JPS5945475B2 - Laser processing equipment - Google Patents

Laser processing equipment

Info

Publication number
JPS5945475B2
JPS5945475B2 JP57174599A JP17459982A JPS5945475B2 JP S5945475 B2 JPS5945475 B2 JP S5945475B2 JP 57174599 A JP57174599 A JP 57174599A JP 17459982 A JP17459982 A JP 17459982A JP S5945475 B2 JPS5945475 B2 JP S5945475B2
Authority
JP
Japan
Prior art keywords
inert gas
laser processing
workpiece
laser
nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57174599A
Other languages
Japanese (ja)
Other versions
JPS5964191A (en
Inventor
高久 長谷川
哲雄 稲川
邦夫 半田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP57174599A priority Critical patent/JPS5945475B2/en
Publication of JPS5964191A publication Critical patent/JPS5964191A/en
Publication of JPS5945475B2 publication Critical patent/JPS5945475B2/en
Expired legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1462Nozzles; Features related to nozzles
    • B23K26/1464Supply to, or discharge from, nozzles of media, e.g. gas, powder, wire
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/146Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor the fluid stream containing a liquid

Description

【発明の詳細な説明】 本発明は、王として複合材料を、レーザ光を用いて切断
、穿孔加工するレーザ加工装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a laser processing device for cutting and perforating a composite material using a laser beam.

レーザ光を用いて切断、穿孔等のレーザ加工を行う場合
、レーザ集光レンズに対して、被加工材の溶融物、生成
物が付着してレンズを汚損するとレーザ光に障害を与え
る。
When cutting, drilling, or other laser processing is performed using a laser beam, if melts or products from the workpiece adhere to the laser condensing lens and stain the lens, the laser beam will be impaired.

これを防止するためにレーザ光照射ノズルに、レーザ加
工個所周囲を囲むよう不活性ガスを供給して、上記レー
ザ加工個所を外気から遮断し、被加工個所の酸化を防止
するようにしたものが、トリえば特公昭56一3207
7号公報などで知られている。またレーザ溶接機として
は、溶接部位へ不活性ガスを供給し、酸化防止および冷
却を行う方式が、例えば実開昭57−19090号公報
などで知られている。さらに」ま、被加工個所の裏側に
付着した溶融物を研掃する装置も、トリえば特開昭57
−44498号公報などで知られている。しかし、上述
の旧来の先行技術では、複合材料の穿孔あるいは切断加
工における問題を解決するには至らない。
To prevent this, an inert gas is supplied to the laser beam irradiation nozzle so as to surround the laser processing area, thereby shielding the laser processing area from the outside air and preventing oxidation of the processed area. , Toriba Special Public Service No. 56-3207
It is known from Publication No. 7. Further, as a laser welding machine, a system in which an inert gas is supplied to the welding area to prevent oxidation and to cool the welding area is known, for example, from Japanese Utility Model Application Publication No. 57-19090. Furthermore, if a device for cleaning the molten material adhering to the back side of the workpiece is developed, it is possible to develop
It is known from, for example, Japanese Patent No.-44498. However, the above-mentioned traditional prior art does not solve the problem of drilling or cutting composite materials.

すなわち、一般に、溶融温度および気化温度などが異な
る2種以上の材料から構成される複合材料を、レーザ光
を用いて切断あるいは穿孔する時には、被加工物の加工
条件は、溶融温度および気化温度の高い材料にレーザ出
力切断速度を合わせて設置されるため、溶融および気化
温度の低い材料には出力過多となり、熱影響域が拡大さ
れる。
In other words, when cutting or perforating a composite material made of two or more materials with different melting and vaporization temperatures using a laser beam, the processing conditions for the workpiece are generally based on the melting and vaporization temperatures. Since the laser output cutting speed is set to match the high-temperature material, the laser power will be too high for materials with low melting and vaporization temperatures, and the heat-affected zone will be expanded.

