JPS5943302A - Touch probe apparatus - Google Patents

Touch probe apparatus

Info

Publication number
JPS5943302A
JPS5943302A JP15477982A JP15477982A JPS5943302A JP S5943302 A JPS5943302 A JP S5943302A JP 15477982 A JP15477982 A JP 15477982A JP 15477982 A JP15477982 A JP 15477982A JP S5943302 A JPS5943302 A JP S5943302A
Authority
JP
Japan
Prior art keywords
probe
fixed
light
head
touch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15477982A
Other languages
Japanese (ja)
Other versions
JPS644121B2 (en
Inventor
Yoshihiro Arai
荒井 喜博
Tadashi Ikeda
正 池田
Satoru Mizuno
哲 水野
Minoru Fukuyoshi
福吉 稔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsutoyo Manufacturing Co Ltd
Original Assignee
Mitsutoyo Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsutoyo Manufacturing Co Ltd filed Critical Mitsutoyo Manufacturing Co Ltd
Priority to JP15477982A priority Critical patent/JPS5943302A/en
Publication of JPS5943302A publication Critical patent/JPS5943302A/en
Publication of JPS644121B2 publication Critical patent/JPS644121B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/002Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G01B11/007Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Machine Tool Sensing Apparatuses (AREA)

Abstract

PURPOSE:To surely detect contact of a measuring probe by an apparatus wherein an in-contact signal attendant on displacement of the measuring probe is detected based on the changes in a light signal between a fixed probe and an exchange probe. CONSTITUTION:A light emitted from a light source 24 of a fixed probe 12 hits on a reflection plate 30 through an optical fiber 28, a gap 36 and a projector head 32. When a measuring probe 16 is in a neutral position, the reflected light enters into a photo converter 26 through a photo receiving head 34, gap 36 and an optical fiber 28. Thus, by detecting an output of the photo converter, it is determined that the measuring probe 16 is now in a neutral position. On the other hand, when the measuring probe 16 contacts with an object to be measured 14, the reflection plate 30 is displaced and the reflection light will not enter into the photo receiving head so that the photo converter 26 issues no output. As a result, contact between the measuring probe 16 and the object to be measured 14 can be detected surely.

Description

【発明の詳細な説明】 本発明はタッチプローブ装置、特に3次元測定機或いは
工作機械の工具ヘッドに装)・1さノ1、被測定物の形
状、寸法等を求めるだめのタッチプローブ装置に関する
ものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a touch probe device, particularly a touch probe device mounted on a tool head of a three-dimensional measuring machine or a machine tool, for determining the shape, dimensions, etc. of an object to be measured. It is something.

6111だ基盤上に載慣された被測定物の大きさ及び形
状を側蓋する3次元測定機が周知で、ちり、この3次元
測定機においては、被測定物に対して任、マ”(の方向
に移i!lID]能な移動台にタッチーノ°ローグ装置
が装着される。
6111 is a well-known three-dimensional measuring machine that measures the size and shape of an object placed on a base. A touch no log device is attached to a movable platform capable of moving in the direction of i!l ID.

また\近時工作機械−ラドのT1、取り付V月′・ドに
タップブロ−7装置を着脱「1在に装着L7、jJn 
1. A中成い番」加圧終r後に被加14物の寸法等を
沖1定することが1・単品の力11「精度をヒげ2.3
1.、jtlJ、か1つ広く行なわれ−Uいる。
In addition, recent machine tools - RAD's T1, installation V' and tap blow 7 device installation and removal '1 installation L7, jJn
1. After completing the pressurization, it is necessary to determine the dimensions of the 14 objects to be applied, etc. 1.The force of the single item 11.
1. , jtlJ, or one is widely practiced.

nil記タン−アープローブ域f文(」、中立1jX 
l?’+璽・(〜1“i侍された(Ill定了−に有し
、この(lllI足了−が岐イ則^メj+勿に:鳥油す
ることにより変位して々ツヂ陪号が出、IJされ1ll
ll定(点の+E確な測定作用がriなわノする。
nil tan-ar probe area f sentence ('', neutral 1jX
l? '+璽・(~1"i served (Ill established), and this (llllI foot completed) is a divergence rule ^mej + of course: Displaced by adding bird oil. comes out, IJ is done and 1ll
ll constant (the positive measurement action of the point is ri).

