JPS5935098A - 強誘電性薄膜 - Google Patents

強誘電性薄膜

Info

Publication number
JPS5935098A
JPS5935098A JP57142518A JP14251882A JPS5935098A JP S5935098 A JPS5935098 A JP S5935098A JP 57142518 A JP57142518 A JP 57142518A JP 14251882 A JP14251882 A JP 14251882A JP S5935098 A JPS5935098 A JP S5935098A
Authority
JP
Japan
Prior art keywords
thin film
ferroelectric thin
plane
optic effect
titanium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57142518A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0333680B2 (enrdf_load_stackoverflow
Inventor
Hideaki Adachi
秀明 足立
Kenzo Ochi
謙三 黄地
Takao Kawaguchi
隆夫 川口
Kentaro Setsune
瀬恒　謙太郎
Kiyotaka Wasa
清孝 和佐
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP57142518A priority Critical patent/JPS5935098A/ja
Publication of JPS5935098A publication Critical patent/JPS5935098A/ja
Publication of JPH0333680B2 publication Critical patent/JPH0333680B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
    • C30B23/02—Epitaxial-layer growth
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/16—Oxides
    • C30B29/22—Complex oxides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Inorganic Insulating Materials (AREA)
  • Compositions Of Oxide Ceramics (AREA)
JP57142518A 1982-08-17 1982-08-17 強誘電性薄膜 Granted JPS5935098A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57142518A JPS5935098A (ja) 1982-08-17 1982-08-17 強誘電性薄膜

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57142518A JPS5935098A (ja) 1982-08-17 1982-08-17 強誘電性薄膜

Publications (2)

Publication Number Publication Date
JPS5935098A true JPS5935098A (ja) 1984-02-25
JPH0333680B2 JPH0333680B2 (enrdf_load_stackoverflow) 1991-05-17

Family

ID=15317217

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57142518A Granted JPS5935098A (ja) 1982-08-17 1982-08-17 強誘電性薄膜

Country Status (1)

Country Link
JP (1) JPS5935098A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61274342A (ja) * 1985-05-29 1986-12-04 Ube Ind Ltd 強誘電体素子およびその製造法
US4927513A (en) * 1988-01-09 1990-05-22 Leybold Aktiengesellschaft Method and arrangement for fabricating magneto-optical, storable, and/or deletable data carriers
US5070026A (en) * 1989-06-26 1991-12-03 Spire Corporation Process of making a ferroelectric electronic component and product
US5368915A (en) * 1991-08-30 1994-11-29 Sharp Kabushiki Kaisha Active matrix substrate
US10697090B2 (en) 2017-06-23 2020-06-30 Panasonic Intellectual Property Management Co., Ltd. Thin-film structural body and method for fabricating thereof

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61274342A (ja) * 1985-05-29 1986-12-04 Ube Ind Ltd 強誘電体素子およびその製造法
US4927513A (en) * 1988-01-09 1990-05-22 Leybold Aktiengesellschaft Method and arrangement for fabricating magneto-optical, storable, and/or deletable data carriers
US5070026A (en) * 1989-06-26 1991-12-03 Spire Corporation Process of making a ferroelectric electronic component and product
US5368915A (en) * 1991-08-30 1994-11-29 Sharp Kabushiki Kaisha Active matrix substrate
US10697090B2 (en) 2017-06-23 2020-06-30 Panasonic Intellectual Property Management Co., Ltd. Thin-film structural body and method for fabricating thereof

Also Published As

Publication number Publication date
JPH0333680B2 (enrdf_load_stackoverflow) 1991-05-17

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