状態の金
属酸化物の力が、結晶化さ扛ているものより可燃性ガス
に対する吸着現象などの物理化学現象が活イ1.になり
易いと云わルCいる、つしかし、はぼ完全に近く結晶化
されている市販試桑を用いてイ′1成“されだMgFe
2C)+でも一硫酸イオノを含イj−Wしめ、さE′、
にSn 、 Zrあるいは1゛1ケ添加−J−ることに
より(:α(めで11−、°、い渭i+f+二度をン」
<シ、1〜かもこね2が経11、Y的pこ安定り二ため
、結果的に非常に大きなガス感度と商い信!PI′1件
を実現し得ることがわかる。−。
Table 1 Cedar end rice Comparative example By the way, in general, the power of the metal oxide in the amorphous state of the sensor is more sensitive to physicochemical phenomena such as adsorption phenomena for combustible gases than those that are crystallized. Life 1. However, using a commercially available sample that is nearly completely crystallized, MgFe is easily formed.
2C) + also contains monosulfate iono, j-W, and E',
By adding Sn, Zr or 1゛1 -J- to
<Si, 1~Kamokone 2 is meridian 11, Y p is stable 2, so as a result, the gas sensitivity is very large and the business confidence! It can be seen that PI'1 can be realized. −.

この実M1(例1でiL、感応体が焼結体の場合であり
、含有さえLる硫酸イオン1ηが一定で、そして添加物
の;it−組み合わ一艮が異る場合についで述べた。。
The following is a description of the case where the actual M1 (iL in Example 1) is a sintered body, the amount of sulfate ions 1η contained is constant, and the combination of additives is different. .

次に示−、ト実施例2では感応体が焼結膜の場合で、実
施例1とは逆に添加物のが類と@全一定にして含治さ]
する硫酸イオンの)1)−を変えた場合についで+71
eべるtr l−斤わち実施例2では、本発明が感応体
を焼結膜どし/、ユ場合でも有効であること’;z イ
+Ifi認し、まだ含(1され2〕硫酸イオン量がガス
感応特性に対しでどσ)」、うな効果を持つかについて
述べること+fC−4−る。
As shown below, in Example 2, the sensitive body is a sintered film, and contrary to Example 1, the additives are added at a constant rate.
If you change 1)- of the sulfate ion, then +71
In Example 2, it was confirmed that the present invention is effective even when the sensitive material is a sintered film; Describe whether the amount of σ) has an effect on the gas-sensitive characteristics.

〔実施例2〕 実施例1と同様の方法で作成さi l %c、 MgF
 e 2041009VC1やはり市販の酸化第二イi
15 (5nO2)、酸化ジルコーラj、(ZrO2)
および酸化−f−タン(Ti02)試薬を第2表に示す
様な割合しく在る様にイ′1ゝ取し、それぞれをらいか
い磯にで2 u+J間混全混合。次にそれぞれの混合粉
体を8″、(′i分割し、これにrめ1中々の6゛1″
月巧に11周興された(t+fi 7賓肖万二1太(F
e2(S04)5−r)120)溶液をカ1jえ、しか
る後(てぞれぞれの粉体をやほりらいかい磯で1t1.
’7間混合した。このようにして代表例としての酸化物
組成の1重類が3不重づ頂(試半・1.A−C)=硫酸
イオン晴の鴇なるものがそれぞれの酸化物組成に対して
8種菌、計24千1:αの試料が得られた。
[Example 2] I l %c, MgF prepared by the same method as Example 1
e 2041009VC1 Also commercially available oxidation II II
15 (5nO2), Zircola oxide J, (ZrO2)
and -f-tane oxide (TiO2) reagents were taken in the proportions shown in Table 2, and each was thoroughly mixed on a shallow rock for 2 u+J. Next, each mixed powder was divided into 8"('i), and this was divided into 6"1"
Was revived by Yue Takumi for 11 weeks (t + fi 7 Bin Xiao Wan 21 Tai (F
e2 (S04) 5-r) 120) Pour the solution, and then pour each powder on a rocky shore for 1t1.
' Mixed for 7 minutes. In this way, as a representative example, a monolayer of oxide composition has 3 monolayers (trial half, 1.A-C) = sulfate ion, and 8 types of bacteria for each oxide composition. , a total of 24,001:α samples were obtained.

