JPH0445808Y2 - - Google Patents

Description

[Detailed description of the invention] Industrial application field The invention is a double-sided processing device that polishes both sides of a magnetic disk, or forms slight streaks on both sides after polishing (micro-rough surface treatment). The present invention relates to a holding device for a plate to be processed, which is used when holding a magnetic disk in a predetermined position.

Conventional technology Conventionally, for example, magnetic disk polishing was
As seen in 130834 of 1956 and Japanese Patent Application Laid-open No. 120460 of 1982, wrapping tape was carried out by contacting the top surface of a magnetic disk while rotating it around its vertical axis. . According to this conventional method, after polishing one side, the magnetic disk is turned over (turned over) and polished on the other side, which is inefficient and expensive because this turning operation is done manually. This was also a factor in the price. Therefore, recently, as shown in FIGS. 4 and 5, an annular lower polishing body 7 has been developed.
0 and an upper polishing body 71 that can move toward and away from the lower polishing body 70 by raising and lowering, respectively, with the vertical axis 7
It is freely rotatable in opposite directions around 2 and 73,
A magnetic disk 74 is placed between both polishing bodies 70 and 71.
A double-sided polishing type with a holding device 75 is provided. Here, the holding device 75 includes a drive roller 77 attached to a drive shaft 76 located on the vertical axis 72.
and idling rollers 78, which face the drive roller 77 and are arranged in a plurality of sets of two in the circumferential direction.
A ring-shaped carriage 79 is rotatably supported between a pair of rollers 77 and 78. Then, the magnetic disk 74 carried by a chuck-type transfer device or the like is fitted into a holding hole 80 formed in the center of the carriage 79, and the lower surface of the magnetic disk 74 is received by the lower polishing body 70. While both polishing bodies 70 and 71 are being rotated, the upper polishing body 71 is lowered and brought into contact with the upper surface of the magnetic disk 74, thereby simultaneously polishing both surfaces. At this time, the rotational force of the drive roller 77 is transmitted to the carriage 79, and the holding hole 80
The magnetic disk 74 also rotates due to the frictional force on the inner peripheral surface of the magnetic disk 7.
No. 4 is polished over the entire inner surface.

Problems to be Solved by the Invention In the conventional type described above, the carriage 79 is a ring plate that is even thinner than the thin magnetic disk 74. Therefore, the load applied during polishing work is applied to each roller 77, 78 at three points. The uneven load causes the carriage 79 to bend, making it impossible to expect uniform polishing over the entire area on both sides.

The purpose of this invention is to make the carriage
The object of the present invention is to provide a holding device for a plate to be processed that can be forcibly rotated without being bent.

Means for Solving the Problems In order to solve the above problems, the device for holding a plate to be processed according to the present invention includes a plate facing the processing device provided on the fixed part side, and a through hole formed in this plate. , a carriage is provided which is fitted into the through hole and has a gear portion formed on the outer periphery that can freely slide on the inner circumferential surface of the through hole, a holding hole for the plate to be processed is formed in this carriage, and the gear of the carriage is formed. A drive gear that meshes with the fixed part is provided on the fixed part side.

According to the configuration of the present invention, by operating the processing device with the plate to be processed fitted into the holding hole of the carriage, the surface of the plate to be processed can be processed. The rotational force of the drive gear is transmitted to the carriage via the gear section, forcing the carriage to rotate. At this time, the load applied to the carriage passes through the gear section through a large number of tooth crests all around the circumference of the gear section. The carriage is received by almost the entire circumference of the inner circumferential surface of the hole, so that forced rotation of the carriage is performed without bending.

Embodiment An embodiment of the present invention will be described below with reference to FIGS. 1 to 3. Reference numeral 1 denotes a double-sided polishing device which is an example of a processing device, and its main body 2 is formed into a C-shape in side cross section by a base frame 2A and a frame 2B. A processing space 3 with an open surface and front side is formed. An upwardly facing fixed side processing section 4 is disposed on the base frame 2A,
A downward movable processing section 5 is disposed on the frame 2B, and both processing sections 4 and 5 face each other in the vertical direction.

