JP2015182116A - Dust collector for laser machining - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a dust collector for laser machining which can always properly holds a machining environment when machining is carried out by laser beam irradiation.SOLUTION: A dust collector for laser machining includes: a booth duct 5 which covers a working area space P formed between a laser output unit 2 and a work-piece 4 supported by a work-piece jig 3, and has a movable area 5b by which the working area space P is opened and closed, thereby enabling going-in and going-out of the work-piece 4 to/from the working area space P; an assist gas nozzle 7 for spraying an inert gas toward the work-piece 4; and an air blow nozzle 10 which makes a gas in the working area space P forcibly flow toward an exhaust port 9.

Description

  The present invention relates to a dust collector for laser processing used in laser processing, and more particularly to a dust collector for laser processing suitable for performing laser processing using a galvano scanner.

  In general, laser processing is widely used in various industrial fields.

  In the laser processing, a dust collection mechanism is provided in order to quickly remove the melt and vapor generated by the laser irradiation. In addition, for the purpose of improving workability and cooling the work, an assist gas made of an inert gas is blown toward the work point of the work. These dust collection mechanisms and assist gas further play an important role in affecting the processing quality of the work piece, and also have the effect of cooling the work piece and suppressing the heat-affected zone. It also plays a role of protecting the processing lens (laser focusing optical system) and the protective glass from the melted material and scattered matter (spatter).

  In particular, at the time of laser cutting processing, it is desirable to collect dust by collecting and scattering dust or fumes generated by processing as close to the processing point as possible.

  In a laser processing system using a conventional scanner, a processing area of up to about 200 mm square is standard, but it is hoped that a wide processing area of 500 mm square or more may be laser processed using a scanner. It is rare.

  However, in laser processing using a scanner, the processing point moves at a very high speed, so that local dust collection cannot be performed corresponding to the processing point moving at a high speed. Similarly, it is difficult to fix and install an air blow forcibly forming an assist gas jet or a dust collection suction flow for inactivating the processing point. If a dust collection mechanism that solves these difficulties is not realized, the contamination of the processing lens and protective glass will accelerate, leading to adverse effects on quality and an increase in maintenance frequency, leading to product yields and reduced operating rates.

  For this purpose, Japanese Patent Application Laid-Open No. 2008-1000023 (Patent Document 1) proposes a “method and apparatus for collecting scattered matter in a laser processing machine or a plasma processing machine” as a cover for a wide processing area. -005786 (Patent Document 2) proposes a "dust collection cover in a laser beam machine".

  Moreover, as what moves a hood, Unexamined-Japanese-Patent No. 2004-074254 (patent document 3) has proposed "the cutting machine by a plasma arc or a laser, and its cutting method."

Japanese Patent Laid-Open No. 2008-100302 Japanese Utility Model Publication No. 06-005786 JP 2004-074254 A

  In the said patent document 1, the structure provided with the dust collection hood which covers a process locus is disclosed. Specifically, a shielding object is provided on both sides of a machining trajectory where machining is performed on the workpiece with a predetermined interval and surrounding the workpiece head side from the vicinity of the workpiece surface. However, since the moving speed of the processing point of laser processing using a scanner is faster than the moving speed of the mechanical shield, the method of Patent Document 1 that locally covers the processing trajectory with the hood and the shield is used as the processing area. However, there is a disadvantage that it cannot be applied to laser processing using a wide range of scanners. In addition, a shield can be used to cut the plate. However, when processing a three-dimensional structure with irregularities on the workpiece, the shield should be installed according to the processing trajectory. Had the disadvantage of being difficult.

  In the said patent document 2, the structure provided with the dust collection cover which covers the whole movement range of a process table is disclosed. This patent document 2 aims at soundproofing and dustproofing as well as improving safety. Regarding laser processing using a scanner for a wide processing area, melting caused by laser irradiation. Assist gas jet and dust collection suction to quickly remove objects and evaporative gas, cool the workpiece, suppress the heat-affected zone, and protect the processing lens and protective glass from the melted and scattered matter generated by processing There is no consideration for securing the flow. Therefore, it is difficult to apply Patent Document 2 to laser processing using a scanner.

