JP2009098003A - Vibration displacement detecting device and method of detecting displacement and vibration - Google Patents

Vibration displacement detecting device and method of detecting displacement and vibration Download PDF

Info

Publication number
JP2009098003A
JP2009098003A JP2007270123A JP2007270123A JP2009098003A JP 2009098003 A JP2009098003 A JP 2009098003A JP 2007270123 A JP2007270123 A JP 2007270123A JP 2007270123 A JP2007270123 A JP 2007270123A JP 2009098003 A JP2009098003 A JP 2009098003A
Authority
JP
Japan
Prior art keywords
light
displacement
light emitting
photodetector
reference point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007270123A
Other languages
Japanese (ja)
Inventor
Yohei Ogami
洋平 大上
Makoto Komuro
誠 小室
Michikazu Kondo
充和 近藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OPUTEIKON KK
Original Assignee
OPUTEIKON KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OPUTEIKON KK filed Critical OPUTEIKON KK
Priority to JP2007270123A priority Critical patent/JP2009098003A/en
Publication of JP2009098003A publication Critical patent/JP2009098003A/en
Pending legal-status Critical Current

Links

Images

Landscapes

  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a vibration displacement detecting device which can be simply configured at low cost, allows easy adjustment of a measurement range of displacement and vibration and is easily maintained. <P>SOLUTION: A light receiving part 3 fixed on a reference point 2 of a structure 1 forming a part of a building, and a light emitting part 5 fixed on a moving platform 4 which is an object to be measured located distant from the reference point 2 are provided. The light receiving part 3 comprises a photodetector 6 and an optical system 7 for forming an image of the light emitting part 5 on a light receiving surface of the photodetector 6, and detects relative displacement or vibration between the reference point 2 and the object to be measured 4. The optical system 7 is a telescope type optical system, and the light emitting part 5 is constituted by a light emitting diode (LED). The photodetector 6 and the optical system 7 are integrally fixed and an adjustment tool 8 for adjusting a position of the photodetector 6 is provided on the connection portion between them. <P>COPYRIGHT: (C)2009,JPO&amp;INPIT

Description

本発明は物体の変位や振動を検出する変位振動検出装置及び方法に関し、特に建物や装置などの構造物上の基準点から離れた場所に位置する同一または別の構造物上の被測定物の変位または振動を検出する変位振動検出装置及び方法に関する。   The present invention relates to a displacement vibration detection apparatus and method for detecting displacement and vibration of an object, and more particularly to a measurement object on the same or another structure located at a location away from a reference point on a structure such as a building or apparatus. The present invention relates to a displacement vibration detection apparatus and method for detecting displacement or vibration.

従来、物体の変位や振動を検出する方式として、磁石やコイルを用いる方式、静電容量の変化を検出する方式、圧電素子を用いる方式、光学的な方式など様々な方式があり、その目的に合わせて用いられている。特に光学的な方式は離れた場所から被測定物の変位や振動を検知する目的には適している。   Conventionally, there are various methods for detecting displacement and vibration of an object, such as a method using a magnet or a coil, a method for detecting a change in capacitance, a method using a piezoelectric element, and an optical method. It is used together. In particular, the optical method is suitable for the purpose of detecting the displacement and vibration of the object to be measured from a remote location.

ある地点から離れた場所に位置する同一または別の構造物またはそこに設置された物体に対して何らかの操作をしたりその物体を移動したりする場合には、安全対策上または操作のため、その変位や振動を検出することが必要とされる場合がある。従来、このような場合は、変調されたレーザ光ビームを被測定物に照射しその反射光を検出してその到達時間差から距離や変位、振動を検出するレーザ変位計方式や、基準点からレーザ光を測定点に照射しその位置の変位を三角測量の手法で計測して振動を検出する方法がある。このような方式による距離測定法の一例は特許文献1に示されている。また特許文献2のように物体の移動による反射光のドップラシフトを利用したレーザドップラ振動計を用いることもできる。さらには被測定物の画像を撮像しその画像の変化から振動を検出する方法が一般的に知られている。   When performing any operation on or moving the same or another structure located at a location away from a certain point or an object installed there, for safety measures or for the operation, It may be necessary to detect displacement and vibration. Conventionally, in such cases, a laser displacement meter method that detects the distance, displacement, and vibration from the arrival time difference by irradiating the object to be measured with a modulated laser light beam and detecting the reflected light, or laser from a reference point There is a method of detecting vibration by irradiating a measurement point with light and measuring the displacement of the position by a triangulation method. An example of such a distance measurement method is shown in Patent Document 1. A laser Doppler vibrometer that utilizes Doppler shift of reflected light due to the movement of an object as in Patent Document 2 can also be used. Furthermore, a method is generally known in which an image of an object to be measured is taken and vibration is detected from a change in the image.

