JPS59222930A - 電子ビ−ム露光におけるマ−ク位置検出方法及び装置 - Google Patents
電子ビ−ム露光におけるマ−ク位置検出方法及び装置Info
- Publication number
- JPS59222930A JPS59222930A JP58095801A JP9580183A JPS59222930A JP S59222930 A JPS59222930 A JP S59222930A JP 58095801 A JP58095801 A JP 58095801A JP 9580183 A JP9580183 A JP 9580183A JP S59222930 A JPS59222930 A JP S59222930A
- Authority
- JP
- Japan
- Prior art keywords
- mark
- peak
- electron beam
- level
- detection signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
- H01J37/3045—Object or beam position registration
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58095801A JPS59222930A (ja) | 1983-06-01 | 1983-06-01 | 電子ビ−ム露光におけるマ−ク位置検出方法及び装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58095801A JPS59222930A (ja) | 1983-06-01 | 1983-06-01 | 電子ビ−ム露光におけるマ−ク位置検出方法及び装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59222930A true JPS59222930A (ja) | 1984-12-14 |
JPH047091B2 JPH047091B2 (de) | 1992-02-07 |
Family
ID=14147531
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58095801A Granted JPS59222930A (ja) | 1983-06-01 | 1983-06-01 | 電子ビ−ム露光におけるマ−ク位置検出方法及び装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59222930A (de) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62145401A (ja) * | 1985-12-20 | 1987-06-29 | Komatsu Ltd | 無人車の誘導装置 |
JPS62156817A (ja) * | 1985-12-28 | 1987-07-11 | Advantest Corp | 電子ビ−ム露光装置のマ−ク検出器 |
JPS62298114A (ja) * | 1986-06-18 | 1987-12-25 | Hitachi Ltd | 電子ビ−ム露光装置におけるマ−ク位置検出装置 |
-
1983
- 1983-06-01 JP JP58095801A patent/JPS59222930A/ja active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62145401A (ja) * | 1985-12-20 | 1987-06-29 | Komatsu Ltd | 無人車の誘導装置 |
JPS62156817A (ja) * | 1985-12-28 | 1987-07-11 | Advantest Corp | 電子ビ−ム露光装置のマ−ク検出器 |
JPS62298114A (ja) * | 1986-06-18 | 1987-12-25 | Hitachi Ltd | 電子ビ−ム露光装置におけるマ−ク位置検出装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH047091B2 (de) | 1992-02-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US8452561B2 (en) | Time delay estimation | |
US10962628B1 (en) | Spatial temporal weighting in a SPAD detector | |
JPH09184739A (ja) | パルス検知装置及びパルス検知方法 | |
US5811782A (en) | Binary device for bar code reader | |
US3901814A (en) | Method and apparatus for detecting a registration mark on a target such as a semiconductor wafer | |
US6189794B1 (en) | Bar code reader determining unit for determining the true changing point and correcting unit for correcting the false changing point to correct changing point | |
JPS59222930A (ja) | 電子ビ−ム露光におけるマ−ク位置検出方法及び装置 | |
JPH0266484A (ja) | パルスレーザ測距装置 | |
JPH03134548A (ja) | 表面検査装置 | |
JPH04366785A (ja) | パルスレーザ測距装置 | |
JPH07107482B2 (ja) | 距離計測装置 | |
JP3208273B2 (ja) | 表面形状測定装置 | |
JPH06201828A (ja) | レーザ測距装置 | |
CN112711010A (zh) | 激光测距信号处理装置、激光测距设备及其对应的方法 | |
JPS6312543B2 (de) | ||
JPH04274711A (ja) | 荷電ビームを用いたパターン寸法測定方法 | |
JPH0682607B2 (ja) | マ−ク位置検出装置 | |
US4872153A (en) | Detecting light spot movement direction for an optical disk | |
JPS62134584A (ja) | レ−ザ測距装置 | |
JPH09287914A (ja) | レーザ測距装置 | |
JPH05101211A (ja) | バーコード信号2値化装置 | |
JPS61239108A (ja) | 信号検出装置 | |
JPS62166613A (ja) | 信号検出装置 | |
JPH0718814B2 (ja) | 表面検査装置 | |
KR840001118B1 (ko) | 전자선 장치에 있어서 촛점검출 장치 |