  Patent Document 3 discloses a configuration in which the hood is lowered during processing and the hood is raised during consumable replacement. In this patent document 3, since it is premised on processing by a torch, it can be applied to a processing method in which the hood moves with the torch while covering the periphery of the torch, but when a wide processing area is laser processed using a scanner. However, since the moving speed of the machining point is much faster than the moving speed of the mechanical hood, there is a disadvantage that the method described in Patent Document 3 cannot be applied as it is. In addition, simply increasing the size of the hood weakens the dust collection suction flow, making it difficult to collect dust, inactivating the processing points and making it difficult to spray assist gas to improve processing quality. there were.

  The present invention has been made in view of these points, and an object of the present invention is to provide a dust collector for laser processing that can always properly maintain a processing environment when processing is performed by laser irradiation.

  A dust collector for laser processing according to a first aspect of the present invention includes a laser oscillator, a galvano scanner that irradiates a scanning region on the workpiece with laser light output from the laser oscillator, and a gap between the galvano scanner and the workpiece. A booth duct covering a machining area space formed on the booth duct, which has a movable area that opens and closes the machining area space to allow the workpiece to enter and exit the machining area space; and It has an assist gas nozzle that blows an inert gas toward it, and an air blow nozzle that forcibly flows the gas in the processing area space toward the exhaust port.

  According to the first aspect, since the processing area space formed between the galvano scanner and the workpiece can be covered, the processing area space can be reliably protected from dust, and the work area can be moved by the movable area of the booth duct. Can be easily moved in and out of the processing area space, laser processing can be performed while blowing an inert gas toward the workpiece by the assist gas nozzle, and the gas in the processing area space is discharged to the exhaust port by the air blow nozzle. Therefore, it is possible to forcibly flow and exhaust the air, and it is possible to obtain an excellent effect such as always being able to properly maintain the processing environment when processing is performed by laser irradiation.

  Moreover, as the dust collector for laser processing of the second aspect of the present invention, in the first aspect, the booth duct is formed by a fixed booth duct on the galvano scanner side and a movable booth duct on the workpiece side. The assist gas nozzle is attached to the work side end of the booth duct and is formed so that at least the flow rate can be adjusted. The air blow nozzle is attached to the fixed booth duct and at least the flow rate. It is formed to be adjustable.

  According to this 2nd aspect, the processing environment at the time of processing by laser irradiation can be hold | maintained more smoothly and appropriately.

  Moreover, as the dust collector for laser processing according to the third aspect of the present invention, in the second aspect, a plurality of the assist gas nozzles are provided, and the inert gas is supplied by adjusting on / off of the plurality of assist gas nozzles. It is characterized by selectively spraying a predetermined range of the scanning area on the workpiece.

  According to the third aspect, the laser processing can be performed by selectively spraying the inert gas reliably only in a predetermined range of the scanning region on the workpiece.

  Further, as the dust collector for laser processing according to the fourth aspect of the present invention, in the second or third aspect, on / off adjustment of the plurality of assist gas nozzles is synchronized with on / off of the laser oscillator. It is characterized by controlling.

  According to the fourth aspect, it is possible to perform laser processing in which the assist gas is supplied only when laser processing is performed, and it is possible to prevent wasteful consumption of the assist gas.

  Moreover, as the dust collector for laser processing according to the fifth aspect of the present invention, in any one of the second to fourth aspects, the air blow nozzle is turned on / off according to the output of the laser oscillator or the laser processing time. An off adjustment is performed.

  According to the fifth aspect, it is possible to perform the air blow according to the output of the laser beam irradiated to the workpiece, the processing time, the amount of dust / smoke, and the like to reliably discharge the dust and the like.

  Moreover, as the dust collector for laser processing according to the sixth aspect, in any one of the first to fifth aspects, the booth duct is provided with illumination means for illuminating a processing point of the workpiece. Features.

  According to the sixth aspect, the machining point in the machining area space covered with the boost duct can be illuminated, and the machining point can be observed by, for example, a CCD camera.

  According to the dust collector for laser processing of the present invention, there are excellent effects such as that the processing environment when processing is performed by laser irradiation can always be properly maintained.

