JPS5956750A - 長尺条体の連続部分エツチング法 - Google Patents

長尺条体の連続部分エツチング法

Info

Publication number
JPS5956750A
JPS5956750A JP57167065A JP16706582A JPS5956750A JP S5956750 A JPS5956750 A JP S5956750A JP 57167065 A JP57167065 A JP 57167065A JP 16706582 A JP16706582 A JP 16706582A JP S5956750 A JPS5956750 A JP S5956750A
Authority
JP
Japan
Prior art keywords
mask
etching
strip
continuous
etching method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57167065A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0139655B2 (enExample
Inventor
Hiromichi Yoshida
博通 吉田
Takashi Suzumura
隆志 鈴村
Koichi Kayane
茅根　浩一
Shigeo Hagitani
萩谷　重男
Mitsuhiko Sugiyama
光彦 杉山
Mamoru Onda
護 御田
Fumio Nakano
文夫 中野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Cable Ltd
Original Assignee
Hitachi Cable Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Cable Ltd filed Critical Hitachi Cable Ltd
Priority to JP57167065A priority Critical patent/JPS5956750A/ja
Publication of JPS5956750A publication Critical patent/JPS5956750A/ja
Publication of JPH0139655B2 publication Critical patent/JPH0139655B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W70/042—

Landscapes

  • ing And Chemical Polishing (AREA)
  • Lead Frames For Integrated Circuits (AREA)
JP57167065A 1982-09-25 1982-09-25 長尺条体の連続部分エツチング法 Granted JPS5956750A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57167065A JPS5956750A (ja) 1982-09-25 1982-09-25 長尺条体の連続部分エツチング法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57167065A JPS5956750A (ja) 1982-09-25 1982-09-25 長尺条体の連続部分エツチング法

Publications (2)

Publication Number Publication Date
JPS5956750A true JPS5956750A (ja) 1984-04-02
JPH0139655B2 JPH0139655B2 (enExample) 1989-08-22

Family

ID=15842746

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57167065A Granted JPS5956750A (ja) 1982-09-25 1982-09-25 長尺条体の連続部分エツチング法

Country Status (1)

Country Link
JP (1) JPS5956750A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6372889A (ja) * 1986-09-12 1988-04-02 Showa Alum Corp リ−ドフレ−ムの製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6372889A (ja) * 1986-09-12 1988-04-02 Showa Alum Corp リ−ドフレ−ムの製造方法

Also Published As

Publication number Publication date
JPH0139655B2 (enExample) 1989-08-22

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