特開平6−229755号公報JP-A-6-229755 特開2004−101186号公報JP 2004-101186 A

しかし、上記の従来のレーザ変位計や三角測量を用いる方法は特殊なレーザ装置または検出装置が必要であり、装置のコストが高くなり、また、必要な精度を保つためにはメンテナンスのコストも高くなってしまう。一方、レーザドップラ振動計はやはり特殊な検出装置が必要であることから高価であり、また、ゆっくりとした変位の検出はできない。撮像画像により検出を行う方式も装置コストが高く、また被測定対象も限られてしまう。また、実用上、変位や振動の測定範囲を容易に調整できることが望ましい。また、広範な応用を考慮すると、基準点と被測定物の距離は数m〜100m程度、振動による変位は0.3mm程度以上、振動周波数は0.1〜1KHz程度の検出感度があることが望ましい。   However, the above-described conventional method using a laser displacement meter or triangulation requires a special laser device or detection device, which increases the cost of the device and also increases the maintenance cost in order to maintain the required accuracy. turn into. On the other hand, the laser Doppler vibrometer is expensive because it requires a special detection device, and it cannot detect a slow displacement. The method of performing detection based on a captured image also has a high apparatus cost, and the measurement target is limited. In practice, it is desirable that the measurement range of displacement and vibration can be easily adjusted. In consideration of a wide range of applications, the distance between the reference point and the object to be measured is about several to 100 m, the displacement due to vibration is about 0.3 mm or more, and the vibration frequency is about 0.1 to 1 kHz. desirable.

そこで、本発明の目的は、簡単な構成で低コストに実現でき、変位や振動の測定範囲の調整が容易で、メンテナンスも容易な変位振動検出装置および変位振動検出方法を提供することにある。   SUMMARY OF THE INVENTION An object of the present invention is to provide a displacement vibration detection device and a displacement vibration detection method that can be realized with a simple configuration at low cost, can easily adjust the measurement range of displacement and vibration, and can be easily maintained.

上記課題を解決するため、本発明の変位振動検出装置は、構造体の基準点に固定された受光部と前記基準点から離れた場所に位置する被測定物に固定された発光部とを有し、前記受光部は光検出器と該光検出器の受光面上に前記発光部の像を結像する光学系とからなり、前記光検出器で検出される光量の変化によって前記基準点と前記被測定物の間の相対的な変位または振動を検出することを特徴とする。   In order to solve the above problems, the displacement vibration detection device of the present invention includes a light receiving unit fixed to a reference point of a structure and a light emitting unit fixed to an object to be measured located away from the reference point. The light receiving unit includes a photodetector and an optical system that forms an image of the light emitting unit on a light receiving surface of the photodetector, and the reference point and the reference point according to a change in the amount of light detected by the photodetector. Relative displacement or vibration between the measured objects is detected.

前記光学系は望遠鏡構成の光学系であることが望ましい。   The optical system is preferably a telescopic optical system.

また、前記光検出器と前記光学系が一体として固定され、前記光検出器または前記光学系の少なくとも一方の位置を調整する手段を設けてもよい。   In addition, the photodetector and the optical system may be fixed integrally, and a means for adjusting the position of at least one of the photodetector or the optical system may be provided.

また、前記光検出器は受光面が分割された分割型フォトダイオードであってもよい。   Further, the photodetector may be a divided photodiode having a light receiving surface divided.

また、前記発光部は発光ダイオードにより構成されていてもよい。   The light emitting unit may be formed of a light emitting diode.