The longitudinal cross-sectional view which shows 1st Embodiment of the dust collector for laser processing of this invention Front view of FIG. Timing chart of laser processing by the dust collector for laser processing of FIG. The longitudinal cross-sectional view which shows 2nd Embodiment of the dust collector for laser processing of this invention The front view which shows the state which shortened the movable booth duct of FIG. Sectional view along line VI-VI in FIG. The top view which shows the positional relationship of the assist gas nozzle and workpiece | work seen from the arrow Q side of FIG. The same figure as FIG. 6 which shows other arrangement | positioning positions of an assist gas nozzle Side view showing another example of assist gas nozzle

  Hereinafter, an embodiment of a dust collector for laser processing of the present invention will be described with reference to FIGS.

(First embodiment)
1 and 2 show a first embodiment of a dust collector for laser processing according to the present invention.

  The dust collector 1 for laser processing of this embodiment is arrange | positioned between the laser output unit 2 and the workpiece jig | tool 3 provided in the vertically downward direction. The laser output unit 2 of this embodiment includes a laser oscillator 2a, an optical system that transmits laser light oscillated from the laser oscillator 2a, and a galvanoscope that scans the workpiece 4 by irradiating the work 4 with the laser light from the optical system. And a scanner 2b. The galvano scanner 2b is formed so as to be capable of laser irradiation so as to scan, for example, 500 mm square from one head. A workpiece 4 is supported on the upper surface of the workpiece jig 3. The workpiece 4 may have any shape such as a planar shape, an uneven surface shape, or a curved surface shape, and the workpiece 4 shown in FIG. 1 has a curved surface shape in which the upper surface to be laser-processed is curved upward. It is said that.

  The dust collector 1 for laser processing according to the present embodiment includes a processing region space that includes a vertical space surrounding the entire workpiece 4 formed between the laser output unit 2 and the workpiece 4 supported by the workpiece jig 3. A booth duct 5 covering P is arranged.

  The booth duct 5 of the present embodiment is formed in a conical shape or a quadrangular pyramid shape (in the present embodiment, a quadrangular pyramid shape) as a whole by a flame-retardant material, and the fixed booth duct 5a on the laser output unit 2 side and the workpiece are formed. The movable booth duct 5b on the 4 side (work jig 3 side) is divided and formed.

  One movable booth duct 5b is formed to be movable up and down between the solid line position and the chain line position in FIG. 1, and allows the workpiece 4 to enter and exit the machining area space P by opening and closing the machining area space P. A movable region is formed. Moreover, the movable booth duct 5b is formed in a size that covers the upper end of the lower end of the fixed booth duct 5a, and a retractable bellows (not shown) is provided between the upper end and the lower end. It may be provided and sealed so that gas does not leak, or in close contact with the solid line in FIG.

  Further, a square cylindrical skirt (not shown) may be provided at the lower end of the movable booth duct 5b so as to cover the periphery of the workpiece 4 and the workpiece jig 3. Further, as shown in FIG. 2, the movable booth duct 5b is suspended from the laser output unit 2 by the suspension support means 6, and the suspension boot means 6 is wound up and down to drive the movable booth duct 5b up and down. It is good to let them.

  An assist gas nozzle 7 that blows an inert gas toward the work 4 is attached to the inner surface of the lower end of the movable booth duct 5 b that is the end of the booth duct 5 on the work jig 3 side. A plurality of assist gas nozzles 7 are attached to an assist gas header 8 fixed to the inner surface of each side of the lower end of the quadrangle of the movable booth duct 5b so that its outlets are directed obliquely downward toward the work 4. Each assist gas nozzle 7 is formed so that at least the flow rate can be adjusted. In the present embodiment, each assist gas nozzle 7 is formed such that the ejection flow rate can be turned on / off, can be changed from 0 to the maximum, or the ejection direction can be changed.

