JPS6383252U - - Google Patents
Info
- Publication number
- JPS6383252U JPS6383252U JP1986175831U JP17583186U JPS6383252U JP S6383252 U JPS6383252 U JP S6383252U JP 1986175831 U JP1986175831 U JP 1986175831U JP 17583186 U JP17583186 U JP 17583186U JP S6383252 U JPS6383252 U JP S6383252U
- Authority
- JP
- Japan
- Prior art keywords
- plate
- hole
- carriage
- processed
- gear portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005498 polishing Methods 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Description
第１図〜第３図は本考案の一実施例を示し、第
１図は縦断側面図、第２図は要部の平面図、第３
図は同縦断側面図、第４図は従来例を示す一部切
欠き正面図、第５図は同概略平面図である。
１…両面研磨装置（処理装置）、２…本体（固
定部）、４…固定側処理部、５…可動側処理部、
９…縦軸心、１４…下位研磨体、１８…縦軸心、
３０…上位研磨体、３４…保持装置、３６…板体
、３７…貫通孔、３８…キヤリツジ、３９…歯車
部、４１…駆動歯車、５０…磁気デイスク（被処
理板体）、５１…保持孔、５５…移載装置、６２
…吸着具。
Figures 1 to 3 show an embodiment of the present invention, with Figure 1 being a vertical sectional side view, Figure 2 being a plan view of the main parts, and Figure 3 being a plan view of the main parts.
4 is a partially cutaway front view showing a conventional example, and FIG. 5 is a schematic plan view of the same. 1... Double side polishing device (processing device), 2... Main body (fixed part), 4... Fixed side processing part, 5... Movable side processing part,
9... Vertical axis center, 14... Lower polishing body, 18... Vertical axis center,
30...Upper polishing body, 34...Holding device, 36...Plate body, 37...Through hole, 38...Carriage, 39...Gear portion, 41...Drive gear, 50...Magnetic disk (plate to be processed), 51...Holding hole , 55...transfer device, 62
...Adsorption tool.
Claims (1)
の板体に貫通孔を形成し、この貫通孔に嵌入し、
かつ貫通孔の内周面に摺接自在な歯車部を外周に
形成したキヤリツジを設けるとともに、このキヤ
リツジに被処理板体の保持孔を形成し、前記キヤ
リツジの歯車部に噛合する駆動歯車を固定部側に
設けたことを特徴とする被処理板体の保持装置。 A plate facing the processing device is provided on the fixed part side, a through hole is formed in this plate, and the plate is fitted into the through hole,
A carriage is provided with a gear portion formed on the outer periphery that can freely come into sliding contact with the inner circumferential surface of the through hole, a holding hole for the plate to be processed is formed in this carriage, and a driving gear meshed with the gear portion of the carriage is fixed. A holding device for a plate to be processed, characterized in that it is provided on the side of the body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986175831U JPH0445808Y2 (en) | 1986-11-15 | 1986-11-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986175831U JPH0445808Y2 (en) | 1986-11-15 | 1986-11-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6383252U true JPS6383252U (en) | 1988-06-01 |
| JPH0445808Y2 JPH0445808Y2 (en) | 1992-10-28 |
Family
ID=31115517
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986175831U Expired JPH0445808Y2 (en) | 1986-11-15 | 1986-11-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0445808Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001252864A (en) * | 2000-03-08 | 2001-09-18 | Speedfam Co Ltd | Polishing method and device |
-
1986
- 1986-11-15 JP JP1986175831U patent/JPH0445808Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001252864A (en) * | 2000-03-08 | 2001-09-18 | Speedfam Co Ltd | Polishing method and device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0445808Y2 (en) | 1992-10-28 |
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