また、前記発光部とは異なる部分に設置された光源と該光源より出射された光を導く光ファイバとを有し、前記発光部は前記光ファイバにより導かれた光が放射される該光ファイバの端面であってもよい。   A light source installed in a portion different from the light emitting unit; and an optical fiber that guides light emitted from the light source, and the light emitting unit emits light guided by the optical fiber. It may be an end face.

また、前記光検出器の光入射側に前記発光部から放射される光の波長を通過させる波長フィルターが設置されていてもよい。   In addition, a wavelength filter that allows a wavelength of light emitted from the light emitting unit to pass through may be installed on the light incident side of the photodetector.

また、前記発光部から放射される光の強度は前記振動の周波数より高い周波数で変調されていてもよい。   Further, the intensity of the light emitted from the light emitting unit may be modulated at a frequency higher than the frequency of the vibration.

本発明によれば、また、構造体の基準点に受光部を、前記基準点から離れた場所に位置する被測定物に発光部を設置し、前記受光部の光検出器の受光面上に前記発光部の像を結像し、前記受光面で受光される光量の変化によって前記基準点と前記被測定物の間の相対的な変位または振動を検出する変位振動検出方法が得られる。   According to the present invention, the light receiving unit is installed at the reference point of the structure, the light emitting unit is installed at the object to be measured located away from the reference point, and on the light receiving surface of the photodetector of the light receiving unit. A displacement vibration detection method is provided in which an image of the light emitting section is formed and relative displacement or vibration between the reference point and the object to be measured is detected by a change in the amount of light received by the light receiving surface.

本発明は、被測定物に固定した発光部の像を検出器の受光面に結像して、その発光部の像が受光面から外れることにより受光光量が変化することから振動や変位を検出するものであり、受光面に対する発光部の像の相対的大きさや結像位置の設定によって変位や振動振幅の検出範囲および感度を選択できる。また、高倍率の望遠鏡光学系を用いることにより、基準点と被測定物の距離を拡大できる。光源はLEDやランプなどを使用でき、検出系の構成は簡単であり特別の部品は必要としない。   The present invention forms an image of the light emitting part fixed to the object to be measured on the light receiving surface of the detector, and detects vibration and displacement because the amount of received light changes when the image of the light emitting part is removed from the light receiving surface. Therefore, the detection range and sensitivity of the displacement and vibration amplitude can be selected by setting the relative size of the image of the light emitting unit with respect to the light receiving surface and the setting of the imaging position. In addition, the distance between the reference point and the object to be measured can be increased by using a high-magnification telescope optical system. An LED, a lamp, or the like can be used as the light source, and the configuration of the detection system is simple and no special parts are required.

以上のように、本発明により簡単な構成で低コストに実現でき、変位や振動の測定範囲の調整が容易で、メンテナンスも容易な変位振動検出装置が得られる。   As described above, according to the present invention, it is possible to obtain a displacement vibration detection device that can be realized with a simple configuration and at low cost, can easily adjust the measurement range of displacement and vibration, and can be easily maintained.

以下、図面を参照して本発明の実施の形態について説明する。   Embodiments of the present invention will be described below with reference to the drawings.

図1は本発明の第一の実施の形態である変位振動検出装置の構成を示す図である。図1において、第一の実施形態は、建物の一部である構造体1の基準点2に固定された受光部3と、基準点2から離れた場所に位置する被測定物である移動台4の上に固定された発光部5とを有する。受光部3は光検出器6と光検出器6の受光面上に発光部3の像を結像する光学系7とからなり、基準点2と被測定物4の間の相対的な変位または振動を検出する。基準点2と移動台4の距離は数m〜100m程度である。   FIG. 1 is a diagram showing a configuration of a displacement vibration detecting apparatus according to a first embodiment of the present invention. In FIG. 1, the first embodiment is a light receiving unit 3 fixed to a reference point 2 of a structure 1 that is a part of a building, and a moving table that is a measurement object located at a location away from the reference point 2. 4 and a light emitting unit 5 fixed on the top of the unit 4. The light receiving unit 3 includes a light detector 6 and an optical system 7 that forms an image of the light emitting unit 3 on the light receiving surface of the light detector 6, and a relative displacement between the reference point 2 and the measured object 4 or Detect vibration. The distance between the reference point 2 and the moving table 4 is about several meters to 100 meters.