このレーザ光による加熱で可燃性の生成物を生じた時、
火焔現象を生じカロエ部の熱影響域の拡大が助長され、
被加工材の飛散した溶融物及び気化した生成物はそのま
まレーザ集光レンズに付着してレンズを汚損する。本発
明は、上記事情にもとづいて提案されたもので、切断あ
るいは穿孔の際に、被カロエ物の上側からは補助ガス及
び不活性ガスを噴出し.被加工物の下側から不活性ガス
ともども.溶融物,生成物を吸引排出して.集光レンズ
の汚損を回避しながら6しかも被加工物が複合材料であ
ることによる熱的影響を最小限にとどめられるようにし
たレーザ加工装置を提供しようとするものである。
When flammable products are generated due to heating by this laser light,
This caused a flame phenomenon and encouraged the expansion of the heat-affected zone in the Kaloe area.
The scattered melt and vaporized products of the workpiece adhere to the laser condensing lens and stain the lens. The present invention was proposed based on the above-mentioned circumstances, and includes blowing out an auxiliary gas and an inert gas from above the object to be carved during cutting or drilling. With inert gas from below the workpiece. Suction and discharge the melt and products. The object of the present invention is to provide a laser processing apparatus that avoids contamination of a condenser lens while minimizing thermal effects due to the fact that the workpiece is made of a composite material.

この目的のため.本発明は.被加工物を申間に挟んで上
側に.レーザ光および補助ガス放出ノズルと被加工物の
レーザ加工部を囲む不活性ガス噴出部を設けたノズル構
造を設置し.また下側に.上記レーザ加工部を囲む不活
性ガス噴出部およびレーザ切断生成物を上記不活性ガス
と共に吸引排出する排出手段を設けたノズル構造を設置
じたことを特徴とするものである。以下.本発明の一実
施例を図面を参照して具体的に説明する。
For this purpose. The present invention is. Place the workpiece between the two on the upper side. A nozzle structure is installed that includes a laser beam and auxiliary gas discharge nozzle and an inert gas jetting part that surrounds the laser processing part of the workpiece. Also on the bottom. The present invention is characterized in that a nozzle structure is installed, which includes an inert gas ejection section surrounding the laser processing section and a discharge means for sucking and discharging the laser cutting product together with the inert gas. below. An embodiment of the present invention will be specifically described with reference to the drawings.

被加工材料1を位置決めする治具2は.Y軸移動レール
3およびX軸移動レール4で縦横に移動されるように.
Y軸移動レール3に沿うX軸移動レール4用キヤリヤに
対して上記X軸移動レール4上で保持されている。上記
Y軸移動レール3を支持する枠組6は.架台5上に固定
されており.上記枠組6の申央には.門型の支持ハウジ
ング7が設けられている。そして.上記支持ハウジング
7の中央には.ブラケツト8を介じてビームベンダー9
が設けてあり,そこにはZ軸方向調整用テレスコピツク
チューブvを設ける。上記テレスコピツクチューブqは
.ブラケツト8に内装されたサーボモータにより上下す
るスクリユ一ねじ10の.先端アーム11の申央穴に嵌
挿し.先端ねじに上側ノズル12を螺着している。これ
によつて上記ノズル12は上下する。下側のノズル13
は.取付台14上にサーボモータ15を設け.その駆動
軸より上方に延ひるスクリユ一ねじ16の先端にアーム
17を設け6上記アーム17の申央穴に吠挿したテレス
コピツトクチユーブ18の先端に螺着されている。
The jig 2 for positioning the workpiece material 1 is. It can be moved vertically and horizontally using the Y-axis moving rail 3 and the X-axis moving rail 4.
It is held on the X-axis moving rail 4 with respect to a carrier for the X-axis moving rail 4 along the Y-axis moving rail 3. The framework 6 that supports the Y-axis moving rail 3 is... It is fixed on a pedestal 5. In the middle of the framework 6 above. A portal-shaped support housing 7 is provided. and. In the center of the support housing 7. Beam bender 9 via bracket 8
is provided, and a telescopic tube v for adjustment in the Z-axis direction is provided there. The telescopic tube q above is. A screw 10 is moved up and down by a servo motor built into the bracket 8. Insert into the center hole of the tip arm 11. The upper nozzle 12 is screwed onto the tip screw. This causes the nozzle 12 to move up and down. Lower nozzle 13
teeth. A servo motor 15 is installed on the mounting base 14. An arm 17 is provided at the tip of a screw 16 extending upward from the drive shaft, and is screwed onto the tip of a telescopic tube 18 inserted into the center hole of the arm 17.

