JPS5953151A - Method and apparatus for attaching abrasive cloth to grinding machine - Google Patents

Abstract

PURPOSE:To enable abrasive cloths to be replaced without removing an upper platen, by sticking tentatively abrasive cloths to the upper stoool and lower stool, then pressing the stool with a roller between them, and rotating the stools. CONSTITUTION:An adhesive is applied onto the lower stool 7 and the abrasive cloth 20 is placed thereon. Then the upper stool 14 to which an adhesive has been applied is lowered and the abrasive cloths 20, 21 are pressed under a suitable pressure. After a few minutes have passed, when the upper stool 13 is raised, the cloth 20 is also raised with the upper platen 13, and therefore the cloths 20, 21 are tentatively stuck. Then an abrasive sticking apparatus is placed on the lower stool 7, and after the cloth 21 is attached to the lower stool 7, the stool 13 is lowered to become in contact with the roller 32 with the gears 15 and 3 fixed. Then when the stools 13, 7 are rotated backward at the same speed, the cloths 20, 21 are stuck well. Thus, the abrasive cloths can be replaced and stuck without removing the upper stool.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a method for attaching a polishing cloth to a double-side polishing apparatus and an improvement of the apparatus.

[Technical Background of the Invention and Problems Therewith] In a double-sided polishing apparatus, polishing cloths are attached to the processing surfaces of the upper and lower surface plates, respectively, but the polishing cloths often need to be replaced. When attaching the polishing cloth to the upper surface plate, remove the upper surface plate from the polishing device, place it upside down on another flat surface, apply adhesive to the surface of the surface plate, and then place the polishing cloth on top of it. Then, the polishing cloth and adhesive were pasted and squeezed so that there were no air gaps between them. Only (-
This method requires the work of removing the upper surface plate from the polishing apparatus, which requires a great deal of effort and is also dangerous. Also, if you try to attach the polishing cloth without removing the upper surface plate, the surface of the polishing cloth attached to the upper surface plate device is facing downward, so you will not be able to attach the polishing cloth in a very unnatural position. It must be pasted and then the polishing cloth must be applied. Therefore, there has been a need for a method for easily applying a polishing cloth to the upper surface plate while it is still attached to the apparatus, and squeezing the surface to perfect the adhesive surface and smooth out the unevenness of the adhesive application.

[Object of the Invention] It is an object of the present invention to provide a method for attaching a polishing cloth to a polishing apparatus in which the polishing cloth can be replaced without removing the upper surface plate, and an apparatus for carrying out the same.

U Overview of the Invention The method of the present invention involves temporarily attaching a polishing cloth to an upper surface plate and a lower surface plate with an adhesive, and then interposing nine rotatably supported rollers between the upper surface plate and the lower surface plate. A method of applying polishing cloth to a polishing device is to apply pressure to the rollers using a measuring plate and rotate them relative to each other to create creases in the polishing cloth.

The apparatus of the present invention is an apparatus for carrying out the above-mentioned method of the invention, and includes a main body that is provided radially straddling the lower surface plate and is rotatable integrally with a sun gear at one end and an internal gear at the other end; The present invention is an abrasive cloth attaching device of a polishing apparatus characterized in that the polishing apparatus includes a roller rotatably attached to a roller, and both upper and lower surface plates press the roller and rotate to squeeze the abrasive cloth.

[Embodiments of the Invention] Details of the method and apparatus of the present invention will be explained below with reference to an illustrated embodiment. First, the apparatus will be described, and the method of the invention will be explained along with its operation.

The outline of the polishing apparatus to which this embodiment is applied will be explained with reference to FIG. 1. (1) is a main bracket fixed to a bed (2), and an internal gear (3
) is mounted so as to be vertically adjustable and rotatable, and is driven by internal gears (3) and (4). In addition, a flanged sleeve (5) is rotatably attached to the inside of the main bracket (1).
A lower surface plate (7) is fixed to this flange portion (6). The gear (8) rotates the lower surface plate (the force is driven to rotate. On the other hand, a center rotation axis Ql is provided at the center, and this is driven by the gear αυ many rotations, and the button and the upper end 03
is provided with a keyway and rotates the upper surface plate fi3. The upper surface plate 03 is moved up and down by a hydraulic mechanism (not shown) so as to be able to adjust its position as appropriate, and is lowered so that the upper part a of the center rotation axis a
3 and is rotationally driven by gear αυ. An inner sleeve I is fitted on the outside of this central rotating shaft α, and a sun gear (151) is attached to the upper part of this, and a gear (1e) is attached to the lower part of the inner sleeve I, and a sun gear (1[ The upper surface plate (131, the lower surface plate (7) K has a polishing cloth -,0υ attached to the opposing machining surface (IIEI, as). Although the details are not shown, the upper surface plate (131) and the lower surface plate (7) K are The surface plate a3 is moved up and down to adjust its position, and is also provided with a mechanism for appropriately adjusting the pressing force, which is similar to a generally known mechanism.Although not shown, the outside is equipped with a gear. The carrier containing the object to be polished inside is held between the lower surface plate (a3) and the upper surface plate (a3) while being engaged with the sun gear (L) and the internal gear (3), and both gears Q! 19.

