JPH0352405B2 - - Google Patents

Info

Publication number
JPH0352405B2
JPH0352405B2 JP14188682A JP14188682A JPH0352405B2 JP H0352405 B2 JPH0352405 B2 JP H0352405B2 JP 14188682 A JP14188682 A JP 14188682A JP 14188682 A JP14188682 A JP 14188682A JP H0352405 B2 JPH0352405 B2 JP H0352405B2
Authority
JP
Japan
Prior art keywords
hsibrcl
silicon tetrachloride
activated carbon
hsicl
sicl
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14188682A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5930712A (ja
Inventor
Masuhito Oogushi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JNC Corp
Original Assignee
Chisso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chisso Corp filed Critical Chisso Corp
Priority to JP14188682A priority Critical patent/JPS5930712A/ja
Publication of JPS5930712A publication Critical patent/JPS5930712A/ja
Publication of JPH0352405B2 publication Critical patent/JPH0352405B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
JP14188682A 1982-08-16 1982-08-16 四塩化けい素中のＨＳｉＢｒＣｌ↓２の変成方法 Granted JPS5930712A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14188682A JPS5930712A (ja) 1982-08-16 1982-08-16 四塩化けい素中のＨＳｉＢｒＣｌ↓２の変成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14188682A JPS5930712A (ja) 1982-08-16 1982-08-16 四塩化けい素中のＨＳｉＢｒＣｌ↓２の変成方法

Publications (2)

Publication Number Publication Date
JPS5930712A JPS5930712A (ja) 1984-02-18
JPH0352405B2 true JPH0352405B2 (enExample) 1991-08-09

Family

ID=15302445

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14188682A Granted JPS5930712A (ja) 1982-08-16 1982-08-16 四塩化けい素中のＨＳｉＢｒＣｌ↓２の変成方法

Country Status (1)

Country Link
JP (1) JPS5930712A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5655565B2 (ja) * 2008-08-22 2015-01-21 Jnc株式会社 四塩化珪素の精製方法

Also Published As

Publication number Publication date
JPS5930712A (ja) 1984-02-18

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