  On one inclined surface of the fixed booth duct 5a, a discharge port 9 for discharging the internal gas is formed and is sucked by an external suction means (not shown). A sensor (not shown) for monitoring the suction pressure may be provided. Further, an air blow nozzle 10 for forcibly flowing the gas in the processing area space P toward the exhaust port 9 is installed on the slope facing the slope where the discharge port 9 of the fixed booth duct 5a is formed. Yes. The air blow nozzle 10 is formed so that at least the flow rate can be adjusted, like the assist gas nozzle 7.

  In the present embodiment, an illuminating means 11 such as an LED for illuminating a processing point of the work 4 is installed inside the booth duct 5. Thereby, for example, even if the booth duct 5 is formed of a flame-retardant opaque material, a CCD camera (not shown) disposed in the laser output unit 2 illuminates the processing point of the workpiece 4, for example. Image observation can be executed.

  Next, the operation of this embodiment will be described.

In the present embodiment, each component operates according to the timing chart shown in FIG. 3 (o'clock _{T 0} o'clock _{through T 11).}

Before the start of the operation at time T ₀ , the suspension support means 6 winds up the movable booth duct 5b and holds the work jig 3 in an open state (see the chain lines in FIG. 1 and FIG. 2).

Next, when starting the machining operation, the time T _1, fixed to the work fixture 3 of the workpiece 4 is performed.

Then, the time T _2, hanging bearing means 6 covers the machining area space P including the whole of the work fixture 3 and the workpiece 4 drop off up the movable booth duct 5b (Figure 1 solid lines state and 2 solid state reference ). At this time, it is desirable to seal the processing area space P preferably.

Then, the time T _3, sprayed with each assist gas nozzle 7 is turned on toward the workpiece 4 inert gas (e.g., nitrogen gas or argon gas) was managed to a predetermined flow conditions. By doing so, it is possible to form an inert atmosphere by filling the processing region space P in a sealed state with the assist gas.

Then, the time T _4, towards the outlet 9 by the air blow nozzle 10 is turned on spraying while managing air at a predetermined flow rate. As a result, a forced air flow is formed toward the exhaust port 9 where the suction force from the suction means acts.

Then, the time T _5, subjected to the laser machining on the workpiece 4 by performing laser irradiation using a galvanometer scanner 2b until T ₆ to turn on the laser oscillator 2a of the laser output unit 2. While this laser processing is continued, the inert gas is continuously sprayed from the assist gas nozzles 7 toward the workpiece 4, so that the laser processing on the workpiece 4 is appropriately executed.

  At the same time, the air blowing from the air blow nozzle 10 is continued, so that dust, fumes, etc. generated and scattered in the booth duct 5 by laser processing are forced to flow on the air flow toward the exhaust port 9 and flow. Make sure to suck it out. As a result, the machining environment in the machining area space P where the workpiece 4 is subjected to laser machining is always properly maintained.

  At the time of this laser processing, the illumination means 11 is turned on to illuminate the processing point of the workpiece 4, and the quality of the processing is observed while acquiring an image of the processing point with a CCD camera (not shown). If there is a defect in the processing, the laser oscillator 2a of the laser output unit 2 is turned off to interrupt or stop the laser processing.

Then, the time T _6, the periphery of the laser output unit in the second laser oscillator 2a off exit laser machining, the workpiece 4 to continue-injected inert gas by the assist gas nozzle 7 until then T ₇ All dust, volcanic smoke, etc. are completely transferred to the upper part of the booth duct 5.

Then, the time T _7, the respective assist gas nozzle 7 to clear exit-injected inert gas, to continue-injected air to the top of the booth duct 5 by the air blow nozzle 10 o'clock then T ₈ Collected dust, fumes, etc. are completely discharged to the outside through the exhaust port 9.

Next, at time T ₈ , the air blow nozzle 10 is turned off to finish the air blowing, and then at time T ₉ , the suspension support means 6 winds up the movable booth duct 5 b to work workpiece 3 and workpiece 4. The processing area space P including the whole is opened (see the chain line in FIG. 1 and the chain line in FIG. 2).

Then, the time T _10, the extraction is performed from the work fixture 3 of the workpiece 4, is advanced at subsequent T ₁₁ waits for the laser processing of the next workpiece 4.