Due to the rotation of (3), the carrier rotates on its own axis and revolves on the lower surface plate (force), and is finished to a mirror surface by the polishing cloths 01 and (2υ) attached to the rotating measuring plate (7), <13.

Next, a first embodiment of the device of the present invention will be described.

In Figures 2 to 6, 09 is a main body, which is a rectangular plate-like member, and its length in the longitudinal direction is longer than the width in the radial direction of the lower surface plate (7), and both ends protrude. Teeth that mesh with the sun gear α9 are carved on one end of the rear end, and teeth that mesh with the internal gear (3) are carved on the other end (5). In addition, a rectangular mounting hole (c) is provided in the center that passes through the top and bottom.

In this installation, a pair of bearing bodies (30) and (31) are installed near both longitudinal ends of the hole. These bearing bodies (30) and (31) are equipped with rollers made of stainless steel.
is rotatably supported, and has a diameter of approximately 50 to 6
A support shaft (
It is composed of a protruding structure. The roller O side is the bearing body (
30), (3]) when attached to the main body +251
It protrudes approximately 1 to 5 I11 below. The bearing bodies (30) and (31) have a bearing slide (to) into which the support shaft (b) is inserted, a guide groove (to) to guide this, and a bottom as shown in the enlarged view in Figure 3. It consists of a bearing block 07) and a fixing screw for fixing these, and by moving the bearing slide 0Q up and down, rollers of various diameters can be selected as appropriate.

Next, we will explain the operation of this device as well as an embodiment of the method of the present invention. 1. First, as shown in Fig. Surface plate (IS
Place the polishing cloth. Then, lower the upper surface plate (1) coated with adhesive and apply a polishing cloth (21, 12υ) with appropriate pressure.
Press. After a few minutes, when the upper surface plate 03) is raised, the polishing cloth (A) also rises,
Both lamp polishing cloths (A) and Ql) are now temporarily glued.Next, place the polishing cloth attachment device described above on the lower surface plate (7). That is, as shown in FIGS. 4 and 5, the main body (
Both ends of (c), part of the gear @
51. Attach the lower surface plate (along the radial direction of the force) so that it meshes with the internal gear (3), respectively. By holding the gears (15) and (3) K, the main body (C) is held in place without tilting. The roller G3 is maintained in the position shown in FIG. Gradually lower the upper surface plate a3 while keeping it in place, until it comes into contact with the roller cl and presses it lightly.Therefore, both upper and lower surface plates are set.

(When the force is reversely rotated at a constant speed, the polishing cloth (21) attached to both the upper and lower surface plates (13, (7)
, fflυ to ensure that the adhesive is sufficiently well adhered, and the unevenness during adhesion is evened out to create a flat surface, completing the adhesion work.

In this example, the upper and lower surface plates (1:1, (7
) has an outer diameter of 840 mtx and an inner diameter of 2651111, whereas the cylindrical member (c) of roller 04 has an outer diameter of 5011 m and a length of 850111 mm, with the cylindrical member (c) protruding approximately 3 degrees from the bottom surface of the main body (c). , surface plate 0th floor.

(If the rotational speed of each force is 3 Or-pm and the load from the upper surface plate is 50 kg, the adhesion of the polishing cloth (2G, (21) will be complete after 1 minute of ironing,
Also, there is no unevenness of the polishing cloth due to unevenness of the adhesive.

Next, FIG. 7 shows a second embodiment of the polishing cloth attachment apparatus. The main body (c) has almost the same shape as the first embodiment, but there are two rollers (32a), (32a) with respect to the center line (to) which coincides with the radial direction of the lower surface plate (the radial direction of force). It is installed diagonally to the center line (to).

These rollers (32a), (32a) are arranged so as to overlap in the circumferential direction of the lower surface plate (force), and they are located on the lower surface plate (outer peripheral edge (7a) of force, inner peripheral edge (7b)
) It has become very prominent. The other aspects are the same as those in the first embodiment, so their explanation will be omitted.

