JPS5950170A - 被膜塗布用のプラズマア−ク装置 - Google Patents
被膜塗布用のプラズマア−ク装置Info
- Publication number
- JPS5950170A JPS5950170A JP16155882A JP16155882A JPS5950170A JP S5950170 A JPS5950170 A JP S5950170A JP 16155882 A JP16155882 A JP 16155882A JP 16155882 A JP16155882 A JP 16155882A JP S5950170 A JPS5950170 A JP S5950170A
- Authority
- JP
- Japan
- Prior art keywords
- cathode
- anode
- arc
- chamber
- processing chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000576 coating method Methods 0.000 title description 21
- 239000011248 coating agent Substances 0.000 title description 14
- 238000010422 painting Methods 0.000 title 1
- 238000012545 processing Methods 0.000 claims description 30
- 239000002245 particle Substances 0.000 claims description 13
- 238000001704 evaporation Methods 0.000 claims description 12
- 230000008020 evaporation Effects 0.000 claims description 12
- 239000002184 metal Substances 0.000 claims description 5
- 241000283690 Bos taurus Species 0.000 claims 1
- 101100327917 Caenorhabditis elegans chup-1 gene Proteins 0.000 claims 1
- 239000004020 conductor Substances 0.000 claims 1
- 239000004575 stone Substances 0.000 claims 1
- 238000000034 method Methods 0.000 description 18
- 230000008569 process Effects 0.000 description 18
- 239000000463 material Substances 0.000 description 9
- 239000007921 spray Substances 0.000 description 8
- 230000009471 action Effects 0.000 description 5
- 239000010406 cathode material Substances 0.000 description 4
- 230000007935 neutral effect Effects 0.000 description 4
- 230000000977 initiatory effect Effects 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 235000001674 Agaricus brunnescens Nutrition 0.000 description 1
- 241000239290 Araneae Species 0.000 description 1
- 241000981595 Zoysia japonica Species 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 238000005036 potential barrier Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 230000002747 voluntary effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16155882A JPS5950170A (ja) | 1982-09-16 | 1982-09-16 | 被膜塗布用のプラズマア−ク装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16155882A JPS5950170A (ja) | 1982-09-16 | 1982-09-16 | 被膜塗布用のプラズマア−ク装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5950170A true JPS5950170A (ja) | 1984-03-23 |
| JPS6154110B2 JPS6154110B2 (enExample) | 1986-11-20 |
Family
ID=15737385
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16155882A Granted JPS5950170A (ja) | 1982-09-16 | 1982-09-16 | 被膜塗布用のプラズマア−ク装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5950170A (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62290866A (ja) * | 1986-06-06 | 1987-12-17 | Nissin Electric Co Ltd | 薄膜形成装置 |
| JPS63255366A (ja) * | 1987-04-10 | 1988-10-21 | Nissin Electric Co Ltd | 絶縁性基体への導電性膜の被覆方法 |
| JP2013036106A (ja) * | 2011-08-10 | 2013-02-21 | Toyota Motor Corp | 成膜装置及び成膜方法 |
-
1982
- 1982-09-16 JP JP16155882A patent/JPS5950170A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62290866A (ja) * | 1986-06-06 | 1987-12-17 | Nissin Electric Co Ltd | 薄膜形成装置 |
| JPS63255366A (ja) * | 1987-04-10 | 1988-10-21 | Nissin Electric Co Ltd | 絶縁性基体への導電性膜の被覆方法 |
| JP2013036106A (ja) * | 2011-08-10 | 2013-02-21 | Toyota Motor Corp | 成膜装置及び成膜方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6154110B2 (enExample) | 1986-11-20 |
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