JPS5930712A - 四塩化けい素中のＨＳｉＢｒＣｌ↓２の変成方法 - Google Patents
四塩化けい素中のＨＳｉＢｒＣｌ↓２の変成方法Info
- Publication number
- JPS5930712A JPS5930712A JP14188682A JP14188682A JPS5930712A JP S5930712 A JPS5930712 A JP S5930712A JP 14188682 A JP14188682 A JP 14188682A JP 14188682 A JP14188682 A JP 14188682A JP S5930712 A JPS5930712 A JP S5930712A
- Authority
- JP
- Japan
- Prior art keywords
- silicon tetrachloride
- activated carbon
- hsibrcl2
- distillation
- converting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 title claims abstract description 35
- 239000005049 silicon tetrachloride Substances 0.000 title claims abstract description 35
- 238000000034 method Methods 0.000 title claims description 12
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 45
- 230000029052 metamorphosis Effects 0.000 claims description 2
- 238000004821 distillation Methods 0.000 abstract description 6
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 229910004721 HSiCl3 Inorganic materials 0.000 abstract 1
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 abstract 1
- 238000006243 chemical reaction Methods 0.000 description 6
- 238000009835 boiling Methods 0.000 description 5
- 238000000926 separation method Methods 0.000 description 5
- 239000002994 raw material Substances 0.000 description 4
- 239000006227 byproduct Substances 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- WCUXLLCKKVVCTQ-UHFFFAOYSA-M Potassium chloride Chemical compound [Cl-].[K+] WCUXLLCKKVVCTQ-UHFFFAOYSA-M 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 238000005660 chlorination reaction Methods 0.000 description 2
- 238000004817 gas chromatography Methods 0.000 description 2
- 150000002978 peroxides Chemical class 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910014265 BrCl Inorganic materials 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
- 239000005909 Kieselgur Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910021536 Zeolite Inorganic materials 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- CODNYICXDISAEA-UHFFFAOYSA-N bromine monochloride Chemical compound BrCl CODNYICXDISAEA-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 1
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 235000011164 potassium chloride Nutrition 0.000 description 1
- 239000001103 potassium chloride Substances 0.000 description 1
- OTYBMLCTZGSZBG-UHFFFAOYSA-L potassium sulfate Chemical compound [K+].[K+].[O-]S([O-])(=O)=O OTYBMLCTZGSZBG-UHFFFAOYSA-L 0.000 description 1
- 229910052939 potassium sulfate Inorganic materials 0.000 description 1
- 235000011151 potassium sulphates Nutrition 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000010457 zeolite Substances 0.000 description 1
Landscapes
- Silicon Compounds (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14188682A JPS5930712A (ja) | 1982-08-16 | 1982-08-16 | 四塩化けい素中のＨＳｉＢｒＣｌ↓２の変成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14188682A JPS5930712A (ja) | 1982-08-16 | 1982-08-16 | 四塩化けい素中のＨＳｉＢｒＣｌ↓２の変成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5930712A true JPS5930712A (ja) | 1984-02-18 |
| JPH0352405B2 JPH0352405B2 (enExample) | 1991-08-09 |
Family
ID=15302445
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14188682A Granted JPS5930712A (ja) | 1982-08-16 | 1982-08-16 | 四塩化けい素中のＨＳｉＢｒＣｌ↓２の変成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5930712A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010021339A1 (ja) * | 2008-08-22 | 2010-02-25 | チッソ株式会社 | 四塩化珪素の精製方法 |
-
1982
- 1982-08-16 JP JP14188682A patent/JPS5930712A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010021339A1 (ja) * | 2008-08-22 | 2010-02-25 | チッソ株式会社 | 四塩化珪素の精製方法 |
| US8273316B2 (en) | 2008-08-22 | 2012-09-25 | Jnc Corporation | Method for purification of silicon tetrachloride |
| JP5655565B2 (ja) * | 2008-08-22 | 2015-01-21 | Jnc株式会社 | 四塩化珪素の精製方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0352405B2 (enExample) | 1991-08-09 |
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