光学系7は望遠鏡構成の光学系であり、その倍率は10〜100倍程度である。発光部5は発光ダイオード(LED)により構成されている。その波長は1.3μm帯、780〜860nmなどの赤外光、650nmなどの可視光であってもよい。発光ダイオードは、ランプに比べ小型軽量、低消費電力、発光面積が小さい、高信頼、変調可能であること、さらにレーザに比べ低コストで放射角度が大きくかつ干渉しないので調整容易であること、等の特徴があり、本発明に使用する光源として適している。   The optical system 7 is an optical system having a telescope configuration, and its magnification is about 10 to 100 times. The light emitting unit 5 is composed of a light emitting diode (LED). The wavelength may be 1.3 μm band, infrared light such as 780 to 860 nm, or visible light such as 650 nm. Light-emitting diodes are smaller and lighter than lamps, have low power consumption, have a small light-emitting area, are highly reliable and can be modulated, and are low-cost compared to lasers and have a large radiation angle and are easy to adjust because they do not interfere with each other. It is suitable as a light source used in the present invention.

光検出器6と光学系7は一体として固定され、その結合部には光検出器6の位置を調整する調整冶具8が設けられている。感度を高めるためには結像点と受光面を高精度に合せる必要があるのでこのような調整機構が必要である。   The photodetector 6 and the optical system 7 are fixed as a single body, and an adjustment jig 8 for adjusting the position of the photodetector 6 is provided at the coupling portion. In order to increase the sensitivity, it is necessary to match the imaging point and the light receiving surface with high accuracy, and thus such an adjustment mechanism is necessary.

図2は本実施の形態に使用する光検出器6の受光面を示す図であり、光検出器6は図2(a)に示すように受光面20が分割された分割型フォトダイオード16であってもよく、また、図2(b)に示すような単一の受光面を有する通常のフォトダイオード17であってもよい。   FIG. 2 is a view showing a light receiving surface of the photodetector 6 used in the present embodiment. The photodetector 6 is a divided photodiode 16 having a light receiving surface 20 divided as shown in FIG. Alternatively, it may be a normal photodiode 17 having a single light receiving surface as shown in FIG.

分割型フォトダイオード16を用いる場合は、図2(a)のように、通常、発光部の像11は振動変位がない状態では分割された2つの受光面20の両方にほぼ等しく光量が入射する状態に調整され、変位が生じた場合にはその光量に差が生ずることによりその変位が検出される。このような分割型のフォトダイオードを用いることにより発光部の振動変位量が簡単かつ高精度に電気信号に変換できる。   When the split type photodiode 16 is used, as shown in FIG. 2A, the light quantity of the image 11 of the light emitting portion is normally substantially equal to both of the two light receiving surfaces 20 divided without vibration displacement. When displacement occurs, the displacement is detected by causing a difference in the amount of light. By using such a split type photodiode, the vibration displacement amount of the light emitting portion can be easily and accurately converted into an electric signal.

通常のフォトダイオード17を用いる場合には、図2(b)のように、受光面10に発光部の像11の一部が入射するように調整され、受光光量の変化から変位量を換算する。受光面の形状は0.2mm〜10mm□程度のものを用いることができる。   When a normal photodiode 17 is used, as shown in FIG. 2B, adjustment is made so that a part of the image 11 of the light emitting portion is incident on the light receiving surface 10, and the amount of displacement is converted from the change in the amount of received light. . The light receiving surface may have a shape of about 0.2 mm to 10 mm □.

なお、大きい変位量を検出する場合には発光部5は、その変位に相当する大きさの発光面をもつ光源か又はその変位幅に相当する長さの領域に複数の発光ダイオードを設置すればよい。   If a large amount of displacement is detected, the light emitting unit 5 may be a light source having a light emitting surface with a size corresponding to the displacement or a plurality of light emitting diodes installed in a region with a length corresponding to the displacement width. Good.

ここで光検出器6または光学系7の入射側に発光部5の波長のみを通過する波長フィルターを設置してもよい。この場合、発光部5からの光のみを検出できるので周辺からのノイズ光による測定誤差や感度劣化、不安定性などを回避することができる。   Here, a wavelength filter that passes only the wavelength of the light emitting unit 5 may be provided on the incident side of the photodetector 6 or the optical system 7. In this case, since only the light from the light emitting unit 5 can be detected, measurement errors, sensitivity deterioration, instability, and the like due to noise light from the periphery can be avoided.