しか17ながら、この錘の従)1. a)タッチプτ1
−ノ”装置eよ装置i’j全体が一体型(て)t< 7
iti、 AれCいるため代置が大型化し、このたM・
1す;′イを一’17i71ζ場jlljいr、I、州
、〔ヘッド兼用の土J(ヘッドにイ1脱Jる作業が面倒
であるという欠点があった。71’4 k’lこ(/ル
一体型、l−; l&rヶ測定ヘッド兼用に形成さII
た一1f′「臣誠の土臭−\ツドに装着する場合に11
、タップブロー7装置1qが]−具よりも極めて大jl
;1.!占なるの7゜Lの着脱作業が面倒なばかりでな
く、タップ−グローブ装置と工具ヘッドとの柑灯位f〜
関係を一定と17で装着l〜なければならないため工具
ヘッドの界zh tXIX&τ7人’;IQな設唱更に
従来のタッチプローブ装置りにあってζ」1、測定ヘッ
ド或いe、j−工具ヘッドO(−タッチグローブ装置を
自即)着脱するのが困@1tであるという欠点があっ)
た。すなわち従来のタッチグローブ% Ft 1171
 ir、1、人出刃用の外部ケーブルが接抗されており
、ζ−のためサーギュラボツクス等に収容することが困
^11Fでイ′・す、廿たプローブ装置V(−′電池が
内蔵さ!′11いる93合にれこの11ス、池の劣化状
1〉月を適「tヂJ−ツクできる構成と1−なければな
らず、これらの各制約によりプローブ装置を自動着脱型
に形成Jるのが困かii:であるという欠点となってい
た。
However, the following of this weight) 1. a) Touch τ1
- ノ"Device e and device i'j are all integrated (te)t<7
Iti, Are C, so the replacement has become larger, and this M.
1;'I 1'17i71ζ field jlljr, I, state, [earth J that also serves as a head (there was a drawback that the work of removing the head from the head was troublesome.71'4 k'l) (Integrated type, l-; Formed for both l&r measurement head II
Taichi 1f'"OmiMakoto's earthy odor - 11 when attached to Tsudo"
, the tap blow 7 device 1q is extremely larger than the utensil.
;1. ! Not only is it troublesome to attach and detach the 7°L, but the position between the tap-globe device and the tool head is also difficult.
Since the relationship is constant and must be mounted at 17, the tool head field zh tXIX & τ7 people'; O (-There is a drawback that it is difficult to put on and take off the touch glove device immediately @ 1 t)
Ta. i.e. conventional touch gloves % Ft 1171
ir, 1, the external cable for the human blade is connected, and it is difficult to store it in a sergy box etc. because of ζ-. It is necessary to have a configuration that can be adapted to the deterioration of the pond in 11 months, and due to these constraints, it is necessary to make the probe device an automatic detachable type. The drawback was that it was difficult to form.

このような上記欠点を除去するため、タッププローフ゛
k 置i 1占I定ブロ一フ゛体と父)f腿フ゛L】−
フイ本とに分離形成1〜た第1図改良ハリ装挿”が提案
いノ1.右いる。このタッチグローフ゛装憤″社dll
+定ヘッドioに固定された固定プローブ(、ト12と
、固定ブ11−プ体12に対向(7で測定ヘッド1.0
V(−着脱口r←に装着され被測定物14との接触によ
り変位−する伺iiテ子16を有する交換ゾロ−グ体I
8とからり見り、この両グr]−ブ体[2,18間のi
[1,磁結合により1111定子t6の検知出力がIt
(り小食〕)5る。
In order to eliminate these above-mentioned drawbacks, tap probe position i 1 fixed block body and father)
Figure 1 "Improved Hari Insertion" is proposed.
+ Fixed probe fixed to the fixed head io (, 12, fixed probe 11 - facing the measuring head 12 (7)
Replacement Zorog body I having a lever 16 which is attached to the attachment/detachment port r← and is displaced by contact with the object to be measured 14
8 and Karamimi, both groups r]-B body [i between 2 and 18
[1, Due to magnetic coupling, the detection output of 1111 constantor t6 is It
(Small meal) 5 Ru.

すなわち、1″lI記固定グロ一ブ体I2と交換グロー
ブ体18との対向部にiJ、コイル20.22が設置t
jられており、また交換ブr1−プ体18にiJ: f
ill定子16の1〜′LK基づいてオフ動作するスイ
ッチ装置が設けられ、測定子16が被測定物I4と接触
することによるスイッチ装置、の」フ動作に基づくコイ
ル20とコイル22との相Uインタ゛クタンスの変化が
タッチ信号として出力されこのタッチ信号を検出して前
n14測定千16と+117測定物14との接触を検知
している。
That is, the coils 20 and 22 are installed at the opposing part between the fixed globe body I2 and the replacement globe body 18.
iJ: f
A switch device is provided which operates off based on 1 to 'LK of the ill constant 16, and the phase U of the coil 20 and the coil 22 is turned off based on the switch device's OFF operation when the probe 16 comes into contact with the object to be measured I4. The change in inductance is output as a touch signal, and by detecting this touch signal, the contact between the previous n14 measurement object 16 and the +117 measurement object 14 is detected.