(以ド余白ン 特開0o59−58.’(49(4) 第2表 このようにして得られたいくつかの混合粉体を空気中で
400″Gの温度で2時1?tl熱処理した。ネらにこ
の粉体を50〜100μに整粒し、l・リエタノールア
ミンを加えてペースト化した。一方、ガス検知素子の基
板として縦、横それぞれ5重1m、厚み0.5mmのア
ルミナ基板全斤意し、この表面に0.5mmの間隔に櫛
形に金ペーストを印刷し7、焼きツケで一対の(i’i
ii形電極を形成しプζ。そj〜で、アルミナ基板の裏
面には金電極の間に市販の酸化ルテニウl、のグレーズ
抵抗体を印刷し、焼きつけてヒータとしだ。
(Margin JP 0o59-58.' (49(4) Table 2 Several mixed powders thus obtained were heat treated in air at a temperature of 400"G for 2:1?tl. Next, this powder was sized to a size of 50 to 100 microns, and l-reethanolamine was added to form a paste.Meanwhile, as a substrate for a gas detection element, an alumina sheet of 5 layers, 1 m each, and 0.5 mm thick was prepared. Prepare the entire board, print gold paste in a comb shape at intervals of 0.5 mm on this surface 7, and bake it to form a pair of (i'i
Form a II-type electrode. So, on the back side of the alumina substrate, a commercially available ruthenium oxide glaze resistor was printed between the gold electrodes and baked to serve as a heater.

次に、上述のペース)・を基板の表面に約65μのF2
みに印刷し、室温で自然乾)S“・1°壺き1セだ後、
400℃の温度に々る才で徐々に加熱し、この温度で1
時間保持した。この段階でペーストが蒸発し硫酸イオン
を含イコするそれぞれの酸化物組成の焼結膜に々っだ。
Next, apply the above-mentioned paste to the surface of the board with approximately 65μ of F2.
After printing on the paper and drying naturally at room temperature)
Gradually heat to a temperature of 400℃, and at this temperature 1
Holds time. At this stage, the paste evaporated and applied to the sintered film of each oxide composition containing sulfate ions.

このガス感応体のJ19みd、約60μであった。この
ようにしてガス検知素−J′を得た。
The J19 d of this gas sensitive material was approximately 60μ. In this way, gas sensing element-J' was obtained.

またガス感応膜に含まれる硫酸イ>1’ 7吊の同定は
、上記の各ペーストの一部を、アルミナ基板に印刷する
のでdなく、ペースI・の寸′:1−上述と同じ様に4
00 ’Cの温度で途方11熱12、こ:、l+、7.
−) T G−D1゛Aならびに螢光X線分析にかけて
行/υ〕だ。寸/と硫酸イオンの荏在の確認は実施例1
と同じく赤外線吸収スペクトルを分析することにより行
なったO それぞれの検知素子のガス感応’l’l’ l’l: 
4一実施例1の場合と同様の方法で測定した。第41支
1〜第6図に酸化物組成の異る試料A −COガス感度
(Ra/Fig)  と含イ]きれる硫酸イオンとの関
係庖()Lぞれ示す。」、た第3表には、経[1、′I
特性の代表4+llとして、試1i:4 A −Cにお
いて硫酸イオンが2〜571督11%含有されているも
のについで実施例1と同じ方法で計画し/こ1j1の抵
抗値の経1−j7要化率を示す。なお実施例2に:1・
・いてしり、被検カスとじ−Cはメタンとン“ロバンヶ
月1いプこ。
In addition, to identify the sulfuric acid contained in the gas-sensitive membrane, since a portion of each of the above pastes is printed on an alumina substrate, the size of the paste I is: 1 - 1 - in the same manner as above, rather than d. 4
00 'C temperature 11 fever 12, ko:, l+, 7.
-) T G-D1゛A and fluorescent X-ray analysis/υ]. Confirmation of the presence of sulfate ions in Example 1
The gas sensitivity of each sensing element was determined by analyzing the infrared absorption spectrum.
41 Measured in the same manner as in Example 1. Figures 1 to 6 of the 41st column show the relationship between the sample A-CO gas sensitivity (Ra/Fig) with different oxide compositions and the sulfuric acid ions contained therein. ', Table 3 shows the sutra [1, 'I
As a representative characteristic 4+ll, test 1i:4A-C containing 2 to 571 sulfate ions at 11% was planned in the same manner as in Example 1/1j1 resistance value 1-j7 Indicates the necessity rate. In addition, in Example 2: 1.
・Itishiri, the test subject Kasutoji-C has been using methane for a month.

