JPS5945851U - 荷電粒子線エネルギ−分析装置 - Google Patents

荷電粒子線エネルギ−分析装置

Info

Publication number
JPS5945851U
JPS5945851U JP14152182U JP14152182U JPS5945851U JP S5945851 U JPS5945851 U JP S5945851U JP 14152182 U JP14152182 U JP 14152182U JP 14152182 U JP14152182 U JP 14152182U JP S5945851 U JPS5945851 U JP S5945851U
Authority
JP
Japan
Prior art keywords
charged particle
particle beam
analyzer
beam energy
energy analyzer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14152182U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6335481Y2 (cs
Inventor
岩槻　正志
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP14152182U priority Critical patent/JPS5945851U/ja
Publication of JPS5945851U publication Critical patent/JPS5945851U/ja
Application granted granted Critical
Publication of JPS6335481Y2 publication Critical patent/JPS6335481Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP14152182U 1982-09-18 1982-09-18 荷電粒子線エネルギ−分析装置 Granted JPS5945851U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14152182U JPS5945851U (ja) 1982-09-18 1982-09-18 荷電粒子線エネルギ−分析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14152182U JPS5945851U (ja) 1982-09-18 1982-09-18 荷電粒子線エネルギ−分析装置

Publications (2)

Publication Number Publication Date
JPS5945851U true JPS5945851U (ja) 1984-03-27
JPS6335481Y2 JPS6335481Y2 (cs) 1988-09-20

Family

ID=30316503

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14152182U Granted JPS5945851U (ja) 1982-09-18 1982-09-18 荷電粒子線エネルギ−分析装置

Country Status (1)

Country Link
JP (1) JPS5945851U (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001148231A (ja) * 1999-11-22 2001-05-29 Hitachi Ltd 多重荷電粒子検出器、及びそれを用いた走査透過電子顕微鏡

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001148231A (ja) * 1999-11-22 2001-05-29 Hitachi Ltd 多重荷電粒子検出器、及びそれを用いた走査透過電子顕微鏡

Also Published As

Publication number Publication date
JPS6335481Y2 (cs) 1988-09-20

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