また、発光部5の発光ダイオードを測定対象とする振動周波数より十分に高い周波数、例えば数百KHz〜10MHz程度で強度変調し、光検出器6により電気信号に変換後に周波数フィルターを通過させることにより、周辺からの同一波長のノイズ光の影響や他の電気ノイズの影響を除くことができ、より高感度、高精度の検出が可能となる。   Further, by intensity-modulating the light-emitting diode of the light-emitting unit 5 at a frequency sufficiently higher than the vibration frequency to be measured, for example, about several hundreds KHz to 10 MHz, and passing through a frequency filter after being converted into an electric signal by the photodetector 6. Thus, the influence of noise light of the same wavelength from the periphery and the influence of other electrical noise can be eliminated, and detection with higher sensitivity and higher accuracy becomes possible.

図3は本実施の形態の変位振動検出装置の全体の構成を示すブロック図である。発光部5と基準点2の距離、光学系7の望遠鏡倍率、光検出器6の感度をもとに発光ダイオードの必要な強度が設定される。光学系7の望遠鏡倍率は発光部5と基準点2の距離、検出すべき振動変位量、光検出器の受光面形状から決定される。光検出器6の位置は調整冶具8によりその感度が最適な位置に調整される。受光素子で電気信号に変換された信号はアンプで増幅され、その信号が表示装置に表示すべき信号レベルや周波数であるかを判別されて表示装置に出力される。なお、受光素子に入射する光が上述のように特定の周波数で変調された光である場合には、アンプの入力前、またはアンプの出力後に周波数フィルターを通過させてノイズを除去する。   FIG. 3 is a block diagram showing the overall configuration of the displacement vibration detecting apparatus of the present embodiment. The required intensity of the light emitting diode is set based on the distance between the light emitting unit 5 and the reference point 2, the telescope magnification of the optical system 7, and the sensitivity of the photodetector 6. The telescope magnification of the optical system 7 is determined from the distance between the light emitting unit 5 and the reference point 2, the amount of vibration displacement to be detected, and the shape of the light receiving surface of the photodetector. The position of the photodetector 6 is adjusted to an optimum position by the adjusting jig 8. A signal converted into an electric signal by the light receiving element is amplified by an amplifier, and it is determined whether the signal is a signal level or frequency to be displayed on the display device, and is output to the display device. When the light incident on the light receiving element is light modulated at a specific frequency as described above, noise is removed by passing through a frequency filter before input of the amplifier or after output of the amplifier.

図4は本発明の第二の実施の形態である変位振動検出装置の構成を示す図である。本実施の形態は発光部以外の部分は第一の実施の形態と同様である。図4において、発光部35とは異なる部分である受光部3の近くに設置された光源30と光源30より出射された光を導く光ファイバ31とを有し、発光部35は光ファイバ31により導かれた光が放射される光ファイバ31の端面からなっている。   FIG. 4 is a diagram showing a configuration of a displacement vibration detecting apparatus according to the second embodiment of the present invention. This embodiment is the same as the first embodiment except for the light emitting portion. In FIG. 4, a light source 30 installed near the light receiving unit 3, which is a part different from the light emitting unit 35, and an optical fiber 31 that guides light emitted from the light source 30 are included. It consists of the end face of the optical fiber 31 from which the guided light is emitted.

光源30としては発光ダイオードを用いることができ、光ファイバ31としては、低コストで光源との結合が容易で扱いやすく、かつ端面からの放射角度の大きいプラスチック光ファイバを用いることができる。光ファイバ31の端部は移動台4上に設けたホルダ36により端面を受光部3に向けて固定されている。   A light-emitting diode can be used as the light source 30, and a plastic optical fiber can be used as the optical fiber 31 at a low cost, easily coupled with the light source and easy to handle, and having a large radiation angle from the end face. The end portion of the optical fiber 31 is fixed by a holder 36 provided on the movable table 4 with the end surface facing the light receiving unit 3.

