JPS5953679A - Magnetron sputtering apparatus - Google Patents

Abstract

PURPOSE:To make the thickness of a film to be formed on a substrate uniform over a large area, by placing a magnetic body close to the rear side of a target between the peripheral and central magnets of a magnetic device. CONSTITUTION:The titled apparatus is composed of a vacuum vessel 1, an exhaust means to evacuate the vessel 1 to a prescribed pressure, a rectangular flat target 6 put in the vessel 1, a magnetic device installed close to the rear side of the target 6 and consisting of a frame-shaped peripheral magnet 4 along the periphery of the target 6 and a central magnet 9, conveyors 4, 4', 4'' for conveying a substrate over the surface of the target 6 in a direction perpendicular to the major sides of the target 6, a means of supplying gas to the vessel 1, and a power source 14 for applying voltage between the vessel 1 and the target 6. A magnetic body 11 is placed close to the rear side of the target 6 between the magnets 8, 9.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a flat plate type magnetron sputter linking apparatus, particularly to a flat plate type magnetron sputter linking apparatus suitable for forming a thin layer with a uniform thickness on the surface of a substrate. .

Conventionally, a flat plate type magnet sputtering apparatus includes a vacuum vessel, a bleed means for moving the J2"r 717 vessel to a predetermined 1F, and a long-life carved flat plate target provided in the vacuum vessel. , 1g close to the back surface of the target and along its periphery.
A magnetic device consisting of a magnet with a center i′, and a long side of the cugett facing the surface of the target (°fUJ
A) A transfer device for transferring the board in the direction A) and a transfer device for transferring the board in the direction A) and the board in the two containers.

It consists of means for supplying gas, and an electric current for applying 111 pressure between the empty container and the cuget. Temporary type Macune IL non-sputtering equipment uses a vacuum container as ffJl.
After reducing the pressure to a predetermined degree of vacuum using the air F stage, argon'
S inert gas or argon gas and acid accumulative gas /l111 - antit+i+,...! /I waste is introduced into the vacuum container in one stream of −・>1・, and 11 constant U
1 atmosphere [Ill with Ii to increase the degree of vacuum in the vacuum container to 10
~ / Hold one OTo r unit, apply a voltage of 1 ('3.O) to the empty container in the power supply, and generate a discharge in the magnetic device. The magnetic field σ) is used to concentrate the plasma of the claw discharge on the surface of the target material, especially the transfer device i7. It was transferred to the surface of the target plate and was used to form a thin layer on the surface of the funnel plate. child())
MacFil Ronsnogutsukling ni”, Ruusu 111M;
The formation of nitrates can be sputtered, and I
Since the formation of a continuous thin film is possible, the yield of the thin film formation is high, so that various %, 'J IK
'Used for formation, +1, 3,! f, 'J (F black J・Metal thin film or indium oxide・Main body and -4-
Transparent guide? For the formation of lL-type oxide thin films - (1 Kawateru)
b) 1. However, in the above-mentioned flat plate sputtering apparatus, 1q of the thin film is uniform on the substrate θ), but There was a drawback that the plane angle in the J direction of the transfer (hereinafter referred to as 1. width direction of the substrate) was 4. uniform.

The present invention aims to solve the problems and disadvantages of the above-mentioned board sputtering apparatus.
・37, The present invention uses a vacuum 8 steamer and a 1 J cedar for the specified purpose of 2 containers (41 gas means and a length of 1' bent in two in the vacuum container). Taira (lii Taau 71・
And, each one is placed close to the back side of the magnet and along its periphery.
Bone (1 theory λl / 2 Middle History Central, li & U (i and 79 [a] magnetic device, and the long side of the target on the surface of the turret 1) On the other side of the mountain I J
A transfer device for transferring J, and 1g in the vacuum container
1. A means for supplying and filtering the scum, and a power source for applying mold crushing between the vacuum 8 and the turret. :,of,
(To the Maguitron Subanotaringe device, 1.
+4 (A magnetic material is provided close to the back surface of the target between the outer peripheral magnet of the tJ magnetic device and the central magnet 1.) There is a deck-type magnetron sputtering system with a feature of 71i.

In the present invention, the target area between the outer peripheral part of the magnetic device 1 and the central part 7I of the magnetic device is 1. 7171 installed close to the % surface (1, min as rb body) (,
A high permeability JJ material with a diameter of 100 mm or less can be used, and a 9 plate with 1 JJ of OlS to J and 1 JJ of Qnlm is preferably used.

