JPS5946745A - 荷電粒子線装置における自動焦点合わせ装置 - Google Patents

荷電粒子線装置における自動焦点合わせ装置

Info

Publication number
JPS5946745A
JPS5946745A JP57157927A JP15792782A JPS5946745A JP S5946745 A JPS5946745 A JP S5946745A JP 57157927 A JP57157927 A JP 57157927A JP 15792782 A JP15792782 A JP 15792782A JP S5946745 A JPS5946745 A JP S5946745A
Authority
JP
Japan
Prior art keywords
lens
signal
particle beam
sample
focusing lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57157927A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0255899B2 (enrdf_load_stackoverflow
Inventor
Hironobu Moriwaki
森脇　弘暢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NICHIDENSHI TECHNICS KK
Original Assignee
NICHIDENSHI TECHNICS KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NICHIDENSHI TECHNICS KK filed Critical NICHIDENSHI TECHNICS KK
Priority to JP57157927A priority Critical patent/JPS5946745A/ja
Publication of JPS5946745A publication Critical patent/JPS5946745A/ja
Publication of JPH0255899B2 publication Critical patent/JPH0255899B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
JP57157927A 1982-09-09 1982-09-09 荷電粒子線装置における自動焦点合わせ装置 Granted JPS5946745A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57157927A JPS5946745A (ja) 1982-09-09 1982-09-09 荷電粒子線装置における自動焦点合わせ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57157927A JPS5946745A (ja) 1982-09-09 1982-09-09 荷電粒子線装置における自動焦点合わせ装置

Publications (2)

Publication Number Publication Date
JPS5946745A true JPS5946745A (ja) 1984-03-16
JPH0255899B2 JPH0255899B2 (enrdf_load_stackoverflow) 1990-11-28

Family

ID=15660507

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57157927A Granted JPS5946745A (ja) 1982-09-09 1982-09-09 荷電粒子線装置における自動焦点合わせ装置

Country Status (1)

Country Link
JP (1) JPS5946745A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61191866U (enrdf_load_stackoverflow) * 1985-05-20 1986-11-29
JPH01220351A (ja) * 1988-02-27 1989-09-04 Jeol Ltd 走査型電子顕微鏡等の自動焦点合わせ方法
JPH01231251A (ja) * 1988-03-09 1989-09-14 Hitachi Ltd 電子顕微鏡の焦点合わせ装置
JPH01239742A (ja) * 1988-03-17 1989-09-25 Nichidenshi Tekunikusu:Kk 走査電子顕微鏡の自動焦点制御装置
WO2004030056A1 (ja) * 2002-09-24 2004-04-08 Nikon Corporation 荷電粒子線露光装置における非点収差補正方法、非点感度の決定方法、及び露光方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61191866U (enrdf_load_stackoverflow) * 1985-05-20 1986-11-29
JPH01220351A (ja) * 1988-02-27 1989-09-04 Jeol Ltd 走査型電子顕微鏡等の自動焦点合わせ方法
JPH01231251A (ja) * 1988-03-09 1989-09-14 Hitachi Ltd 電子顕微鏡の焦点合わせ装置
JPH01239742A (ja) * 1988-03-17 1989-09-25 Nichidenshi Tekunikusu:Kk 走査電子顕微鏡の自動焦点制御装置
WO2004030056A1 (ja) * 2002-09-24 2004-04-08 Nikon Corporation 荷電粒子線露光装置における非点収差補正方法、非点感度の決定方法、及び露光方法

Also Published As

Publication number Publication date
JPH0255899B2 (enrdf_load_stackoverflow) 1990-11-28

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