JPS5953209U - 光学式測長スケ−ル - Google Patents

光学式測長スケ−ル

Info

Publication number
JPS5953209U
JPS5953209U JP14801482U JP14801482U JPS5953209U JP S5953209 U JPS5953209 U JP S5953209U JP 14801482 U JP14801482 U JP 14801482U JP 14801482 U JP14801482 U JP 14801482U JP S5953209 U JPS5953209 U JP S5953209U
Authority
JP
Japan
Prior art keywords
light
diffraction grating
optical length
order
reflected light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14801482U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0416177Y2 (en:Method
Inventor
成松　明壽
Original Assignee
ソニ−マグネスケ−ル株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ソニ−マグネスケ−ル株式会社 filed Critical ソニ−マグネスケ−ル株式会社
Priority to JP14801482U priority Critical patent/JPS5953209U/ja
Publication of JPS5953209U publication Critical patent/JPS5953209U/ja
Application granted granted Critical
Publication of JPH0416177Y2 publication Critical patent/JPH0416177Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP14801482U 1982-10-01 1982-10-01 光学式測長スケ−ル Granted JPS5953209U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14801482U JPS5953209U (ja) 1982-10-01 1982-10-01 光学式測長スケ−ル

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14801482U JPS5953209U (ja) 1982-10-01 1982-10-01 光学式測長スケ−ル

Publications (2)

Publication Number Publication Date
JPS5953209U true JPS5953209U (ja) 1984-04-07
JPH0416177Y2 JPH0416177Y2 (en:Method) 1992-04-10

Family

ID=30328988

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14801482U Granted JPS5953209U (ja) 1982-10-01 1982-10-01 光学式測長スケ−ル

Country Status (1)

Country Link
JP (1) JPS5953209U (en:Method)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6235223A (ja) * 1985-08-08 1987-02-16 Agency Of Ind Science & Technol 相対変位測定方法
JPS62163921A (ja) * 1986-01-14 1987-07-20 Canon Inc ロ−タリ−エンコ−ダ−
JPS62200226A (ja) * 1986-02-27 1987-09-03 Canon Inc ロ−タリ−エンコ−ダ−
JPS63311121A (ja) * 1987-06-15 1988-12-19 Canon Inc エンコ−ダ−
JPH01161113A (ja) * 1987-12-18 1989-06-23 Nippon Telegr & Teleph Corp <Ntt> 移動量測定方法及び移動量測定装置
JP2016156805A (ja) * 2015-02-23 2016-09-01 ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツングＤｒ． Ｊｏｈａｎｎｅｓ Ｈｅｉｄｅｎｈａｉｎ Ｇｅｓｅｌｌｓｃｈａｆｔ Ｍｉｔ Ｂｅｓｃｈｒａｎｋｔｅｒ Ｈａｆｔｕｎｇ 光学位置測定装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5781510U (en:Method) * 1980-11-05 1982-05-20

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5781510U (en:Method) * 1980-11-05 1982-05-20

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6235223A (ja) * 1985-08-08 1987-02-16 Agency Of Ind Science & Technol 相対変位測定方法
JPS62163921A (ja) * 1986-01-14 1987-07-20 Canon Inc ロ−タリ−エンコ−ダ−
JPS62200226A (ja) * 1986-02-27 1987-09-03 Canon Inc ロ−タリ−エンコ−ダ−
JPS63311121A (ja) * 1987-06-15 1988-12-19 Canon Inc エンコ−ダ−
JPH01161113A (ja) * 1987-12-18 1989-06-23 Nippon Telegr & Teleph Corp <Ntt> 移動量測定方法及び移動量測定装置
JP2016156805A (ja) * 2015-02-23 2016-09-01 ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツングＤｒ． Ｊｏｈａｎｎｅｓ Ｈｅｉｄｅｎｈａｉｎ Ｇｅｓｅｌｌｓｃｈａｆｔ Ｍｉｔ Ｂｅｓｃｈｒａｎｋｔｅｒ Ｈａｆｔｕｎｇ 光学位置測定装置

Also Published As

Publication number Publication date
JPH0416177Y2 (en:Method) 1992-04-10

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