第4図〜第6図から明らかなように、感応体が焼結膜で
あ−=−C”b、実施例1て得られ/Cのとほぼ同じ!
1〒性がイ:tられている。丑だ第3表か1もも明らか
なように、↓)(抗頭の経時変化率も実M[1例1七同
様り1常に小さい。
As is clear from FIGS. 4 to 6, the sensitive body is a sintered film -=-C"b, which is almost the same as /C obtained in Example 1!
1〒Gender is a:t. As is clear from Table 3 and 1, ↓) (The rate of change in the head over time is also always small, as in Example 1 and 17.

1 )CC1”r ’図へ・第6図を見れd:わか−る
ように、硫酸イオンの量が01Q05ラ−rl量%未i
’!f−fでrl:jSn 、 Zrあるい&:I: 
Tj、の添加効果がなく本発明の効果が期待でき7′i
:い。〜、1、た逆に10.0重量%を超えると特性の
安定(’l、あるいは機械的強風の面で実用件に欠ける
ように石こる。本発明のガス倹知素J′て含有さ九る(
1・(i酸イ」ンの吊二をO1○05〜10.0重−1
%に限定し/2−の&:Jニー、1:述した理由に依る
1) Go to CC1''r' diagram/See Figure 6d: As you can see, the amount of sulfate ions is 01Q05ra-rl amount%.
'! f-f rl:jSn, Zr or &:I:
The effect of the present invention can be expected without the effect of addition of Tj, 7'i
:stomach. On the other hand, if it exceeds 10.0% by weight, the properties will be unstable ('l'), or the gas-rich element J' of the present invention will be impractical in terms of strong winds. Nine (
1.(i acid ion) O1○05~10.0 weight-1
%/2- &: J knee, 1: Depends on the reasons stated above.

第3表 ところて、実施例1および2でシ1、出発か10′1と
して市販の酸化物試桑を用いたものについて〕ボへたが
、本発明は最終的に感応体の紐IJy、i浦iJ:+2
k した範囲内のイ)のであI″Lはよ<−(i’Jら
出発j皇3′1や製造二[法を限定するものではない。
Table 3 By the way, in Examples 1 and 2, commercially available oxide samples were used as 1 and 10'1. iura iJ: +2
(i'J et al. departure j Emperor 3'1 and production 2 [law is not limited).

壕だ実施例においては被検ガスとしてメタンと、水素あ
るいはプロパンを用いたが、本発明の効果がこれらのガ
スに決して限定されるものでなく。
Although methane, hydrogen, or propane were used as the gases to be tested in this embodiment, the effects of the present invention are by no means limited to these gases.

エク/、インフリン、アルコールといった可燃性ガスに
対しても有効であることは勿論である。
It goes without saying that it is also effective against flammable gases such as Eczema, insulin, and alcohol.

以上説明し/、−ように、本発明のガス検知素r・し1
硫酸イオンを名イ」するMgFe2O4に添加物として
Sn 、 Zr ro、るいばT1を添加し/こ焼結体
あるいに1、焼結膜をl+&応仕とU〜て)IJIAだ
ものであり、これによりガス感j!′1が飛蹟l的に向
−ヒし、こtt−1:で肖金属触媒庖IIIいJにシ1
.微晴検知がT11かしいとされてき/(メタンガスに
対して−400’(、:という比較的低い侃t ITS
−(= 4 ]l常に大きい感度を実現しイ!去るもの
である。クーJ′Lk1111+I山ガスの天然ガス(
主成分:メタンガス)化に1Tっ′C要求が犬きくなり
つつある社会ニーズに的+1′ll’、に対応するもの
であり−その効果は4シめ−C人なるものがある。ま/
こ、本発明のいまひとつの効果シ1、ノj命11ゲ性、
TM、に通電による」」(抗頭の経時変化の大幅な軽減
である。これは換言すれば、あらゆる検知素子の最も重
要な要素である素子の信頼性の向上に極めて大きな富力
をもたらすものである。
As explained above, the gas sensing element of the present invention r.
Sn, Zro, and Ruiba T1 are added as additives to MgFe2O4, which is known as sulfate ion. This makes me feel like gas! '1 was hit in a flying manner, and in this case, the metal catalyst was removed.
.. Clear skies detection is said to be T11/(-400' for methane gas), which is relatively low.
-(= 4) l Always achieves high sensitivity.
The main component: methane gas) is in response to the social needs of increasing demand for 1T-C, and its effects are on the order of 4-C. Ma/
This is another effect of the present invention.
By energizing the TM, the change in resistance over time can be significantly reduced.In other words, this brings tremendous wealth to improving the reliability of the element, which is the most important element of any sensing element. be.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図〜第3図は本発明の一実施例における添加物量と
一メタンおよび水才に苅する感度(Ra/Rg)ならひ
に抵抗経時変化率(ΔR)との関係を示したイ15′件
[ヅ1、H”、’ 4図〜第6図は本発明の他の実施例
における硫酸イオン3打歌と、メタンおよびプ11Jバ
ノに対する7+・’i L!!L(R乙/Rg )との
関係を、3つの代表的ゾr酸イl二物組成につい−C示
しプjtt、冒/1−図である。 代理人の氏名 ノrJ「11− 中 尾 敏 男 ほか
1名第 4 図 倉有硫西交イオシ量 (V量Zジ 第 5 図 θoo7     o、ol     O,1110含
有不久酸イオン量 (重量Zジ
Figures 1 to 3 show the relationship between the amount of additives and the sensitivity (Ra/Rg) to methane and water resistance over time (ΔR) in one embodiment of the present invention. Figures 4 to 6 show the effects of sulfate ion 3 in other embodiments of the present invention and 7+'i L!!L (R /Rg) is shown in the figure for three representative sol acid yl dicompositions. Name No. 4 Amount of sulfuric acid ion (V amount Z) Figure 5 θoo7 o, ol