上側ノズル12の構成は.第3図,第5図,第6図など
にみられるように.レーザ光および補助ガス放出ノズル
の部分12aと.これを囲むようにじて下側に噴出口1
9aを有する不活性ガス噴出用ヘツド19と.位置決め
センサ20とよりなる。
The configuration of the upper nozzle 12 is as follows. As seen in Figures 3, 5, and 6. The laser beam and auxiliary gas discharge nozzle portion 12a and . There is a spout 1 on the bottom side surrounding this.
9a, an inert gas jetting head 19; It consists of a positioning sensor 20.

t記噴出口19aは.噴出される不活性ガスが被加工部
表面を旋回しながら外万に向け放射方向に噴出されるよ
うに.開口されている。下側ノズル13は.中央に排出
手段の吸引口23を具備し.これを囲むようにして不活
性ガス噴出用ヘツド24を備えており.その噴出口24
aは.ヘツド頂部の外輪24bに沿つて不活性ガスを噴
出するように膨出部25に設けられ.接線方向に開口し
ている。
The spout 19a is. The inert gas that is ejected swirls around the surface of the workpiece and is ejected in a radial direction toward the outside. It is opened. The lower nozzle 13 is. A suction port 23 as a discharge means is provided in the center. An inert gas jetting head 24 is provided surrounding this. Its spout 24
a is. It is provided in the bulge 25 so as to blow out inert gas along the outer ring 24b at the top of the head. It is open in the tangential direction.

なお6図中符号21は補助ガス供給管.22および27
は不活性ガスの供給管628および29はノズル13の
周囲に設けた冷却用ジヤケツト13aに冷却水を供給,
排出するパイプ631は吸引口23に負圧をかける手段
でめる。
Note that the reference numeral 21 in Figure 6 is an auxiliary gas supply pipe. 22 and 27
Inert gas supply pipes 628 and 29 supply cooling water to the cooling jacket 13a provided around the nozzle 13,
The discharge pipe 631 is closed by means of applying negative pressure to the suction port 23.

なお.第7図および第8図にみられるように.下側ノズ
ル13が.2つの噴出口24aおよび24cを具備する
構成にしてもよい。
In addition. As seen in Figures 7 and 8. The lower nozzle 13. It may be configured to include two jet ports 24a and 24c.

ここでは噴出口24aは.ヘツド頂部の外輪24bに沿
つて外方に不活性ガスを回転噴出するように.また他方
の噴出口24cは.吸引口23のある内方に向けて不活
性ガスを噴出するように.それぞれ整流板25aを介し
て互いに離間して開口してある。このような構成では.
被加工材料1を治具2上に配置し.レール3,4に対し
て縦,横方向移動調整を行う。そしてセンサ20とサー
ボ機U(図示せず)により.被加工部上面との間隔制御
を行い.上側ノズル12を.レーザ光軸に沿つて移動制
御する。また.下側ノズル13についても.センサ26
およびサーボ機構(図示せず)の働きで位置決めを行う
。しかして.各噴出口19a,24a,24bから不活
性ガスを噴射し.被加工材料1の被加工部位の周囲を.
ガスによつて囲んで外気から遮断し.この状況下でレー
ザ発振装置が働き.レーザ光集光レンズ30を介してレ
ーザ光が被加工部位に照射され.熱エネルギーで被加工
材料を溶融,気化する。
Here, the spout 24a is. Inert gas is spouted outward along the outer ring 24b at the top of the head. Moreover, the other spout 24c is. Inert gas is spouted inward where the suction port 23 is located. Each opening is spaced apart from each other via a rectifying plate 25a. In such a configuration.
Place the workpiece material 1 on the jig 2. Vertical and horizontal movement adjustments are made to the rails 3 and 4. Then, by the sensor 20 and the servo machine U (not shown). Controls the distance from the top surface of the workpiece. The upper nozzle 12. Movement is controlled along the laser optical axis. Also. Also regarding the lower nozzle 13. sensor 26
Positioning is performed by the function of a servo mechanism (not shown). However. Inert gas is injected from each outlet 19a, 24a, 24b. around the part to be machined of workpiece material 1.
Surrounded by gas and isolated from the outside air. Under this situation, the laser oscillation device works. A laser beam is irradiated onto the part to be processed through the laser beam condensing lens 30. The material to be processed is melted and vaporized using thermal energy.

