JPS5931063B2 - フオトマスク用ブランク板の製造方法 - Google Patents

フオトマスク用ブランク板の製造方法

Info

Publication number
JPS5931063B2
JPS5931063B2 JP49130333A JP13033374A JPS5931063B2 JP S5931063 B2 JPS5931063 B2 JP S5931063B2 JP 49130333 A JP49130333 A JP 49130333A JP 13033374 A JP13033374 A JP 13033374A JP S5931063 B2 JPS5931063 B2 JP S5931063B2
Authority
JP
Japan
Prior art keywords
light
metal
transparent substrate
reflectance
photomask blank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP49130333A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5156178A (enrdf_load_stackoverflow
Inventor
豊司 西本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toppan Inc
Original Assignee
Toppan Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toppan Printing Co Ltd filed Critical Toppan Printing Co Ltd
Priority to JP49130333A priority Critical patent/JPS5931063B2/ja
Publication of JPS5156178A publication Critical patent/JPS5156178A/ja
Publication of JPS5931063B2 publication Critical patent/JPS5931063B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP49130333A 1974-11-12 1974-11-12 フオトマスク用ブランク板の製造方法 Expired JPS5931063B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49130333A JPS5931063B2 (ja) 1974-11-12 1974-11-12 フオトマスク用ブランク板の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49130333A JPS5931063B2 (ja) 1974-11-12 1974-11-12 フオトマスク用ブランク板の製造方法

Publications (2)

Publication Number Publication Date
JPS5156178A JPS5156178A (enrdf_load_stackoverflow) 1976-05-17
JPS5931063B2 true JPS5931063B2 (ja) 1984-07-31

Family

ID=15031842

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49130333A Expired JPS5931063B2 (ja) 1974-11-12 1974-11-12 フオトマスク用ブランク板の製造方法

Country Status (1)

Country Link
JP (1) JPS5931063B2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4426437A (en) * 1981-06-29 1984-01-17 Minnesota Mining And Manufacturing Company Imageable material with radiation absorbing microstructured layers overcoated with photoresist layer
JPS5878149A (ja) * 1981-11-04 1983-05-11 Konishiroku Photo Ind Co Ltd 金属画像形成材料

Also Published As

Publication number Publication date
JPS5156178A (enrdf_load_stackoverflow) 1976-05-17

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