し2かしながら、この改良型装置においては、測定子1
Gの被測定物14へのわく触をM述の如くコイル20.
22Vこ誘起される相q、インタクタンスの変化に糸づ
いて検知するため、これらの検知回路tよ発振器等を含
む極めて複やUな回路構成とする必要があり、装置が複
雑化しまた装置が大型化するという欠点があった。
However, in this improved device, the probe 1
When G touches the object to be measured 14, the coil 20.
In order to detect based on the phase q and intance changes induced by 22V, it is necessary to have an extremely complex circuit configuration including a detection circuit t, an oscillator, etc., which makes the device complicated and expensive. It had the disadvantage of being large.

本発明けjtlJ述し、た従来の桿鷺に鑑みなされた本
のであり、その目的t」、簡易な装置↑1/?成から成
り、かつ測定子の接触金確実に検知することができるタ
ッチグローブ装(べ、全提供することにイ・、る。
The present invention is described in this book, which was created in view of the conventional methods, and its purpose is to provide a simple device↑1/? We provide a complete touch glove system that consists of a touch glove and can reliably detect the contact metal of the probe.

上記1]的′5C達成するために、本発明tJ、1ll
ll定ヘツドに固定ネれた固定プローブ体と 17i1
定グロ一ブ体に対向して測定ヘッドに着脱自在&t !
JA着され被測定物との接触により変位するfilll
 ”ii’−子を有−する交換グローブ体とから成り、
測定子の変位を検出して測定子と被測定物との接触f:
検知−すZ、タッググローブ装置において、固定グロー
ブ体に1」、)′〔、源と、光信号を電気信号に変換す
2)、)“に ’ii?、変換器と、光源およびブに 
TiT、変換器と前賃己9f、換ブ(i−ブ体の所定部
位とをそれぞれ光学的に連結する)“C,ファイバ体と
が設けられ、交換プローブ体iC+よjllll可千の
変位に連動する反射41更と、固定プ[I−ブ体の)f
、 ile、i、から光フアイバ体を介しで供給をれた
検j:t+ ’t’(:を反射板に投)eする投)しヘ
ッドと、ハξ!A1板からの反射)゛(−を受光して固
定グローブ体の−)’e Yl(、変換器へ反射)Y。
In order to achieve the above objective '5C, the present invention tJ, 1ll
The fixed probe body fixed on the fixed head and 17i1
Can be freely attached to and detached from the measuring head facing the constant globe body.
Fill that is disposed on JA and is displaced due to contact with the object to be measured
and a replacement glove body having a "ii'-child,"
Contact f between the probe and the object to be measured by detecting the displacement of the probe:
Detection - In a tag glove device, a fixed glove body includes a 1'',)'[, source, and 2),)'', a converter, a light source and a converter for converting an optical signal into an electrical signal.
TiT, a transducer and a pre-probe body 9f, an exchange probe (which optically connects the predetermined parts of the i-bu body) and a fiber body are provided, and the exchange probe body iC+ can be displaced by thousands. Interlocking reflection 41
, ile, i, is supplied through the optical fiber body to the head, t+ 't' (: to the reflector) and the head, and ξ! Reflection from A1 plate) ゛(Receives - of fixed globe body)'e Yl (Reflects to converter) Y.

を供給する受)゛C,ヘッドとが設けC〕れ、測定子の
変位を固定グローブ体と交換グローブ体との間に送受さ
れる光信号の変化に基づいて検知すると共に固定プロー
ブ体と変換グローブ体とを別体に構成し7で両者の)゛
r、送受而を面向配置i!″1゛−することf:特徴と
する。
A receiver (C, head C) for supplying the probe is provided, and the displacement of the probe is detected based on the change in the optical signal transmitted and received between the fixed globe body and the replacement globe body, and the probe is converted into a fixed probe body. The glove body is configured as a separate body, and the transmitting and receiving bodies are arranged face-to-face in 7. ``1'' - To do f: Characteristic.

、μF図而面ノー。づいて本発明のtJf適な実施例介
説。
, μF illustration no. Next, a description of suitable embodiments of the present invention will be given.

明する。I will clarify.

第2図Vこeよ本発明に係るタツヂブローグ装置の(1
1略溝成が示され、従来装置と同一部材にVよ回−符シ
十をイ・jしその説9明に省略する。
Figure 2 (1) of the Tatsuji blog device according to the present invention.
1 is shown, and the same members as the conventional device are marked with V, and the description thereof will be omitted.

