JPS59225736A - 被膜形成方法 - Google Patents

被膜形成方法

Info

Publication number
JPS59225736A
JPS59225736A JP9790083A JP9790083A JPS59225736A JP S59225736 A JPS59225736 A JP S59225736A JP 9790083 A JP9790083 A JP 9790083A JP 9790083 A JP9790083 A JP 9790083A JP S59225736 A JPS59225736 A JP S59225736A
Authority
JP
Japan
Prior art keywords
discharge
gas
film forming
forming method
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9790083A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6152230B2 (enrdf_load_stackoverflow
Inventor
Tatsumi Hiramoto
立躬 平本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Ushio Inc
Original Assignee
Ushio Denki KK
Ushio Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK, Ushio Inc filed Critical Ushio Denki KK
Priority to JP9790083A priority Critical patent/JPS59225736A/ja
Publication of JPS59225736A publication Critical patent/JPS59225736A/ja
Publication of JPS6152230B2 publication Critical patent/JPS6152230B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP9790083A 1983-06-03 1983-06-03 被膜形成方法 Granted JPS59225736A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9790083A JPS59225736A (ja) 1983-06-03 1983-06-03 被膜形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9790083A JPS59225736A (ja) 1983-06-03 1983-06-03 被膜形成方法

Publications (2)

Publication Number Publication Date
JPS59225736A true JPS59225736A (ja) 1984-12-18
JPS6152230B2 JPS6152230B2 (enrdf_load_stackoverflow) 1986-11-12

Family

ID=14204608

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9790083A Granted JPS59225736A (ja) 1983-06-03 1983-06-03 被膜形成方法

Country Status (1)

Country Link
JP (1) JPS59225736A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6274084A (ja) * 1985-09-27 1987-04-04 Sanyo Electric Co Ltd 周期構造膜の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6274084A (ja) * 1985-09-27 1987-04-04 Sanyo Electric Co Ltd 周期構造膜の製造方法

Also Published As

Publication number Publication date
JPS6152230B2 (enrdf_load_stackoverflow) 1986-11-12

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