In the present invention, the above-mentioned rili body (j usually one round fτ
J'J'' can be placed close to the back surface of the target between the longitudinal direction of the lX magnet and the longitudinal direction of the central magnet.For example, i:I
When iron plates of various thicknesses (1) are used as a magnetic material, the strength of the G1 field on the target surface near the magnetic material dI changes as shown in the table; The strength of the magnetic field becomes uniform.

Therefore, according to the present invention, the erosion of the Kugenol material by sputtering is made to be 3<no in the direction perpendicular to the longitudinal direction of the target, and the 11 (1 b of the plate) direction (t
It is necessary to form a thin layer with a uniform thickness of 67□.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
·magnet.

Set up a substrate transfer device (1) inside which supports and transfers both edges of the glass substrate (1) to this transfer device.
- is ij [carrying 41 ro glass no, 1, temporary 3- direction (1 te, length in the transport direction / 27111?? 2 × transport force direction (4111' 1 angle Zf force direction / 737 +++ +u
90 tons of rectangular shape: i1%σ) indicium and 70
The counterfeit tin alloy Cukenote is placed on the 4th edition 7th edition, and the history page of the Tarwood board (1) is placed closer along the 1st and 16th sides.
A magnetic device 10 is installed, which consists of a 1 G-shaped outer peripheral magnet and a central part If3779 with a 1 G-shaped outer peripheral magnet and a central part If3779 with a 1 role and 0 characters in the long side direction. Between the magnet and the central part (iH stone wa), close to the back of the tarkeyl/kari-otsu O,!i 111111 iron eve j//, //
' is provided. The magnetic device 10 is installed as shown in Figure 4.
The length of the peripheral magnet g in the long side direction is google (:l Ill Il
l X', i": Length of i side force direction / Og +++,
＋＋＋
The side is S (the remainder is magnetic I, N) The strength of the magnetic field near the bar is 730
There is a magnet with a diameter of 0. The central magnet 9 has a length of 370 o + + o in the long side direction.
The strength of the li positive field near the S pole of the magnet 1 is / O 00 Gauss, and the outer periphery of the magnet is 8 (the N pole of the J part magnet W is joint V, /, 2 = C consecutive'' (two a) 3
, Also, between the outer circumferential magnet g and the central magnet (〒9 and θ), [') V, plate //, // are respectively 'l O+++ 1
11 X, 2 I O11111+ humanity.

In addition, the setting of these magnetic devices 10;
In the interior of the Cef, water is introduced [cooled from '+7'], II water is introduced, and I-Jl water [υ1 water is circulated from 17" to circulate cooling water"] d
Temporarily, the magnetic device 10 and target sensor +-4 are cooled.

In addition, a vacuum preparatory chamber 2 for supplying glass substrates is connected to the second most side of the vacuum container, and a glass sleeve plate connected to the bottom side of the vacuum chamber is connected to the secondmost side of the vacuum vessel for supplying glass substrates. A vacuum pre-11iif room 3 for taking out the air is installed,
Substrate transfer devices g/, l// are installed in each of the chambers 3, and movable gate knobs/3", 73"' are provided between the vacuum container/ and the vacuum spares q:, :z, and 3, respectively. The glass substrate supply 1-1 of the vacuum preliminary chamber 3 is equipped with an 11-inch Kate valve, and the vacuum preliminary chamber 3 is equipped with a 1-half chamber.

Vacuum equipment/and vacuum 1' (r:i°j room 3, 3) (4J1ki II/',
IJ connected to 2', 3'] J due to air system (figure omitted)
7. ing.