本発明Vこおいで特徴的なことtま測定子のlli G
γ、ずなわらメツチ信号の検知全回ン1プローブ体t2
と交41力グローブ体!8との間にC4受される)Y;
信けの変化に基づいて行なう構成としたことであり、固
定プロー7体12と交換グローブ体+8とを別体に+i
’l成;〜千両者の:)1′;送受面をx′1向配置6
シたことである。
Characteristic features of the present invention
γ, Zunawara Met signal detection all times 1 probe body t2
Intersect with 41 power glove body! C4 received between 8) Y;
This is done based on the change in confidence, and the 7 fixed prongs 12 and the replacement glove body +8 are separately provided.
'l formation; ~ Senryo's :) 1'; Transmitting and receiving surface placed in x'1 direction 6
That's what happened.

本実施例においでしよ、第2図に示すように固定グロー
ブ体I2にit )Y;源24と、)C11バ号を軍、
気fイけに変換するバ;市1メニ換器26とが固定プロ
ーブ体12の1’;11えば保持枠に固定配設づれてお
り、またこの光源z4および光電変換器26と交換グロ
ーブ体18の後述所定部位とをそれぞれ光学的に連結す
る光フアイバ体28が固定プローブ体12の保持枠に固
定配設されている。
In this embodiment, as shown in FIG. 2, it is attached to the fixed glove body I2.
The light source z4, the photoelectric converter 26, and the replacement globe body 18 are fixedly arranged on the holding frame, for example, at 1';11 of the fixed probe body 12. Optical fiber bodies 28 are fixedly disposed on the holding frame of the fixed probe body 12 for optically connecting predetermined portions to be described later.

一方、前記固定プローブ体12と所定間隙を汗して対向
配置された交換プローブ体t8には測定子16の変位K
Aすυする反射板30、不実施ド11においてVよ鐘が
被1i1j定子1Gのに1面中央81〜に設けられてお
り、測定子の変位に連動してこの反射板30−’!l!
IK変位を行なう。干して交撚プローブ体言8に)J[
さらに前記反射板30に検知)Cを投)Y、する投)’
C: −・ノド32と前記反射板30からの反射光を受
yC:する受光ヘッド34とが設けられ1いる。111
1記投光ヘツド32と受光ヘッド34は本実施例におい
て(はヘッド用元ファイバ体から形成されでおり、投光
ヘッド320基部面tよ固定プローブ体12の)Y5源
24からの検知光を伝達する尤:)−フィバ体28の端
部面と対向配置され−Cおり、−力受)°Lヘッノド4
の基部向は前記固定グローブ体12の)] ’14(変
換器26に反射光を伝達するゲC4)了イノ;体28の
端部面と11向配置されている。
On the other hand, the replacement probe body t8, which is disposed opposite to the fixed probe body 12 with a predetermined gap, has a displacement K of the probe 16.
A reflection plate 30 that moves A, and a V bell in the non-implementation mode 11 are provided at the center 81 of one side of the fixed element 1G, and this reflection plate 30-'! l!
Perform IK displacement. Dry and cross-twist the probe to 8) J[
Further, the reflection plate 30 detects) C) Y, and throws )'
A light receiving head 34 for receiving reflected light from the reflecting plate 30 is provided. 111
1. In this embodiment, the light emitting head 32 and the light receiving head 34 receive the detection light from the Y5 source 24 (which is formed from the original fiber body for the head, and from the base surface t of the light emitting head 320 to the fixed probe body 12). Force to transmit:) - Disposed opposite to the end surface of the fiber body 28, - Force receiving) °L head node 4
The base direction of the fixed globe body 12 is arranged 11 times from the end surface of the body 28.

上1ホの1117里、)Y、源24からの検知光は尤フ
ァイバ体28、間1jijマ部36、を)パ(て更に投
)Y:ヘッド32に入射さ11、この世丸ヘッドから検
ケL)Y、が反躬阪30に放射さ11Z)。この時、迎
j7ばC16が中入′ノーfケ(”j、 VCアh ト
き&?f tJコ(7) 反射板30かもの反射)Y、
 /l’受)V、ヘッド34に受)Y:され、この反射
9′(、かさらに間隙部36を介してγ(、ファイバ体
28に入射される。そしでこの光〕゛アイバ休8により
伝遠さねた反射)Y−が尤電窯(負器26i(こ↓91
受元され胃、)11m1?! Y::÷26の出力を検
出することにより測定子16の中立位置:jp 7’j
Q ’(r検知できる。
The detection light from the source 24 is incident on the fiber body 28, the spacer section 36, and is further projected into the head 32. KE L) Y, is radiated to the anti-Musaka 30 11Z). At this time, C16 enters J7 and C16 enters.
/l' (received) by the head 34), and this light is reflected 9' (and then γ() is incident on the fiber body 28 through the gap 36.Then, this light] (reflection that did not propagate)
Stomach,) 11m1? ! By detecting the output of Y::÷26, the neutral position of the probe 16:jp 7'j
Q'(r can be detected.