発光部への電源の供給や電池などが不要となること及び発光部が軽量となるので被測定物への設置が容易となり、また発光部は電気部品を含まないので耐環境性に優れている。ここで、必要な発光量、発光領域を確保するため光ファイバは複数本であってもよい。   Eliminates the need for power supply to the light emitting unit and batteries, and makes the light emitting unit lightweight, making it easy to install on the object to be measured, and the light emitting unit is excellent in environmental resistance because it contains no electrical components. . Here, a plurality of optical fibers may be used in order to secure a necessary light emission amount and light emission region.

なお、本発明は上記の実施の形態に限定されるものではないことはいうまでもなく、例えば発光部の形状や受光面の形状などは目的に合わせて設計可能である。また、上記実施の形態では、同一の構造物の上に、受光部及び発光部を設置したが、これらを別々の構造物上に設置してもよい。   Needless to say, the present invention is not limited to the above-described embodiment. For example, the shape of the light-emitting portion and the shape of the light-receiving surface can be designed according to the purpose. Moreover, in the said embodiment, although the light-receiving part and the light emission part were installed on the same structure, you may install these on a separate structure.

図1は、本発明の第一の実施の形態である変位振動検出装置の構成を示す図である。FIG. 1 is a diagram showing a configuration of a displacement vibration detecting apparatus according to the first embodiment of the present invention. 図2は本実施の形態に使用する光検出器の受光面を示す図であり、図2(a)は受光面が分割された分割型フォトダイオードを示す図、図2(b)は単一の受光面を有するフォトダイオードを示す図である。FIG. 2 is a diagram showing a light receiving surface of a photodetector used in the present embodiment, FIG. 2 (a) is a diagram showing a divided photodiode in which the light receiving surface is divided, and FIG. 2 (b) is a single diagram. It is a figure which shows the photodiode which has a light-receiving surface. 図3は、本実施の形態の変位振動検出装置の全体の構成を示すブロック図である。FIG. 3 is a block diagram showing the overall configuration of the displacement vibration detection apparatus of the present embodiment. 図4は、本発明の第二の実施の形態である変位振動検出装置の構成を示す図である。FIG. 4 is a diagram showing a configuration of a displacement vibration detecting apparatus according to the second embodiment of the present invention.

符号の説明Explanation of symbols

1 構造体
2 基準点
3 受光部
4 移動台
5、35 発光部
6 光検出器
7 光学系
8 調整治具
11 発光部の像
16 分割型フォトダイオード
17 フォトダイオード
10、20 受光面
30 光源
31 光ファイバ
36 ホルダ
DESCRIPTION OF SYMBOLS 1 Structure 2 Reference point 3 Light-receiving part 4 Moving stand 5, 35 Light-emitting part 6 Photo detector 7 Optical system 8 Adjustment jig 11 Image of light-emitting part 16 Split type photodiode 17 Photodiode 10, 20 Light-receiving surface 30 Light source 31 Light Fiber 36 holder

Claims (9)