  Thus, according to the dust collector 1 for laser processing of this embodiment, the processing environment in the case of processing by laser irradiation can always be maintained appropriately, and laser processing with excellent processing quality can be performed. Excellent effects such as.

(Second Embodiment)
FIGS. 4-6 shows 2nd Embodiment of the dust collector for laser processing of this invention. In the present embodiment, the booth duct 5 of the first embodiment shown in FIGS. 1 and 2 is changed from a quadrangular pyramid shape to a box-shaped booth duct 15, and the other configurations are the same and the description is omitted. To do. By using the booth duct 15 having a box shape, the production cost of the booth duct 15 can be reduced and the installation space can be reduced.

  The box-shaped booth duct 15 is formed in a square box shape (may be cylindrical) as a whole from a flame-retardant material, and a small square cylindrical fixed booth duct 15a on the laser output unit 2 side and the workpiece 4 are formed. It is divided and formed by a large box-shaped movable booth duct 15b opened downward on the side (work jig 3 side). As shown in FIGS. 4 and 5, one movable booth duct 15b includes a square top plate 16a fixed to the outer periphery of the lower end portion of the square tube-shaped fixed booth duct 15a, and four sides of the top plate 16a. And a rectangular cylindrical bellows-like movable side wall 16b attached to the lower surface. The movable side wall 16b is expanded and contracted up and down by a driving means (not shown) so as to be in the extended state of the solid line in FIG. 4 and the shortened state in FIG. A movable region of the booth duct 15 that allows entry into and exit from the processing region space P is formed. The lower end portion of the movable side wall 16b is placed on the upper surface of the work jig 3 so as to cover the work 4 and the periphery of the work jig 3. Also, an assist gas nozzle 7 for spraying an inert gas in the horizontal direction toward the work 4 on the inner surface of the lower end of the four sides of the movable side wall 16b which is the work jig 3 side end of the booth duct 15 is an assist gas header 8. (See FIG. 6).

  Also in the present embodiment, as in the first embodiment, there are excellent effects such as that the processing environment when processing is performed by laser irradiation can always be properly maintained.

  In the second embodiment, instead of the rectangular tube bellows-like movable side wall 16b forming the movable booth duct 15b, the rectangular tube portion is formed as a non-deformable rectangular tube portion, and the square tube portion is moved up and down with respect to the top plate 16a. Alternatively, the top plate 16a and the square tube portion may be fixed and integrally formed so as to move up and down with respect to the fixed booth duct 15a.

(Assist gas nozzle control)
In the dust collector for laser processing in each of the above-described embodiments, the on / off of each assist gas nozzle 7 can be selectively controlled according to the position of the laser light applied to the workpiece 4. Hereinafter, the control of the assist gas nozzle 7 will be described using the first embodiment as an example.

  FIG. 7 is a plan view showing the positional relationship between the assist gas nozzle 7 and the workpiece 4 as viewed from the arrow Q side in FIG. For example, in FIG. 7, the processing region of the workpiece 4, that is, the laser light irradiation region is divided into five regions A to E (upper left, lower left, upper right, lower right, and central regions in FIG. 7). Assist gas nozzles 7 </ b> A to 7 </ b> E are disposed in the irradiation areas A to E with the spraying direction directed.

  When processing the irradiation region A, the irradiation region A is irradiated with laser light by the galvano scanner 2b, and the assist gas nozzle 7A disposed in the vicinity of the irradiation region A is turned on and the other assist gas nozzles are turned off. Thus, the assist gas can be sprayed intensively onto the irradiation area A.

  Hereinafter, the irradiation regions B to D can be controlled in the same manner as the irradiation region A. That is, when processing the irradiation region B, the assist gas nozzle 7B is turned on and other assist gas nozzles are turned off. When processing the irradiation region C, the assist gas nozzle 7C is turned on and other assist gas nozzles are turned off. When processing the irradiation region D, the assist gas nozzle 7D is turned on and the other assist gas nozzles are turned off. When processing the irradiation region E, the assist gas nozzle 7E is turned on and the other assist gas nozzles are turned off. By carrying out like this, supply of assist gas intensively with respect to each irradiation area | region AE can be performed.

