JPS644121B2 - - Google Patents

Info

Publication number
JPS644121B2
JPS644121B2 JP15477982A JP15477982A JPS644121B2 JP S644121 B2 JPS644121 B2 JP S644121B2 JP 15477982 A JP15477982 A JP 15477982A JP 15477982 A JP15477982 A JP 15477982A JP S644121 B2 JPS644121 B2 JP S644121B2
Authority
JP
Japan
Prior art keywords
probe
light
head
optical fiber
probe body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15477982A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5943302A (ja
Inventor
Yoshihiro Arai
Tadashi Ikeda
Satoru Mizuno
Minoru Fukuyoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Priority to JP15477982A priority Critical patent/JPS5943302A/ja
Publication of JPS5943302A publication Critical patent/JPS5943302A/ja
Publication of JPS644121B2 publication Critical patent/JPS644121B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
JP15477982A 1982-09-06 1982-09-06 タツチプロ−ブ装置 Granted JPS5943302A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15477982A JPS5943302A (ja) 1982-09-06 1982-09-06 タツチプロ−ブ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15477982A JPS5943302A (ja) 1982-09-06 1982-09-06 タツチプロ−ブ装置

Publications (2)

Publication Number Publication Date
JPS5943302A JPS5943302A (ja) 1984-03-10
JPS644121B2 true JPS644121B2 (enrdf_load_stackoverflow) 1989-01-24

Family

ID=15591708

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15477982A Granted JPS5943302A (ja) 1982-09-06 1982-09-06 タツチプロ−ブ装置

Country Status (1)

Country Link
JP (1) JPS5943302A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6286247A (ja) * 1985-10-09 1987-04-20 コマニー株式会社 両面吸音パネルの製造方法
JPS62140003A (ja) * 1985-12-14 1987-06-23 Nobuo Fukuhisa 液晶による信号伝達手段を備えた位置検出器
GB9000894D0 (en) * 1990-01-16 1990-03-14 Nat Res Dev Probes
CN1329711C (zh) * 2005-09-14 2007-08-01 哈尔滨工业大学 基于双光纤耦合的微小内腔体尺寸测量装置与方法
JP6797639B2 (ja) * 2016-11-02 2020-12-09 株式会社キーエンス 画像測定装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5724805A (en) * 1980-07-21 1982-02-09 Mitsutoyo Mfg Co Ltd Touch signal probe
JPS5729805U (enrdf_load_stackoverflow) * 1980-07-25 1982-02-17

Also Published As

Publication number Publication date
JPS5943302A (ja) 1984-03-10

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