JPS5943302A - タツチプロ−ブ装置 - Google Patents

タツチプロ−ブ装置

Info

Publication number
JPS5943302A
JPS5943302A JP15477982A JP15477982A JPS5943302A JP S5943302 A JPS5943302 A JP S5943302A JP 15477982 A JP15477982 A JP 15477982A JP 15477982 A JP15477982 A JP 15477982A JP S5943302 A JPS5943302 A JP S5943302A
Authority
JP
Japan
Prior art keywords
probe
fixed
light
head
touch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15477982A
Other languages
English (en)
Japanese (ja)
Other versions
JPS644121B2 (enrdf_load_stackoverflow
Inventor
Yoshihiro Arai
荒井 喜博
Tadashi Ikeda
正 池田
Satoru Mizuno
哲 水野
Minoru Fukuyoshi
福吉 稔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsutoyo Manufacturing Co Ltd
Original Assignee
Mitsutoyo Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsutoyo Manufacturing Co Ltd filed Critical Mitsutoyo Manufacturing Co Ltd
Priority to JP15477982A priority Critical patent/JPS5943302A/ja
Publication of JPS5943302A publication Critical patent/JPS5943302A/ja
Publication of JPS644121B2 publication Critical patent/JPS644121B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/002Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G01B11/007Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
JP15477982A 1982-09-06 1982-09-06 タツチプロ−ブ装置 Granted JPS5943302A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15477982A JPS5943302A (ja) 1982-09-06 1982-09-06 タツチプロ−ブ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15477982A JPS5943302A (ja) 1982-09-06 1982-09-06 タツチプロ−ブ装置

Publications (2)

Publication Number Publication Date
JPS5943302A true JPS5943302A (ja) 1984-03-10
JPS644121B2 JPS644121B2 (enrdf_load_stackoverflow) 1989-01-24

Family

ID=15591708

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15477982A Granted JPS5943302A (ja) 1982-09-06 1982-09-06 タツチプロ−ブ装置

Country Status (1)

Country Link
JP (1) JPS5943302A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6286247A (ja) * 1985-10-09 1987-04-20 コマニー株式会社 両面吸音パネルの製造方法
JPS62140003A (ja) * 1985-12-14 1987-06-23 Nobuo Fukuhisa 液晶による信号伝達手段を備えた位置検出器
US5333388A (en) * 1990-01-16 1994-08-02 British Technology Group Limited Probes
JP2009508114A (ja) * 2005-09-14 2009-02-26 ハルビン インスティチュート オブ テクノロジー ダブル光ファイバ接続を利用した微小空洞測定装置および方法
JP2018072268A (ja) * 2016-11-02 2018-05-10 株式会社キーエンス 画像測定装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5724805A (en) * 1980-07-21 1982-02-09 Mitsutoyo Mfg Co Ltd Touch signal probe
JPS5729805U (enrdf_load_stackoverflow) * 1980-07-25 1982-02-17

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5724805A (en) * 1980-07-21 1982-02-09 Mitsutoyo Mfg Co Ltd Touch signal probe
JPS5729805U (enrdf_load_stackoverflow) * 1980-07-25 1982-02-17

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6286247A (ja) * 1985-10-09 1987-04-20 コマニー株式会社 両面吸音パネルの製造方法
JPS62140003A (ja) * 1985-12-14 1987-06-23 Nobuo Fukuhisa 液晶による信号伝達手段を備えた位置検出器
US5333388A (en) * 1990-01-16 1994-08-02 British Technology Group Limited Probes
JP2009508114A (ja) * 2005-09-14 2009-02-26 ハルビン インスティチュート オブ テクノロジー ダブル光ファイバ接続を利用した微小空洞測定装置および方法
JP2018072268A (ja) * 2016-11-02 2018-05-10 株式会社キーエンス 画像測定装置

Also Published As

Publication number Publication date
JPS644121B2 (enrdf_load_stackoverflow) 1989-01-24

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