そこへ補助ガスが強制的に被加工部位に吹きつけられ.
溶融物,気化生成物を下方に吹きとばす。これら溶融物
などは.吸引口23に作用する吸引力で.不活性ガスと
共に吸引され.作業穣境の汚染を防止できる。なお.被
加工部位が切断に到る時間を考慮してこれに同期する速
度で.治具2の移動を行つて連続切断を行なうことがで
きる。
Auxiliary gas is then forcibly blown onto the workpiece.
Blows the melt and vaporized products downward. These melts, etc. By the suction force acting on the suction port 23. Inhaled together with inert gas. It can prevent contamination of the working environment. In addition. At a speed that is synchronized with the time it takes for the workpiece to be cut. Continuous cutting can be performed by moving the jig 2.

この治具2の移動による被加工部のレーザ光軸方向の移
動は位置決めセンサで感知され.サーボ機構の駆動をも
たらし.ノズルと被加工物上下面の間隔が一定に保たれ
る。以上に説明したように.本発明によれば.2種以上
の材料からなる複合材料の.切断,穿孔をレーザ光によ
つて実施する場合でも.火焔現象が避けられ.生成物が
吸引によって下側ノズルに引かれるため.作業環境の汚
染を防止できる。
The movement of the workpiece in the direction of the laser optical axis due to the movement of the jig 2 is detected by a positioning sensor. Provides drive for the servo mechanism. The distance between the nozzle and the upper and lower surfaces of the workpiece is kept constant. As explained above. According to the invention. A composite material consisting of two or more materials. Even when cutting and drilling are performed using laser light. The flame phenomenon can be avoided. The product is drawn to the lower nozzle by suction. Prevents contamination of the working environment.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例を示す斜視図.第2図は要部
の拡大分解斜視図.第3図は一部縦断側面図.第4図a
およびbは第3図のA−AおよびB−Bの矢視図6第5
図は上側ノズル構造の別の形態を示す一部縦断した側面
図.第6図は同平面図.第7図は下側ノズル構造の別の
形態を示す一部縦断した側面図.第8図は同平面図であ
る。 1・・・・・・被加工材料、2・・・・・・治具.3・
・・・・・Y軸移動レール, 4・・・・・・X軸移動
レール.5・・・・・・架台66・・・・・枠組.7・
・・・・・ハウジング.8・・・・・・ブラケツト.9
・・・・・・ビームベンダー 9・・・・・・テレスコ
ピツタチユーブ.10・・・・・・スクリユ一ねじ.1
1・・・・・・アーム. 12・・・・・・上GIレズ
ル.12a・・・・・・レーザ光および補助ガス放出ノ
ズル613・・・・・・下側ノズ′レ.13a・・・・
・・ジヤケツト. 14・・・・・・取付台.15・・
・・・・サーボモータ.16・・・・・・スクリユ一ね
じ.17・・・・・・アーム.18・・・・・・テレス
コピツクチユーブ. 19・・・・・・ヘツド. 19
a・・・・・・噴出0.20・・・・・・センサ. 2
1・・・・・・補助ガス供給管.22・・・・・・不活
性ガス供給管. 23・・・・・・吸引口. 24・・
・・・・ヘツド. 24a・・・・・・噴出0.24b
・・・・・・外輪.24c・・・・・・噴出0.25・
・・・・・膨出部. 25a・・・・・・整流板.26
・・・・・・センサ、27・・・・・・不活性ガス供給
管.28,29・・・・・・冷却水給排パイプ.30・
・・・・・集光レンズ.31・・・・・・負圧手段。
FIG. 1 is a perspective view showing one embodiment of the present invention. Figure 2 is an enlarged exploded perspective view of the main parts. Figure 3 is a partially longitudinal side view. Figure 4a
and b are arrow views 6-5 of A-A and B-B in Fig. 3.
The figure is a partially vertical side view showing another form of the upper nozzle structure. Figure 6 is the same plan view. Figure 7 is a partially longitudinal side view showing another form of the lower nozzle structure. FIG. 8 is a plan view of the same. 1... Material to be processed, 2... Jig. 3.
...Y-axis moving rail, 4...X-axis moving rail. 5... Frame 66... Frame. 7.
·····housing. 8...Bracket. 9
...Beam bender 9...Telescope tube. 10... One screw. 1
1...Arm. 12... Upper GI Rezzle. 12a...Laser light and auxiliary gas discharge nozzle 613...Lower nozzle. 13a...
...jacket. 14...Mounting stand. 15...
····Servomotor. 16... One screw. 17...Arm. 18...Telescopic tube. 19...Head. 19
a...Gushing 0.20...Sensor. 2
1... Auxiliary gas supply pipe. 22...Inert gas supply pipe. 23...Suction port. 24...
・・・Head. 24a・・・Gushing 0.24b
...Outer ring. 24c・・・Gushing 0.25・
...bulge. 25a... Rectifying plate. 26
...Sensor, 27...Inert gas supply pipe. 28, 29... Cooling water supply and discharge pipe. 30・
·····Condenser lens. 31... Negative pressure means.