Claims (2)

【特許請求の範囲】[Claims] (1)硫酸イオンが0.O05〜10申:1;%含有さ
れたマグネ/ラムフェライト(MgFe204)に、添
力1]物どして錫(Sn)、ジ/l/ 二V 、=、 
1) 、/、(Zr)お」:びチクン(Ti)のうち少
なく +!二’l、ひ、につが、イれぞれSnO2,Z
rO2および1°102  にJet算して添力11物
総;IヒC0,1〜50モル%J−むイ、のをガス感応
体として用いることを牛1徴とするガス検知素子。
(1) Sulfate ion is 0. Addition of tin (Sn), di/l/2V, =
1) , /, (Zr) O”: Bichikun (Ti) less +! 2'l, hi, nitsuga, respectively SnO2, Z
A gas sensing element characterized in that a total of 11 additives calculated by Jet to rO2 and 1°102 are used as a gas sensitive material.
(2)  ガス感応体が加圧成型し、焼成してイiIら
れる焼結体、寸だ(Fヨペーストを印刷して焼成して得
られる焼結膜であることを特徴とする特許請求の範囲第
(1)、TI′1記載のガス検知素子。
(2) A sintered body in which the gas sensitive body is formed by pressure molding and firing, and is a sintered film obtained by printing and firing paste. (1), the gas sensing element described in TI'1.
JP17012582A 1982-09-28 1982-09-28 Gas detecting element Granted JPS5958349A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17012582A JPS5958349A (en) 1982-09-28 1982-09-28 Gas detecting element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17012582A JPS5958349A (en) 1982-09-28 1982-09-28 Gas detecting element

Publications (2)

Publication Number Publication Date
JPS5958349A true JPS5958349A (en) 1984-04-04
JPS6222414B2 JPS6222414B2 (en) 1987-05-18

Family

ID=15899103

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17012582A Granted JPS5958349A (en) 1982-09-28 1982-09-28 Gas detecting element

Country Status (1)

Country Link
JP (1) JPS5958349A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021050984A (en) * 2019-09-24 2021-04-01 独立行政法人国立高等専門学校機構 Gas sensor and method of producing alkaline earth ferrite

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113260588B (en) 2018-12-13 2022-11-29 株式会社汤山制作所 Rotor for ingot case and ingot case

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5352200A (en) * 1976-10-22 1978-05-12 Hitachi Ltd Manufacture of gas sensor material

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5352200A (en) * 1976-10-22 1978-05-12 Hitachi Ltd Manufacture of gas sensor material

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021050984A (en) * 2019-09-24 2021-04-01 独立行政法人国立高等専門学校機構 Gas sensor and method of producing alkaline earth ferrite
WO2021059839A1 (en) * 2019-09-24 2021-04-01 独立行政法人国立高等専門学校機構 Gas sensor and alkaline earth ferrite production method

Also Published As

Publication number Publication date
JPS6222414B2 (en) 1987-05-18

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