これ((利し1iil亜子16が被測定′吻14に接触
り戸一時、1なわち4111定子16がり、f\xした
時にeま反射板、(0が測定子16の変イ)′1′、V
こ連i・11するため投う゛C,ヘツ1−32から1え
引板30に投光;; i’+た冗の反射ブ(。
This ((benefit 1iil Ako 16 touches the proboscis 14 to be measured, 1, 1, 4111 constantor 16, f\x, e reflection plate, (0 is the change of measuring head 16)'1 ', V
In order to do this series i・11, the light is projected from the 1-32 to the 1-reduction plate 30;

が受)゛(−へ、ツl゛34からダiれこのた〃)ソ)
0・\ノドに反射)”C1が受ンLさi” ”!” 、
この結[15元電六ゼダs器26の出力から1(I、急
信[¥の出力が検出されないこととなり、これにより測
定r−[6のijl鎗11(1定I吻14との接乃虫、
すなわちタッチ信−号を検知する仁とができ2)。
ga) ゛(-to, tsu ゛34 to die this ta〃) s)
0・\Reflection on the throat) “C1 is receiving L” “!”,
As a result, the output of 1 (I, express message [¥) is not detected from the output of the 6 Nomushi,
In other words, it is possible to detect a touch signal 2).

本実施例装F″tにおいてIJ、ヒ述したように測定子
16の変位の有無を受)“(−ヘラ、1・′34への反
射)’(二の有無、すなわち−)’t、 ’litンい
眸1器26からの出力1(イ、気イ1−1号の有無によ
って検知することが可11)1吉斤る。
In this embodiment, IJ receives the presence or absence of displacement of the probe 16 as described above) (- spatula, 1, reflection to 34)' (presence or absence of 2, i.e. -)'t, The output 1 from the eye 1 device 26 (it can be detected by the presence or absence of the eye 1-1) is 1 yen.

前記:Y(: m、 * 4焦526からの出力TNT
、 z、信rykJ、(を知回路38によって1金知さ
れることとカニるが、この検知回路に微分回路を設り)
’(: TIT、 %> (’!÷):÷26からの出
力を微分−処Jjlすること(・ζより、さらにji’
り l感度で測定ヘッド10の変位を検知するこJ:が
ij]能である。
Said: Y(: m, * Output TNT from 4-focus 526
, z, faith rykJ, (it is understood that the detection circuit 38 detects a single gold, but a differentiation circuit is installed in this detection circuit)
'(: TIT, %>('!÷): To differentiate the output from ÷26 (from ·ζ, further ji'
It is possible to detect the displacement of the measuring head 10 with a high sensitivity.

なお、木実Jf’、11例におイ”Tl: z 1M’
、l 記)’(’、 ;’ −J−fへ(’h2 +’
は光ファイバの群上からなりこのだと:、+ )’にノ
ア・イバ体28の1’:14部部面上第3図に示すよう
に1/り面積1−することが可能であり、このブこ一〆
))’(:)−ノ゛イバ体28の端部面と前記1父元及
び受)゛に1両へ、ノド:42.340面との対向i1
シに」、・ける位+1?!−,t’れが多少あつ−〔も
前記光源24から1ジ)゛0ヘッド12への検知)r、
の伝、達及び受光ヘッド34かも7)”(’、 m、’
fi−」l′jX:j:i 2 (iへのハシ−射光の
伝達が可能であり、このため文換ブj、7−ブf本18
’!(ij川)ilヘッド10K1代リイ寸ける際の(
古1定グローブ休12に対するfNt僅ずれを所定量の
範囲においてi′1容することが’U能となり、交換グ
ローブ体18の着脱作挙が極めて容易化される。
In addition, tree nuts Jf' and 11 examples "Tl: z 1M'
, l note)'(', ;' to -J-f('h2 +'
consists of a group of optical fibers, and it is possible to divide the area by 1 - as shown in Figure 3 on the 1':14 section of the Noah-Iba body 28. , this one end))'(:) - The end surface of the driver body 28 and the above-mentioned 1 parent and receiver), facing the throat: 42.340 surface i1
Shini”, ・Keru +1? ! -, t' There is some misalignment -
7)"(', m,'
fi-'l'j
'! (Ij River) When the il head 10K 1st generation size is reduced (
It becomes possible to compensate for the slight deviation of fNt with respect to the old glove 12 within a predetermined amount range, making it extremely easy to attach and detach the replacement glove body 18.