構造体の基準点に固定された受光部と前記基準点から離れた場所に位置する被測定物に固定された発光部とを有し、前記受光部は光検出器と該光検出器の受光面上に前記発光部の像を結像する光学系とからなり、前記光検出器で検出される光量の変化によって前記基準点と前記被測定物の間の相対的な変位または振動を検出することを特徴とする変位振動検出装置。   A light receiving portion fixed to a reference point of the structure, and a light emitting portion fixed to an object to be measured located at a location away from the reference point, the light receiving portion being a photodetector and a light receiving portion of the photodetector. An optical system that forms an image of the light emitting unit on a surface, and detects relative displacement or vibration between the reference point and the object to be measured by a change in the amount of light detected by the photodetector. Displacement vibration detection device characterized by the above. 前記光学系は望遠鏡構成の光学系であることを特徴とする請求項1に記載の変位振動検出装置。   The displacement vibration detecting apparatus according to claim 1, wherein the optical system is an optical system having a telescope configuration. 前記光検出器と前記光学系が一体として固定され、前記光検出器または前記光学系の少なくとも一方の位置を調整する手段を設けたことを特徴とする請求項1または2に記載の変位振動検出装置。   3. The displacement vibration detection according to claim 1, wherein the photodetector and the optical system are fixed integrally, and means for adjusting a position of at least one of the photodetector or the optical system is provided. apparatus. 前記光検出器は受光面が分割された分割型フォトダイオードであることを特徴とする請求項1〜3のいずれか1項に記載の変位振動検出装置。   The displacement vibration detection device according to any one of claims 1 to 3, wherein the photodetector is a split type photodiode in which a light receiving surface is split. 前記発光部は発光ダイオードにより構成されていることを特徴とする請求項1〜4のいずれか1項に記載の変位振動検出装置。   The displacement vibration detection device according to any one of claims 1 to 4, wherein the light emitting unit is formed of a light emitting diode. 前記発光部とは異なる部分に設置された光源と該光源より出射された光を導く光ファイバとを有し、前記発光部は前記光ファイバにより導かれた光が放射される該光ファイバの端面からなることを特徴とする請求項1〜4のいずれか1項に記載の変位振動検出装置。   A light source installed in a portion different from the light emitting unit; and an optical fiber that guides the light emitted from the light source, and the light emitting unit has an end face of the optical fiber from which the light guided by the optical fiber is emitted. The displacement vibration detection apparatus according to claim 1, wherein the displacement vibration detection apparatus is configured as follows. 前記光検出器の光入射側に前記発光部から放射される光の波長を通過させる波長フィルターが設置されていることを特徴とする請求項1〜6のいずれか1項に記載の変位振動検出装置。   The displacement vibration detection according to any one of claims 1 to 6, wherein a wavelength filter that allows a wavelength of light emitted from the light emitting unit to pass is installed on a light incident side of the photodetector. apparatus. 前記発光部から放射される光の強度は前記振動の周波数より高い周波数で変調されていることを特徴とする請求項1〜7のいずれか1項に記載の変位振動検出装置。   The displacement vibration detection device according to claim 1, wherein the intensity of light emitted from the light emitting unit is modulated at a frequency higher than the frequency of the vibration. 構造体の基準点に受光部を、前記基準点から離れた場所に位置する被測定物に発光部を設置し、前記受光部の光検出器の受光面上に前記発光部の像を結像し、前記受光面で受光される光量の変化によって前記基準点と前記被測定物の間の相対的な変位または振動を検出する変位振動検出方法。   A light receiving unit is installed at the reference point of the structure, and a light emitting unit is installed at the object to be measured located away from the reference point. A displacement vibration detection method for detecting a relative displacement or vibration between the reference point and the object to be measured by a change in the amount of light received by the light receiving surface.
JP2007270123A 2007-10-17 2007-10-17 Vibration displacement detecting device and method of detecting displacement and vibration Pending JP2009098003A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007270123A JP2009098003A (en) 2007-10-17 2007-10-17 Vibration displacement detecting device and method of detecting displacement and vibration

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007270123A JP2009098003A (en) 2007-10-17 2007-10-17 Vibration displacement detecting device and method of detecting displacement and vibration

Publications (1)

Publication Number Publication Date
JP2009098003A true JP2009098003A (en) 2009-05-07

Family

ID=40701148

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007270123A Pending JP2009098003A (en) 2007-10-17 2007-10-17 Vibration displacement detecting device and method of detecting displacement and vibration

Country Status (1)

Country Link
JP (1) JP2009098003A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103454694A (en) * 2013-09-10 2013-12-18 北京北奥东华激光技术有限公司 Telescopic laser detection system
CN103940502A (en) * 2014-04-28 2014-07-23 中国工程物理研究院流体物理研究所 Rapid non-contact vibration absolute displacement optical direct measurement device
CN106153331A (en) * 2016-09-18 2016-11-23 安徽理工大学 The measurement apparatus vibrated based on the flexible doublejointed mechanical arm of machine vision and method