In the fixed side processing section 4, a rotating shaft 7 is inserted through a cylindrical body 6 that is integrated with the base frame 2A, and this rotating shaft 7 is rotatable around a vertical axis 9 via a bearing 8. This is made possible by interposing the endless transmission device 12 between the output shaft 11 of the motor 10 provided in the base frame 2A and the lower end of the rotating shaft 7. The upper part of the rotating shaft 7 is formed into a flange part 7a,
This flange portion 7a is provided with a mounting plate 13,
A lower polishing body (such as a grindstone) 14 which is an example of a processing body
is installed. In the other movable side processing section 5, an inner cylinder 1 is attached to an outer cylinder 15 in the vertical direction integrally with the frame 2B.
6 is inserted, and this inner cylinder body 16 is supported via a bearing 17 so that it can only rotate freely around a vertical axis 18. This rotation of the inner cylindrical body 16 is made possible by interposing an endless transmission device 21 between the output shaft 20 of the motor 19 provided on the frame 2B and the upper end of the inner cylindrical body 16. 18 is co-linear with the lower longitudinal axis 9. A spline cylinder 22 is fixed within the inner cylinder 16, and a spline shaft 23 is provided to be inserted into the spline cylinder 22 with a spline fit. A boss member 25 is fixed to the middle of a shaft portion 23a formed at the lower part of the spline shaft 23 via a key 24, and a flange member 27 is freely movably attached to the lower end via a ball bearing 26.
The pin 28 from this flange material 27 is connected to the boss member 2.
It is inserted on the 5th side. An upper polishing body 30 is attached to the lower surface of the flange material 27 via a mounting plate 29.
is installed. A bracket 32 is attached to the upper end of the shaft portion 23a via a bearing 31, and a cylinder device 33 attached to the outer cylindrical body 15 is interlocked with this bracket 32. Both processing parts 4,
5, at least the polishing bodies 14, 30 protrude into the processing space 3.

A holding device 34 is interposed between both processing sections 4 and 5. In other words, the bolts from the base frame 2A side
A plate body 36 is attached via nuts 35 so as to be vertically adjustable, and round through holes 37 are provided at three locations (the number is not limited, such as singular or plural) of this plate body 36.
is formed. A carriage 38 that is fitted into these through holes 37 is provided, and this carriage 3
A gear portion 39 that can slide freely on the inner peripheral surface of the through hole 37 is formed on the entire outer peripheral surface of the through hole 37 . This sliding contact is effected by rotation with a substantially tight fit. A corresponding through hole 37 is provided on the outside of each through hole 37.
A through hole 40 is formed by partially communicating with the gear portion 3 of the carriage 38.
A drive gear 41 that is always in mesh with the gear 9 is disposed. A vertical shaft 42 having the driving gear 41 attached to its upper end is rotatably supported via a bearing 44 on the side of a mounting member 43 connected from the lower surface of the plate 36 . A transmission wheel 45 is fixed to the lower end of the vertical shaft 42, and a common endless rotating body 47 is stretched between all the transmission wheels 45 via guide wheels 46 appropriately provided on the plate body 36. One of the vertical shafts 42 projects upward;
This protrusion is operatively connected to a motor 48 via an endless transmission 49. The carriage 38 has a ring plate shape and forms a holding hole 51 for a magnetic disk 50, which is an example of a plate to be processed. Note that the number of holding holes 51 for one carriage 38 may be arbitrary, such as singular or plural, and the shape may also be arbitrary, such as rectangular.

Reference numeral 55 denotes a transfer device for supplying and taking out the magnetic disk 50, which includes a left-right rail 56 attached to the side surface of the frame 2B, and a moving platform supported and guided by the rail 56 via a sliding portion 57. 58, an elevating body 60 guided by the movable table 58 via a guide device 59, a cylinder device 61 for elevating and lowering provided between the movable table 58 and the elevating body 60, and a plurality of locations on the elevating body 60. The reciprocating movement of the movable table 58 is performed by a cylinder device, a drive chain, a screw shaft mechanism (none of which are shown), etc.

Next, the operation of polishing the magnetic disk 50 using the double-sided polishing device 1 of the above embodiment will be explained.