また、不実施ド11において、固定グローブ体を複数の
部分に分離jiPI成することも可能であり、%lえげ
固定グローブ体を2個に分自1日〜、一方の保持枠にし
ょ光フアイバ体を収容し他方の保持枠には、光源と光?
!’)’、 l−’−換zgとを収容し、これら)v;
ファイバ体と)Y、沖および光電変換器とを対向させて
光の送受を可fil:に形成することができ、このよう
に構成することに上り光電変換器と光源と或いrJ、 
’TT4.池等を収容した保持枠を測定ヘッド以外の個
所に装着する等設計の多様化を図ることがWJ能であり
、寸た1F。
In addition, in case of non-implementation 11, it is also possible to separate the fixed globe body into multiple parts, and divide the fixed globe body into two pieces for 1 day or more, and then place the holding frame on one side with light. The other holding frame that houses the fiber body contains a light source and a light source.
! ')', l−'-alternative zg, and these)v;
By arranging the fiber body, the photoelectric converter, and the photoelectric converter to face each other, it is possible to transmit and receive light.
'TT4. WJ's ability is to diversify the design by attaching a holding frame containing a pond, etc., to a location other than the measurement head, and it is a small 1st floor.

池の交換等の保守作業或い1よ点検作う′6の容易化を
図ることが可能である。
It is possible to facilitate maintenance work such as replacing the pond, or to perform inspections.

第4図に1」一本発明に係るタッチプローブ装置の他の
実施例を示す概略琲i部秤V成が示さ!L、にI’:来
装笛及び第2図装置と同一部月にt/j閂−符号な付し
その説明を省略する。
FIG. 4 shows a schematic diagram of another embodiment of the touch probe device according to the present invention. L, ni I': t/j bar in the same month as the conventional flute and the device shown in Fig. 2 - No reference numeral is given and the explanation thereof will be omitted.

ィバ体2Bを第2図装置のように光源からの検知光往路
と受光ヘッドからの反射光の復路とを別々に設けること
合せず、これら光源24から受光ヘッド32に導く往路
と受)′tヘッノド2から光′il変換器26に反射光
を伝達する復路とを共通の)Y、ファイバ体28によっ
て構成されでいることである。
Instead of providing the fiber body 2B with a separate outgoing path for the detection light from the light source and a return path for the reflected light from the light receiving head as in the device shown in FIG. The return path for transmitting the reflected light from the head node 2 to the optical converter 26 is formed by a common fiber body 28.

従つ1、第4図装置においてはこれら往路光と復路光を
分岐するために光ファイバ体28の先り占近傍にビーム
スプリッタ40を設シ〕、光源24からの検知光が直接
光電変換器26に入射さノ′1.るのな防止し、また受
光ヘッド34からの反射うCが光源方向に漏光すること
なく全てX市、変換器26に受光されるように構成され
ている。このため第2図装置と同様に測定子16の変位
を光ffl変換器26の出力の有無によって検知するこ
とがnJ能である。
Therefore, in the apparatuses shown in FIGS. 1 and 4, a beam splitter 40 is installed near the front of the optical fiber body 28 in order to split the outgoing light and the incoming light, so that the detected light from the light source 24 is directly transmitted to the photoelectric converter. 26 is incident on '1. In addition, the structure is such that all of the reflected light from the light receiving head 34 is received by the converter 26 without leaking toward the light source. Therefore, similarly to the device shown in FIG. 2, it is possible to detect the displacement of the probe 16 based on the presence or absence of the output of the optical ffl converter 26.

以上説明したように、本発明によれば、測定子の被測定
物への接触に基づくタッチ信号を固定グロー1体と交換
プローブ体との間に送受される光信号の変化に基づいて
検知、すなわち光電変換器からの出力’fij ′i信
号の有無に7.1.〜づいて検知する構成からなる/’
r−k’)、この光71’j 変4&”! 器からの出
力軍1気信号を検知するたぬの検ケ((回路の借成衾極
めて簡易化で久、この7’;、、 、v、〕装置η全体
の複雑化に回Iltすることが可riIであり、極めて
簡易小環(の装置により確実に測定子の被測定物への接
触4.検知することがNJ li目である。
As explained above, according to the present invention, a touch signal based on the contact of a probe to a measured object is detected based on a change in an optical signal transmitted and received between one fixed glow body and a replacement probe body. In other words, 7.1. Consists of a configuration that detects based on /'
r-k'), this light 71'j change 4&"! Tanu's test to detect the output force 1 signal from the device ((The circuit borrowed is extremely simplified, this 7';,, , v, ] It is possible to increase the complexity of the entire device η, and it is possible to reliably detect the contact of the contact point with the object to be measured using an extremely simple small ring device. be.

fた、測定子の変イ\7−を^(■記)Y; (i’f
−f:!の変化知基づいて検知するため1v3、答1・
′1・に−!ぐれた装置を提供することができる。
(i'f)
-f:! 1v3, Answer 1・To detect based on the change knowledge of
'1・ni-! We can provide superior equipment.

