JPS5935169B2 - コンデンサ - Google Patents

コンデンサ

Info

Publication number
JPS5935169B2
JPS5935169B2 JP49113644A JP11364474A JPS5935169B2 JP S5935169 B2 JPS5935169 B2 JP S5935169B2 JP 49113644 A JP49113644 A JP 49113644A JP 11364474 A JP11364474 A JP 11364474A JP S5935169 B2 JPS5935169 B2 JP S5935169B2
Authority
JP
Japan
Prior art keywords
arsenic
tantalum
film
substrate
tantalum oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP49113644A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5140549A (enrdf_load_stackoverflow
Inventor
泰周 木原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP49113644A priority Critical patent/JPS5935169B2/ja
Publication of JPS5140549A publication Critical patent/JPS5140549A/ja
Publication of JPS5935169B2 publication Critical patent/JPS5935169B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Inorganic Insulating Materials (AREA)
JP49113644A 1974-10-02 1974-10-02 コンデンサ Expired JPS5935169B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49113644A JPS5935169B2 (ja) 1974-10-02 1974-10-02 コンデンサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49113644A JPS5935169B2 (ja) 1974-10-02 1974-10-02 コンデンサ

Publications (2)

Publication Number Publication Date
JPS5140549A JPS5140549A (enrdf_load_stackoverflow) 1976-04-05
JPS5935169B2 true JPS5935169B2 (ja) 1984-08-27

Family

ID=14617455

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49113644A Expired JPS5935169B2 (ja) 1974-10-02 1974-10-02 コンデンサ

Country Status (1)

Country Link
JP (1) JPS5935169B2 (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5443178A (en) * 1977-09-12 1979-04-05 Hokusan Kk Pressure changing adsorption separating method for mixed gas with adsorvent
JPS5443179A (en) * 1977-09-12 1979-04-05 Hokusan Kk Adsobent regeneration method in pressure changing adsorption separating method for mixing gas with adsobent
US4561865A (en) * 1983-11-01 1985-12-31 Greene & Kellogg, Inc. Single bed pressure swing adsorption gas separation system
JPS6115068A (ja) * 1984-07-02 1986-01-23 大同酸素株式会社 高純度窒素ガス製造装置
JPH0660436B2 (ja) * 1986-03-28 1994-08-10 ユ ツオン リユ タンタル、ニオブまたはその合金製物品の保護膜およびその製法
JPS63166702A (ja) * 1986-12-26 1988-07-09 Osaka Oxygen Ind Ltd 酸素ガス濃縮法

Also Published As

Publication number Publication date
JPS5140549A (enrdf_load_stackoverflow) 1976-04-05

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