[Effects of the Invention] As detailed above, the method of attaching the polishing cloth to the polishing apparatus of the present invention is to temporarily adhere the polishing cloth to the upper surface plate and the lower surface plate, and then
Since the configuration is such that both surface plates are rotated by intervening rollers between them, the rollers uniformly squeeze the upper and lower abrasive cloths, making it easy and safe to remove the upper surface plate. The polishing cloth can be replaced. ! When the rollers are disposed obliquely to the radial direction of the surface plate as in the second embodiment, there is an effect that radial rubbing can also be applied.

Furthermore, the polishing cloth attachment device of the polishing device of the present invention is
A cylindrical member is rotatably supported on the main body that straddles the lower surface plate in the radial direction, so the upper and lower polishing cloths can be squeezed with almost the same pressure at all times, and the pressure on the upper surface plate can be adjusted easily. This allows you to squeeze with optimal pressure.

Further, in the case where the main body is engaged with the sun gear and the internal gear as in this embodiment, it can be squeezed while being moved relative to the surface plate, which has the effect of improving work efficiency.

Although one roller was used in this embodiment, a plurality of rollers may be provided, for example, equally spaced, and the fixing of the main body is not limited to gear engagement, but may also be engaged with a pin or the like. Of course, it is not limited to the sun gear and the internal gear, and may be fixed to other parts. Further, the main body may be mounted with a notch instead of a hole, and it is sufficient if the roller is mounted so as to be in contact with the upper and lower polishing cloths.

[Brief explanation of the drawing]

FIG. 1 is a cross-sectional front view showing the main parts of a polishing apparatus in which the present invention is implemented, FIG. 2 is a partially cross-sectional front view of the first embodiment of the present invention apparatus, and FIG. FIG. 4 is a plan view of a main part explaining an embodiment of the method of the present invention, FIG. 5 is a sectional front view, FIG. 6 is an explanatory view, and FIG. FIG. (3)...Internal gear, (force...lower surface plate, (
1 →... upper surface plate, (+51... sun gear, kiln, (2υ
...Abrasive cloth, (phantom...main body, (2Q...one end, @
...Other end, (30)...bearing body, C32)...roller, (to)...cylindrical member, (34)...support shaft.

Claims (1)

[Claims] A step of temporarily attaching the polishing cloth to each of the surface plates by adhesive, and compressing and pinching a rotatably supported roller disposed between the two surface plates. A method for attaching abrasive cloth to a polishing apparatus, characterized in that both surface plates are rotated relatively in the opposite direction, and the temporarily attached abrasive cloth is rubbed by the roller. (2) A method for applying a polishing cloth to a polishing apparatus according to claim 1, characterized in that a plurality of rollers are provided at equal intervals and the polishing cloth is tightened. (3) The polishing cloth of the polishing apparatus according to claim 1 or 2, characterized in that the polishing is performed by a roller disposed in the radial direction of both the upper and lower surface plates and having a longer width than the width of both the surface plates. Attached is the method. (4) The polishing cloth of the polishing apparatus according to claim 1 or 2, characterized in that the polishing cloth is squeezed by a plurality of rollers arranged obliquely with respect to the radial direction of both the upper and lower surface plates. is the method. (5) Definition of a polishing device having an upper surface plate and a lower surface plate with a polishing cloth applied to the polishing surface. A main body in which a gear and the other end are attached to be rotatable together with the internal gear, at least a pair of bearing bodies attached to the main body at a distance from each other, and a cylindrical member having support shafts protruding from both ends. A polishing device comprising: a roller which is rotatably supported by the bearing body and whose upper surface is in pressure contact with the polishing cloth K of the upper surface plate and whose lower surface is in pressure contact with the polishing cloth K of the lower surface plate. Cloth upholstery is a device. (6) A polishing cloth attachment device for a polishing apparatus according to claim 5, wherein a plurality of main bodies having rollers are provided equidistantly with respect to the center of rotation of the lower surface plate. (7) The main body has tooth profiles carved on both ends thereof to engage with the sun gear and internal gear of the polishing device, and is fixed to the two gears by the engagement between the two gears and the tooth profiles. A polishing cloth attachment device of a polishing apparatus according to claim 5 or 6, characterized in that: (8) The polishing device according to any one of claims 5 to 7, wherein a plurality of rollers are attached to the main body obliquely with respect to the radial direction of the lower surface plate. The polishing cloth is attached by a device.