更に、本発明装置t、(固定プローブ体と交換プローブ
体I−が別体vL(”1゛ζr市されていZ・ため、固
定グロー1体に夕1部配線4AやTi1.池等をイト中
配設することにより着脱自在1111の交換プローブ体
な小型に形成することが可能であり、このため交換ブロ
ー7体の取扱いおよび着脱作墾が容易化へれ、また竹に
本装置qをT1作機械の工具ヘッドに装着する場合にe
」2王71装着部に特別な設旧変更舎要することなく一
工具と交換プローブ体との取(t 、li−換i14:
 を得ることができる。
Furthermore, since the device of the present invention (the fixed probe body and the replacement probe body I- are separated), it is necessary to install one part of the wiring 4A, Ti1, etc. to one fixed glow body. By arranging it in the middle, it is possible to form a small exchange probe body with detachable 1111, which makes handling and attachment/detachment of the 7 exchange probes easier. e when attached to the tool head of a machine tool.
” 2 King 71 installation part requires one tool and replacement probe body without requiring special construction or modification (t, li-replacement i14:
can be obtained.

更にまた本発明によれば固定グロー1体と交換プローブ
体との対向端面間の距離を任意に設定できるので容易に
交換グローブ体の自動着脱化を図ることができる。
Furthermore, according to the present invention, since the distance between the opposing end faces of one fixed glow body and the replacement probe body can be arbitrarily set, automatic attachment and detachment of the replacement glove body can be easily achieved.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来のタッチグローブ装置を示すr:を略構成
図、 第2図は本発明に係るタッチグローブ装置の概略構成を
示す栴成図、 第3図は第2図装置における光ファイノく体の基端部を
示す底面図、 第4図は本発明に係るタッチグローブ装置の他の実施例
を示す概略費部(d成図でおる。 10・・・測定ヘッド、 12−・・固定グローブ体、 14・・・被測定物、 16・・・測定子、 18・・・交換グローブ体、 24・・・光源、 26・・・光電変換器、 28・・・)C:77171本、 30・・・反射板、 32・・・投)Y、ヘッド、 34・・・受)Yニー・ラド。 代哩人  弁理士 吉 11  研 −(fg、か1名
Fig. 1 is a schematic configuration diagram showing a conventional touch glove device, Fig. 2 is a schematic diagram showing a schematic configuration of a touch glove device according to the present invention, and Fig. 3 is an optical fiber diagram in the device shown in Fig. 2. FIG. 4 is a bottom view showing the proximal end of the body, and FIG. 4 is a schematic diagram showing another embodiment of the touch glove device according to the present invention. 10--Measuring head, 12--Fixing Glove body, 14... Object to be measured, 16... Measuring point, 18... Replacement glove body, 24... Light source, 26... Photoelectric converter, 28...) C: 77171 pieces, 30...Reflector, 32...Throwing) Y, head, 34...Receiving) Y knee rad. Representative Patent Attorney Yoshi 11 Ken - (FG, or 1 person)

Claims (1)