  In addition, the assist gas nozzle 7 is not completely turned on / off, the flow rate of gas ejected from the assist gas nozzle corresponding to the processing areas A to E (corresponding to the irradiation areas A to E) is increased, and the other assist gas nozzles. The gas flow rate may be reduced. By doing so, the assist gas can be supplied to other processing regions in advance, so that it is possible to supply the assist gas more appropriately in response to the high-speed scanning of the laser light by the galvano scanner.

  Further, the machining area may be appropriately set depending on the material, size, shape, etc. of the workpiece, and the assist gas nozzle can be changed as appropriate in accordance with the setting of the machining area.

  Further, the on / off control of each assist gas nozzle 7 or the control of the gas flow rate may be synchronized with the on / off of the laser oscillator 2a. In this way, useless gas is not consumed when laser processing is not performed.

(Control of air blow nozzle)
In the laser processing dust collector in each of the embodiments described above, the flow rate of the air ejected from the air blow nozzle 10 depends on the output of the laser light irradiated on the workpiece 4, the processing time, the amount of dust / fume, etc. Can be controlled.

  For example, when the output of the laser beam oscillated from the laser oscillator 2a is set high, or when the laser processing time is set long, the energy supplied to the workpiece 4 is high, so that dust and fumes increase. Can be considered. For this reason, it is desirable to increase the flow rate of air ejected from the air blow nozzle 10 to promote exhaust.

(Modification)
In addition, this invention is not limited to said embodiment, It can change as needed.

  For example, as shown in FIG. 8, the assist gas nozzle 7 is attached to the four corners of the bottom of the square of the booth ducts 5 and 15, and the spraying direction of each assist gas nozzle 7 is variably adjusted so as to be appropriately inactive at the processing position. It is good to form so that gas may be supplied. In this case as well, the on / off of each assist gas nozzle 7 or the assist gas ejection flow rate can be controlled in accordance with the machining area of the workpiece 4.

  As shown in FIG. 9, the assist gas nozzle 7 is formed so as to protrude from the assist gas header 8 in a bellows shape, and for example, the assist gas nozzle 7 is bent according to the shape of the uneven surface of the work 4. It is good to form so that assist gas can be supplied to a location.

DESCRIPTION OF SYMBOLS 1 Dust collector for laser processing 2 Laser output unit 3 Work jig 4 Work 5, 15 Booth duct 5a, 15a Fixed booth duct 5b, 15b Movable booth duct 7 Assist gas nozzle 9 Exhaust port 10 Air blow nozzle 11 Illumination means P Processing area space

Claims (6)

A laser oscillator;
A galvano scanner for irradiating a scanning region on a workpiece with laser light output from the laser oscillator;
A booth duct covering a machining area space formed between the galvano scanner and the workpiece, comprising a movable area that opens and closes the machining area space and allows the workpiece to enter and exit the machining area space. A booth duct
An assist gas nozzle that blows an inert gas toward the workpiece;
A dust collector for laser processing, comprising: an air blow nozzle that forcibly flows a gas in the processing region space toward an exhaust port. The booth duct is formed by a fixed booth duct on the galvano scanner side and a movable booth duct on the workpiece side,
The assist gas nozzle is attached to the work side end of the movable booth duct and is formed so that at least the flow rate can be adjusted.
The dust collector for laser processing according to claim 1, wherein the air blow nozzle is attached to the fixed booth duct and is formed so as to be at least adjustable in flow rate. The said assist gas nozzle is provided with two or more, The said inert gas is selectively sprayed to the predetermined range of the scanning area | region on the said workpiece | work by ON / OFF adjustment of the said some assist gas nozzle. Dust collector for laser processing. 4. The dust collector for laser processing according to claim 2, wherein on / off adjustment of the plurality of assist gas nozzles is controlled in synchronization with on / off of the laser oscillator. 5. The dust collector for laser processing according to any one of claims 2 to 4, wherein the air blow nozzle performs on / off adjustment in accordance with an output of a laser oscillator or a laser processing time. The laser processing dust collector according to any one of claims 1 to 5, wherein the booth duct is provided with illumination means for illuminating a machining point of the workpiece.

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