JPS5953209U - 光学式測長スケ−ル - Google Patents

光学式測長スケ−ル

Info

Publication number
JPS5953209U
JPS5953209U JP14801482U JP14801482U JPS5953209U JP S5953209 U JPS5953209 U JP S5953209U JP 14801482 U JP14801482 U JP 14801482U JP 14801482 U JP14801482 U JP 14801482U JP S5953209 U JPS5953209 U JP S5953209U
Authority
JP
Japan
Prior art keywords
light
diffraction grating
optical length
order
reflected light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14801482U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0416177Y2 (en, 2012
Inventor
成松　明壽
Original Assignee
ソニ−マグネスケ−ル株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ソニ−マグネスケ−ル株式会社 filed Critical ソニ−マグネスケ−ル株式会社
Priority to JP14801482U priority Critical patent/JPS5953209U/ja
Publication of JPS5953209U publication Critical patent/JPS5953209U/ja
Application granted granted Critical
Publication of JPH0416177Y2 publication Critical patent/JPH0416177Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP14801482U 1982-10-01 1982-10-01 光学式測長スケ−ル Granted JPS5953209U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14801482U JPS5953209U (ja) 1982-10-01 1982-10-01 光学式測長スケ−ル

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14801482U JPS5953209U (ja) 1982-10-01 1982-10-01 光学式測長スケ−ル

Publications (2)

Publication Number Publication Date
JPS5953209U true JPS5953209U (ja) 1984-04-07
JPH0416177Y2 JPH0416177Y2 (en, 2012) 1992-04-10

Family

ID=30328988

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14801482U Granted JPS5953209U (ja) 1982-10-01 1982-10-01 光学式測長スケ−ル

Country Status (1)

Country Link
JP (1) JPS5953209U (en, 2012)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6235223A (ja) * 1985-08-08 1987-02-16 Agency Of Ind Science & Technol 相対変位測定方法
JPS62163921A (ja) * 1986-01-14 1987-07-20 Canon Inc ロ−タリ−エンコ−ダ−
JPS62200226A (ja) * 1986-02-27 1987-09-03 Canon Inc ロ−タリ−エンコ−ダ−
JPS63311121A (ja) * 1987-06-15 1988-12-19 Canon Inc エンコ−ダ−
JPH01161113A (ja) * 1987-12-18 1989-06-23 Nippon Telegr & Teleph Corp <Ntt> 移動量測定方法及び移動量測定装置
JP2016156805A (ja) * 2015-02-23 2016-09-01 ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツングＤｒ． Ｊｏｈａｎｎｅｓ Ｈｅｉｄｅｎｈａｉｎ Ｇｅｓｅｌｌｓｃｈａｆｔ Ｍｉｔ Ｂｅｓｃｈｒａｎｋｔｅｒ Ｈａｆｔｕｎｇ 光学位置測定装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5781510U (en, 2012) * 1980-11-05 1982-05-20

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5781510U (en, 2012) * 1980-11-05 1982-05-20

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6235223A (ja) * 1985-08-08 1987-02-16 Agency Of Ind Science & Technol 相対変位測定方法
JPS62163921A (ja) * 1986-01-14 1987-07-20 Canon Inc ロ−タリ−エンコ−ダ−
JPS62200226A (ja) * 1986-02-27 1987-09-03 Canon Inc ロ−タリ−エンコ−ダ−
JPS63311121A (ja) * 1987-06-15 1988-12-19 Canon Inc エンコ−ダ−
JPH01161113A (ja) * 1987-12-18 1989-06-23 Nippon Telegr & Teleph Corp <Ntt> 移動量測定方法及び移動量測定装置
JP2016156805A (ja) * 2015-02-23 2016-09-01 ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツングＤｒ． Ｊｏｈａｎｎｅｓ Ｈｅｉｄｅｎｈａｉｎ Ｇｅｓｅｌｌｓｃｈａｆｔ Ｍｉｔ Ｂｅｓｃｈｒａｎｋｔｅｒ Ｈａｆｔｕｎｇ 光学位置測定装置

Also Published As

Publication number Publication date
JPH0416177Y2 (en, 2012) 1992-04-10

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