Open Gateharz 73' and Karasuf. Me J. Shi, 34-
・Vacuum 1-fjiii room! 11 to the substrate transfer device inside
7. Close the 'J-to-half', reduce the pressure inside the vacuum vessel/, and the room (empty room), 3, open the 'J-to-half' (), 1. Move the Karasufu 11 board in the f+iii room and close the U-lhaha no Otsu'. 1J1 air system 11 of direct air capacity No. 1/, not shown ()) Combination of shoes rA pump and rotary pump・1", 1-ri, 1" (empty capacity)/inside -[:], / 0 'I'
＋One unit per month of Tei'no 1-2 ↓υ +++, then feed the waste into the vacuum container / ゛1be) Nonoshaifu / 3
- A mixed gas of 90 volume % argon gas and l-10 volume % oxygen gas was flowed from t1 to 100S (', t', 11
+ (Standard cubic senna 7 minutes) l'+lI included L
゛1 air volume a;; / is supplied, υ1 air velocity 1% in the extraction system
The degree of vacuum inside is approximately 3X.
/ Oi' +l 1-1's -> +21f K M + holding, power supply / l': vacuum, 1 sweat, n/ka ') insulator / insulated by Oi sales 7 (i (L 'l: i〕
) in Yong J, Y/'r' varnish I -qoov? Ij II: is applied and the snow is removed /1h・E)
f & feed device 11 & i 2'', Rikarasu no 1
・Move the 11th surface of the throat, oxidize (
Indium oxide thin 111 sheets containing 4 ml of glass substrate
i(+1lrXjlf) was created.
'J'z+'ij-' Karasuno J board S
(The transfer device was transferred to the 21st column.) I opened the holder and took out one rim of the 3-inch tube.

Figure 2.2 shows the relationship between the thickness distribution of the 11 + force direction of the rimple, which was saved in this way, and the turwood board and (-) device 10. Is there a variation in the IJ&J thickness of the thin film that is shaped like a glass substrate S? 3-
The ij effect rl of Dinopur within % was 32 cm.

Next, the same strips ('l') were provided between the outer circumferential magnet and the central magnet of the magnetic device 10, except that the l'J b i, -iron//, //' were removed. Spack Y1''-
・I played J and got 2 rimples. IIJ of this comparison tumble
Force direction film +ty distribution and target number 14 and magnetic j/
The relationship with '//0 is shown in Figure 3. The glass substrate was made of cedar, and the thickness was 11'+1σ, and the variation was within 3%.

Interchange 1) 11 No
] ノ1ノ)I■Effect 1[J'', Sg c++++ was also small.

It is clear from the following that tJU <, according to the present invention-11, a) flat red sea bream; l. +” ', +6i Sa'c Uniform 11 & 7 +: /min4+ Ka (', J ”
J J L Z+ , 1, After the sea urchin history comes, V-shaped formation on the substrate surface, Sawa<:) Thin 11・□,゛・film j1c1
4J can be uniformly spread over a wide area (!L:!1
It is possible to increase /J:, production:1: of goods.

Drawing θ) "i (i lit /Eng. 1.) 3 The bright drawing shows the implementation of the present invention. 1, Fang,, 21+
114 "LI', 'j /)') in the 111 direction of → non-pull manufactured from
i,'l-geno-l-plate and the relationship with the magnetic device a(・
Small, 1 figure, ゛I3Z +i-Conventional mag-outronsbanotarisig 1/, set-1R made J-tipped tumble r
IJ/J-direction II・□l! Figure 1 shows the relationship between the I- and + distributions, the Cougett plate, and the magnetic device.

/: Vacuum container, /': υ1ki II, Gu: Hayashi Teshi ν place 3-: Glass no, Shiita, Otsu: 1' Itari-U〕1.

and: evening [peripheral magnet, wa: center 4 part magnet 1゜//: magnetic fI body, /'l: power supply.

Figure 1 Figure 2 Figure 2 1 Lie 1 (cm) Figure 3 = 1 Lie 1 (cm) '] Long'11; Mr. / Tenant Table of Works / Patent Application No. 37-74277g Scary MI't = --- No. 1 Name of Invention Magryo 10 / Sbattari / Gekisho 3, tlli-iJ 2 Relationship with famous tenant farmers Patent applicant 1 Address: 4-1 Doshomachi, Higashi-ku, Osaka-shi, Osaka Prefecture Address: 8
Name (aoo) Representative of IEI Honten Glass Co., Ltd.
Shin Saiga K, 11th agent

Claims (1)

[Claims] A vacuum container and a long force-shaped means provided in the vacuum container to bring the vacuum container to a predetermined pressure.
゛1' Plate target A magnetic device consisting of a bar-shaped outer circumferential magnet and a central magnet placed in the center thereof, which is installed close to the back surface of the target and along its periphery. a transfer device for transferring the substrate onto the surface of the cuget in a direction transverse to the long side of the cuget; and supplying gas into the vacuum container. 71 between the vacuum container and the target;
:i For applying IF? From IX source 1. A flat plate type magnetron sputtering device ii' in which a magnetic material is provided in close proximity to the back surface of the Kuget between the outer peripheral magnet of the magnetic device and the central magnet. t.