Claims (1)

【特許請求の範囲】 1 被加工物を中間に挟んで上側に、レーザ光および補
助ガス放出ノズルおよび被加工物のレーザ加工部を囲む
不活性ガス噴出部を設けたノズル構造を設置し、また下
側に、上記レーザ加工部を囲む不活性ガス噴出部および
レーザ切断生成物を上記不活性ガスと共に吸引排出する
排出手段を設けたノズル構造を設置したことを特徴とす
るレーザ加工装置。 2 上記上側のノズル構造の不活性ガス噴出部は、上記
レーザ加工部を囲んで放射線状に内方および外方に向つ
て不活性ガスを回転噴出するように開口を具備している
特許請求の範囲第1項記載のレーザ加工装置。 3 上記下側のノズル構造の不活性ガス噴出部は、排出
手段の吸引口を囲んで内方および外方に向つて不活性ガ
スを回転噴出するようにそれぞれ開口を具備している特
許請求の範囲第1項記載のレーザ加工装置。
[Scope of Claims] 1. A nozzle structure is provided above the workpiece with the workpiece in between, and includes a laser beam and auxiliary gas discharge nozzle and an inert gas ejection part surrounding the laser processing part of the workpiece, and A laser processing apparatus characterized in that a nozzle structure is installed on the lower side, which includes an inert gas ejection part surrounding the laser processing part and a discharge means for sucking and discharging the laser cutting product together with the inert gas. 2. The inert gas ejection part of the upper nozzle structure has an opening so as to surround the laser processing part and eject the inert gas radially inward and outward. A laser processing device according to scope 1. 3. The inert gas ejection part of the lower nozzle structure is provided with openings so as to surround the suction port of the discharge means and rotate and eject the inert gas inward and outward. A laser processing device according to scope 1.
JP57174599A 1982-10-06 1982-10-06 Laser processing equipment Expired JPS5945475B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57174599A JPS5945475B2 (en) 1982-10-06 1982-10-06 Laser processing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57174599A JPS5945475B2 (en) 1982-10-06 1982-10-06 Laser processing equipment

Publications (2)

Publication Number Publication Date
JPS5964191A JPS5964191A (en) 1984-04-12
JPS5945475B2 true JPS5945475B2 (en) 1984-11-06

Family

ID=15981383

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57174599A Expired JPS5945475B2 (en) 1982-10-06 1982-10-06 Laser processing equipment

Country Status (1)

Country Link
JP (1) JPS5945475B2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6127188A (en) * 1984-07-17 1986-02-06 Mitsubishi Electric Corp Laser welding device
JPS62199285A (en) * 1986-02-28 1987-09-02 Anritsu Corp Mouth piece of work material for laser beam machine
JPS62224490A (en) * 1986-03-26 1987-10-02 Amada Co Ltd Thermal cutting device
JP3056723B1 (en) 1999-01-04 2000-06-26 ファナック株式会社 Laser processing equipment
KR100355064B1 (en) * 2000-01-14 2002-10-05 주식회사 다담하이테크 Laser manufacture device
CN103737183B (en) * 2013-12-26 2016-01-13 广东大族粤铭激光科技股份有限公司 Have up and down to the laser cutting machine of the system of taking out
WO2023176509A1 (en) * 2022-03-18 2023-09-21 日亜化学工業株式会社 Wavelength conversion member and manufacturing method therefor

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