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58170526U (en) * 1982-05-10 1983-11-14 三菱電機株式会社 Shaking detection device
JPS62167500U (en) * 1986-04-14 1987-10-23
JPH01182702A (en) * 1988-01-14 1989-07-20 Kobe Steel Ltd Method and apparatus for detecting position of movable body
JPH04276504A (en) * 1990-12-21 1992-10-01 Alcatel Fibres Optiques Apparatus for detecting irregular diameter of wire
JPH07167609A (en) * 1993-10-20 1995-07-04 Tokyo Electric Power Co Inc:The Optical oscillation detecting device
JPH0997941A (en) * 1995-09-29 1997-04-08 Matsushita Electric Ind Co Ltd Optical amplifier
JPH109942A (en) * 1996-06-20 1998-01-16 Alps Electric Co Ltd Vibration sensor
JPH10173601A (en) * 1996-12-09 1998-06-26 Yasuto Takeuchi Light signal transmitting system
JPH1123450A (en) * 1997-07-09 1999-01-29 Mitsubishi Heavy Ind Ltd Method and equipment for detecting gas concentration
WO1999006804A1 (en) * 1997-07-31 1999-02-11 Kyoyu Corporation Voice monitoring system using laser beam

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58170526U (en) * 1982-05-10 1983-11-14 三菱電機株式会社 Shaking detection device
JPS62167500U (en) * 1986-04-14 1987-10-23
JPH01182702A (en) * 1988-01-14 1989-07-20 Kobe Steel Ltd Method and apparatus for detecting position of movable body
JPH04276504A (en) * 1990-12-21 1992-10-01 Alcatel Fibres Optiques Apparatus for detecting irregular diameter of wire
JPH07167609A (en) * 1993-10-20 1995-07-04 Tokyo Electric Power Co Inc:The Optical oscillation detecting device
JPH0997941A (en) * 1995-09-29 1997-04-08 Matsushita Electric Ind Co Ltd Optical amplifier
JPH109942A (en) * 1996-06-20 1998-01-16 Alps Electric Co Ltd Vibration sensor
JPH10173601A (en) * 1996-12-09 1998-06-26 Yasuto Takeuchi Light signal transmitting system
JPH1123450A (en) * 1997-07-09 1999-01-29 Mitsubishi Heavy Ind Ltd Method and equipment for detecting gas concentration
WO1999006804A1 (en) * 1997-07-31 1999-02-11 Kyoyu Corporation Voice monitoring system using laser beam

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103454694A (en) * 2013-09-10 2013-12-18 北京北奥东华激光技术有限公司 Telescopic laser detection system
CN103940502A (en) * 2014-04-28 2014-07-23 中国工程物理研究院流体物理研究所 Rapid non-contact vibration absolute displacement optical direct measurement device
CN106153331A (en) * 2016-09-18 2016-11-23 安徽理工大学 The measurement apparatus vibrated based on the flexible doublejointed mechanical arm of machine vision and method

Similar Documents

Publication Publication Date Title
US10473763B2 (en) LiDAR scanner
US7663767B2 (en) Apparatus and method for measuring displacement, surface profile and inner radius
US20070030474A1 (en) Optical range finder
WO2007064598A3 (en) Distance measurement device with short range optics
WO2014176479A8 (en) Surface roughness measurement device
US20190212448A1 (en) Laser processing device and laser processing system
CN102735190A (en) Detection device and detection method used for laser-beam deflection angle
US20180128904A1 (en) Lidar scanner with optical amplification
KR100763974B1 (en) Method and apparatus for aligning optical axis for wavefront sensor for mid-infrared band
JP2013528798A (en) Optical measurement device for physical parameters
JP2009098003A (en) Vibration displacement detecting device and method of detecting displacement and vibration
JP2016156763A (en) Deformation sensor and method for measuring amount of deformation
TWI666422B (en) A displacement sensor device and object displacement measurement method
KR101124607B1 (en) Beam width measurement method and system using optical grating panel
KR20150012803A (en) Sensing appratus for using diffraction grating
JP5162832B2 (en) Displacement detector
JP2010256183A (en) Reflection-type photoelectric sensor
KR101868963B1 (en) Structure to the one direction over the distance by using the detected light
CN1870885B (en) Sensor and sensor system for optical detection of objects, assembly head, method for determining the height position of a component
CN100378459C (en) Road vehicle running speed detecting method and device
JP2004037461A (en) Device for optically measuring distance
TW200722716A (en) Optical measuring system
TW200641333A (en) Laser doppler scale optical system
CN208207202U (en) Optical-fiber laser radar
KR100326170B1 (en) Measuring device for waveguides pitch of optical device

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20100809

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20120618

A131 Notification of reasons for refusal

Effective date: 20120711

Free format text: JAPANESE INTERMEDIATE CODE: A131

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20130220

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20130626