JPS5933248U - ウエハのフアセツト合せ装置 - Google Patents

ウエハのフアセツト合せ装置

Info

Publication number
JPS5933248U
JPS5933248U JP12852882U JP12852882U JPS5933248U JP S5933248 U JPS5933248 U JP S5933248U JP 12852882 U JP12852882 U JP 12852882U JP 12852882 U JP12852882 U JP 12852882U JP S5933248 U JPS5933248 U JP S5933248U
Authority
JP
Japan
Prior art keywords
wafer
facet
face alignment
wafer face
alignment equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12852882U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6211001Y2 (enrdf_load_stackoverflow
Inventor
善之 三橋
Original Assignee
日本真空技術株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本真空技術株式会社 filed Critical 日本真空技術株式会社
Priority to JP12852882U priority Critical patent/JPS5933248U/ja
Publication of JPS5933248U publication Critical patent/JPS5933248U/ja
Application granted granted Critical
Publication of JPS6211001Y2 publication Critical patent/JPS6211001Y2/ja
Granted legal-status Critical Current

Links

JP12852882U 1982-08-27 1982-08-27 ウエハのフアセツト合せ装置 Granted JPS5933248U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12852882U JPS5933248U (ja) 1982-08-27 1982-08-27 ウエハのフアセツト合せ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12852882U JPS5933248U (ja) 1982-08-27 1982-08-27 ウエハのフアセツト合せ装置

Publications (2)

Publication Number Publication Date
JPS5933248U true JPS5933248U (ja) 1984-03-01
JPS6211001Y2 JPS6211001Y2 (enrdf_load_stackoverflow) 1987-03-16

Family

ID=30291534

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12852882U Granted JPS5933248U (ja) 1982-08-27 1982-08-27 ウエハのフアセツト合せ装置

Country Status (1)

Country Link
JP (1) JPS5933248U (enrdf_load_stackoverflow)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53133578U (enrdf_load_stackoverflow) * 1977-03-30 1978-10-23
JPS5565445A (en) * 1978-11-13 1980-05-16 Toshiba Corp Positioning device for plate-shaped body
JPS55149951U (enrdf_load_stackoverflow) * 1979-04-16 1980-10-29

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53133578U (enrdf_load_stackoverflow) * 1977-03-30 1978-10-23
JPS5565445A (en) * 1978-11-13 1980-05-16 Toshiba Corp Positioning device for plate-shaped body
JPS55149951U (enrdf_load_stackoverflow) * 1979-04-16 1980-10-29

Also Published As

Publication number Publication date
JPS6211001Y2 (enrdf_load_stackoverflow) 1987-03-16

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