JPS527877A - Substrate member moving jig for film forming - Google Patents

Substrate member moving jig for film forming

Info

Publication number
JPS527877A
JPS527877A JP8471775A JP8471775A JPS527877A JP S527877 A JPS527877 A JP S527877A JP 8471775 A JP8471775 A JP 8471775A JP 8471775 A JP8471775 A JP 8471775A JP S527877 A JPS527877 A JP S527877A
Authority
JP
Japan
Prior art keywords
film forming
moving jig
substrate member
member moving
substrate articles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8471775A
Other languages
Japanese (ja)
Inventor
Nobuo Nishida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP8471775A priority Critical patent/JPS527877A/en
Publication of JPS527877A publication Critical patent/JPS527877A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:In a vacuum evaporation apparatus, a moving jig which conveys substrate articles in such a manner as a film can be uniformly formed on all sides of substrate articles of complex shape and to a plurarity of substrate articles.
JP8471775A 1975-07-10 1975-07-10 Substrate member moving jig for film forming Pending JPS527877A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8471775A JPS527877A (en) 1975-07-10 1975-07-10 Substrate member moving jig for film forming

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8471775A JPS527877A (en) 1975-07-10 1975-07-10 Substrate member moving jig for film forming

Publications (1)

Publication Number Publication Date
JPS527877A true JPS527877A (en) 1977-01-21

Family

ID=13838419

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8471775A Pending JPS527877A (en) 1975-07-10 1975-07-10 Substrate member moving jig for film forming

Country Status (1)

Country Link
JP (1) JPS527877A (en)

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