Before supplying the magnetic disk 50, both processing units 4,
5 and the holding device 34 have stopped rotating. In the movable side processing section 5, the cylinder device 3
3, the upper polishing body 30 is raised and separated. In this state, each suction tool 6
2, the movable table 58 that attracts the magnetic disk 50 is moved laterally, and the elevating body 60 is positioned on both the polishing bodies 14 and 30. At this time, each magnetic disk 50
are aligned with and opposed to the holding hole 51. Next, the elevating body 60 is lowered by extension of the cylinder device 61,
The magnetic disk 50 is fitted into the holding hole 51. After releasing the suction by the suction tool 62, the cylinder device 61 contracts to raise the elevating body 60, and further moves the movable table 58 laterally to move the elevating body 60 out from between the polishing bodies 14 and 30 to the side. let At this time, the lower surface of the fitted magnetic disk 50 is received by the lower polishing body 14. Next, by extension of the cylinder device 33, the upper polishing body 30 is lowered via the bracket 32, the spline shaft 23, etc., and each motor 10, 19, 48 is started. As a result, the upper polishing body 30 is attached to the magnetic disk 5.
Both polishing bodies 14 and 30 are brought into contact with the top surface of the magnetic disk 50 and rotated in opposite directions, thereby polishing both sides of each magnetic disk 50. That is, in the fixed side processing section 4, the rotational force of the motor 10 is transmitted to the lower polishing body 1 via the endless transmission 12, the rotating shaft 7, the mounting plate 13, etc.
4 to rotate this lower polishing body 14 around the longitudinal axis 9. In addition, in the movable side processing section 5, the rotational force of the motor 19 is transferred to the endless transmission device 21, the inner cylinder body 1
6. Upper polishing body 30 via spline cylinder 22, spline shaft 23, pin 28, mounting plate 29, etc.
is transmitted to rotate this upper polishing body 30 around the vertical axis 18. At that time, both polishing bodies 14, 30
or some displacement of the magnetic disk 50, the ball bearing 26
This can be absorbed by the displacement of the flange material 27 via.
During the above-described polishing of both sides, the rotational force of the motor 48 is transmitted to each driving gear 41 via the endless transmission 49, the endless rotating body 47, the vertical shaft 42, etc. As a result, the carriage 38 meshing with each drive gear 41 via the gear portion 39 rotates within the through hole 37.
Since the magnetic disk 50 rotates in the same direction as the carriage 38, both sides of the magnetic disk 50 are polished uniformly over the entire area. The through hole 37 receives the rotational force of the drive gear 41.
The carriage 38 rotating inside generates a load in the planar direction due to the engagement between the drive gear 41 and the gear part 39, but this load is transmitted through a large number of tooth crest groups existing around the entire circumference of the gear part 39. It is uniformly received over almost the entire circumference of the inner peripheral surface of the hole 37, so that the forced rotation of the carriage 38 is performed without bending.

In the above embodiment, a type in which both vertical axes 9 and 18 are the rotational axes has been described, but this may be a type in which the rotational axes are inclined or horizontal axes. Furthermore, although a double-sided polishing type is shown in the embodiment, this may be a single-sided polishing type in which the fixed side processing section 4 has a receiving plate structure, for example.

In the above embodiment, the polishing work of the magnetic disk 50 was shown, but the magnetic disk 50 was used as the plate to be processed.
The article may be other than the above, and the processing operation performed by the processing device may be other than polishing.

Effects of the Invention According to the present invention having the above-mentioned configuration, by fitting the plate to be processed into the holding hole of the carriage and then operating the processing device, the surface of the plate to be processed can be processed. During this processing operation, the rotational force of the drive gear is transmitted to the carriage via the gear section, and by forcing the carriage to rotate, uniform processing can be performed over the entire surface of the plate to be processed. At this time, the load applied to the carriage can be uniformly received almost all around the inner circumference of the through hole via the numerous tooth crest groups all around the gear part.
Therefore, the forced rotation of the carriage can be performed without bending, and uniform and good polishing can be performed on the entire surface.

[Brief explanation of the drawing]

Figures 1 to 3 show an embodiment of the present invention, with Figure 1 being a vertical sectional side view, Figure 2 being a plan view of the main parts, and Figure 3 being a plan view of the main parts.
4 is a partially cutaway front view showing a conventional example, and FIG. 5 is a schematic plan view of the same. DESCRIPTION OF SYMBOLS 1... Double side polishing device (processing device), 2... Main body (fixed part), 4... Fixed side processing part, 5... Movable side processing part, 9... Vertical axis center, 14... Lower polishing body, 18
... Vertical axis center, 30 ... Upper polishing body, 34 ... Holding device, 36 ... Plate body, 37 ... Through hole, 38 ...
Carriage, 39...Gear portion, 41...Drive gear, 50...Magnetic disk (plate to be processed), 51
... Holding hole, 55 ... Transfer device, 62 ... Suction tool.

Claims (1)

[Scope of utility model registration request] A plate facing the processing device is provided on the fixed part side, a through hole is formed in this plate, and the plate is fitted into the through hole,
A carriage is provided with a gear portion formed on the outer periphery that can freely come into sliding contact with the inner circumferential surface of the through hole, a holding hole for the plate to be processed is formed in this carriage, and a drive gear that meshes with the gear portion of the carriage is fixed. A holding device for a plate to be processed, characterized in that it is provided on the side of the body.