【特許請求の範囲】[Claims] (1)測定ヘッドに固定されん固ンビブロープ体と、固
定プローブ体に対向して測定−ツ1′に着脱自在に装着
たれ被測定物との接触により変位する測定子を有す名交
換グローブ体とから成り、測定子の変位を検出して測定
子と被測定′ト;ηとの接触を検知するタッチプローブ
装置において、固定プローブ休しこt1″A、源と、光
信けe ’ifイ、気イイ性に変換する光電変換器と、
光源および光重、変換k(と前記交換プローブ体の所定
部位とを千れそ゛え1光学的に連結する)°C,ファイ
バ体とが設けられ、交換グローブ体に1」、測定イの変
位に連用11する反射板と、1−・1定グローブ体の)
°0凶から尤ファイバ体を4して供給はれた検知)Y;
 k反射板に投光する投−)“(、ヘッドと、反射板か
らの反射)Y;を受)Yニして固定グr1−フ休の光重
、変換器へ反射)Y:、をイlL給する受グテ二ヘッド
とが設けられ、測定fの2位を固定プローブ体と交換プ
ローブ体との間に送受される光信号の変化−4; =5
1.7−1で+6)知すると共に固定プローブ体と交換
−ノ゛ローフ゛イ本とを別体に構成して両者の′)Y4
送受面を対向配置!”?することを特徴とするタッチプ
ローブ装置a0(2)  特¥[醒1求のQ・υ囲(1
)記載のクツチブl’ff−ブ装置において、元ファイ
バ体は少くとも投光・受光両ヘッドと対向する端部が光
ファ・fバの群東から成り、固定グローブ体と交換グロ
ーブ体との相対位置ずれを所定範囲内において許容する
ことを特徴とするタッチグローブ装置。
(1) An exchangeable glove body that has a rigid bib rope body fixed to the measuring head and a measuring tip that is detachably attached to the measurement tool 1' facing the fixed probe body and is displaced by contact with the object to be measured. In a touch probe device that detects the displacement of the probe and detects the contact between the probe and the object to be measured, , a photoelectric converter that converts the energy into
A light source, a light weight, a conversion k (to optically connect the exchange probe body with a predetermined portion of the exchange probe body), and a fiber body are provided, and the exchange globe body is provided with a displacement of 1'' and a displacement of measurement a. 11 reflector and 1-・1 constant globe body)
Detection that the fiber body was supplied from 0 to 4) Y;
Light is emitted onto the reflector) (receives the light reflected from the head and the reflector) Y;, then the fixed graph r1- is reflected to the converter) Y:, A receiving head is provided to transmit the signal f, and the change in the optical signal transmitted and received between the fixed probe body and the exchangeable probe body is -4; =5.
1. In 7-1 +6) Know and replace the fixed probe body - Configure the probe book separately and make both ') Y4
The sending and receiving surfaces are placed opposite each other! A touch probe device a0 (2) characterized by
), the original fiber body consists of a group of optical fibers at least at the ends facing both the light emitting and light receiving heads, and the fixed globe body and the replacement globe body are connected to each other. A touch glove device characterized by allowing relative positional deviation within a predetermined range.
JP15477982A 1982-09-06 1982-09-06 Touch probe apparatus Granted JPS5943302A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15477982A JPS5943302A (en) 1982-09-06 1982-09-06 Touch probe apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15477982A JPS5943302A (en) 1982-09-06 1982-09-06 Touch probe apparatus

Publications (2)

Publication Number Publication Date
JPS5943302A true JPS5943302A (en) 1984-03-10
JPS644121B2 JPS644121B2 (en) 1989-01-24

Family

ID=15591708

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15477982A Granted JPS5943302A (en) 1982-09-06 1982-09-06 Touch probe apparatus

Country Status (1)

Country Link
JP (1) JPS5943302A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6286247A (en) * 1985-10-09 1987-04-20 コマニー株式会社 Double-surface sound absorbing panel and its production
JPS62140003A (en) * 1985-12-14 1987-06-23 Nobuo Fukuhisa Position detector equipped with signal transmitting means by liquid crystal
US5333388A (en) * 1990-01-16 1994-08-02 British Technology Group Limited Probes
JP2009508114A (en) * 2005-09-14 2009-02-26 ハルビン インスティチュート オブ テクノロジー Microcavity measurement apparatus and method using double optical fiber connection
JP2018072268A (en) * 2016-11-02 2018-05-10 株式会社キーエンス Image measuring device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5724805A (en) * 1980-07-21 1982-02-09 Mitsutoyo Mfg Co Ltd Touch signal probe
JPS5729805U (en) * 1980-07-25 1982-02-17

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5724805A (en) * 1980-07-21 1982-02-09 Mitsutoyo Mfg Co Ltd Touch signal probe
JPS5729805U (en) * 1980-07-25 1982-02-17

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6286247A (en) * 1985-10-09 1987-04-20 コマニー株式会社 Double-surface sound absorbing panel and its production
JPH0444653B2 (en) * 1985-10-09 1992-07-22 Comany Kk
JPS62140003A (en) * 1985-12-14 1987-06-23 Nobuo Fukuhisa Position detector equipped with signal transmitting means by liquid crystal
US5333388A (en) * 1990-01-16 1994-08-02 British Technology Group Limited Probes
JP2009508114A (en) * 2005-09-14 2009-02-26 ハルビン インスティチュート オブ テクノロジー Microcavity measurement apparatus and method using double optical fiber connection
JP2018072268A (en) * 2016-11-02 2018-05-10 株式会社キーエンス Image measuring device

Also Published As

Publication number Publication date
JPS644121B2 (en) 1989-01-24

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