JPS5958305A - 測定方法及びその装置 - Google Patents

測定方法及びその装置

Info

Publication number
JPS5958305A
JPS5958305A JP57168313A JP16831382A JPS5958305A JP S5958305 A JPS5958305 A JP S5958305A JP 57168313 A JP57168313 A JP 57168313A JP 16831382 A JP16831382 A JP 16831382A JP S5958305 A JPS5958305 A JP S5958305A
Authority
JP
Japan
Prior art keywords
discrete
interference pattern
phase
fourier transform
measured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57168313A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0437362B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Yoshisada Oshida
良忠 押田
Tetsuya Kamioka
哲也 上岡
Tsutomu Kuze
久世　務
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP57168313A priority Critical patent/JPS5958305A/ja
Publication of JPS5958305A publication Critical patent/JPS5958305A/ja
Publication of JPH0437362B2 publication Critical patent/JPH0437362B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/255—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring radius of curvature

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP57168313A 1982-09-29 1982-09-29 測定方法及びその装置 Granted JPS5958305A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57168313A JPS5958305A (ja) 1982-09-29 1982-09-29 測定方法及びその装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57168313A JPS5958305A (ja) 1982-09-29 1982-09-29 測定方法及びその装置

Publications (2)

Publication Number Publication Date
JPS5958305A true JPS5958305A (ja) 1984-04-04
JPH0437362B2 JPH0437362B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-06-19

Family

ID=15865710

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57168313A Granted JPS5958305A (ja) 1982-09-29 1982-09-29 測定方法及びその装置

Country Status (1)

Country Link
JP (1) JPS5958305A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5990009A (ja) * 1982-11-15 1984-05-24 Rikagaku Kenkyusho 物体形状測定法と物体形状測定装置
JPS61294327A (ja) * 1985-06-21 1986-12-25 Agency Of Ind Science & Technol 放物面鏡の表面形状測定用干渉方法及び放物面鏡の表面形状測定用干渉計
JPS62214309A (ja) * 1986-03-17 1987-09-21 Tokyo Seimitsu Co Ltd 表面粗さ・形状測定装置
JPH02238306A (ja) * 1989-03-13 1990-09-20 Ricoh Co Ltd 微小変位測定装置
US6690158B2 (en) 2000-08-04 2004-02-10 Matsushita Electric Industrial Co., Ltd. Position sensor for electromagnetic actuator to detect a position of a shaft
US7557568B2 (en) 2005-03-04 2009-07-07 Smc Corporation Actuator with position detecting mechanism
JP2022043701A (ja) * 2020-09-04 2022-03-16 Ckd株式会社 三次元計測装置

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5990009A (ja) * 1982-11-15 1984-05-24 Rikagaku Kenkyusho 物体形状測定法と物体形状測定装置
JPS61294327A (ja) * 1985-06-21 1986-12-25 Agency Of Ind Science & Technol 放物面鏡の表面形状測定用干渉方法及び放物面鏡の表面形状測定用干渉計
JPS62214309A (ja) * 1986-03-17 1987-09-21 Tokyo Seimitsu Co Ltd 表面粗さ・形状測定装置
JPH02238306A (ja) * 1989-03-13 1990-09-20 Ricoh Co Ltd 微小変位測定装置
US6690158B2 (en) 2000-08-04 2004-02-10 Matsushita Electric Industrial Co., Ltd. Position sensor for electromagnetic actuator to detect a position of a shaft
US7557568B2 (en) 2005-03-04 2009-07-07 Smc Corporation Actuator with position detecting mechanism
JP2022043701A (ja) * 2020-09-04 2022-03-16 Ckd株式会社 三次元計測装置

Also Published As

Publication number Publication date
JPH0437362B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-06-19

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