JPS592220A - Magnetic head - Google Patents

Abstract

PURPOSE:To reduce the decrease in an output and the deterioration of an (f) characteristic after storage owing to a high rate of wear at high temp. and high humidity and the use of a metallic tape by forming a thin film of an amorphous magnetic alloy having a specific compsn. on a substrate. CONSTITUTION:A titled magnetic head consists of a substrate formed thereon with a thin film of an amorphous magnetic alloy having the compsn. expressed by the formula I . Co, or Fe and the other additive elements to be added in combination with Co according to need to T in the formula I are Fe, Co, Ru and other transition metallic elements except VIB, VB, VIB groups, and X is preferably B, Si and B or a combination of B or Si and B and >=1 kinds among other vitrifying elements. Ru and Cr and other VIB, VB, VIB group elements are contained as essential components in said compsn. The amt. (z) of Ru to be added under the condition x+y+z+w+v=100at% in the formula I is <=8at%, more preferably 0.5-5at%, while the amt. (w) of Cr to be added is <=8at%. M is more particularly preferably >=1 kinds among Ti, Ta, Nb, V and Zr, and the amt. (v) thereof to be added is <=5at%.

Description

DETAILED DESCRIPTION OF THE INVENTION (1) Background of the Invention Technical Field The present invention relates to a magnetic head. More specifically, the present invention relates to a magnetic head having an amorphous magnetic alloy thin film.

Prior art and its problems Thin sheets of amorphous magnetic alloys have attracted attention as magnetic head materials because they exhibit high saturation magnetization and high magnetic permeability.

To form a narrow magnetic head in a trunk, for example, a rotating head for video recording, recording/playback, or audio, or a magnetic head for a computer, from an amorphous magnetic alloy thin sheet, the thin sheet may be used as is, or the thin sheet may be used as is. Alternatively, a plurality of the cores are laminated to form a trunk having a thickness of several tens of micrometers or less, particularly about 20 to 30 micrometers, and half cores of a predetermined shape are brought together through a gap.

However, the magnetic heads for video and other applications produced in this way are extremely thin and lack sufficient strength.
It deforms during mechanical processing and is not suitable for magnetic heads that require high dimensional accuracy.

In addition, since the thin plate of amorphous magnetic alloy is highly elastic, it deforms when sliding at high speed with the magnetic recording medium for video.
The head arm becomes unbalanced and rotational performance deteriorates.

In order to eliminate such inconveniences, it is conceivable to form a thin film of an amorphous magnetic alloy on the substrate by sputtering to form a half-core core, and then form a magnetic head from this.

And if you use such a magnetic head.

The above-mentioned inconveniences will be resolved.

However, when forming an amorphous magnetic alloy thin film having a typical composition, there is a drawback that the amount of wear caused by high-speed sliding with a magnetic recording medium is large.

Also, a coating type medium that uses alloy magnetic powder.

When a so-called metal tape or the like is used, there is a drawback that the thin film becomes colored as it is used, resulting in a decrease in output.

In view of these circumstances, the present inventors have previously proposed the use of an amorphous magnetic alloy thin film containing Ru.

In such a case, the amount of high-speed wear is reduced, and the reduction in output due to the use of metal tape is reduced.

However, there is a drawback that the frequency characteristics (f characteristics) deteriorate due to storage under high temperature and high humidity conditions.

In contrast, the present inventors have previously proposed the use of an amorphous magnetic alloy thin film containing Ru and Cr.
In such a case, the deterioration of the f characteristic after storage under high temperature and high humidity conditions is reduced, the amount of high-speed wear is also small, and the decrease in output due to the use of metal tape is also small.

However, it has the disadvantage of a large amount of high-speed wear under high temperature and high humidity conditions.

■ Purpose of the Invention The present invention was made in view of the above-mentioned circumstances, and its main purpose is to reduce the amount of high-speed wear even under normal conditions as well as under high temperature and high humidity, and to reduce the amount of wear due to the use of metal tape. It is an object of the present invention to provide a magnetic head having an amorphous magnetic alloy thin film that exhibits less decrease in output and less deterioration of f-characteristics after storage.

The present inventors have conducted intensive research for such purposes,
The present invention has been accomplished.

That is, the present invention is a magnetic head characterized in that an amorphous magnetic alloy thin film having a composition represented by the following formula is formed on a substrate.

Formula 'rxX, Ruz CrwMv (wherein T is Co, Co and Fe, or Co,
or a combination of Co and Fe and seven or more other transition metal elements; X represents B, B and Si, or B, or a combination of B and Si and seven or more other vitrification elements where M represents 7 or more of R'B, VB, and VIB group elements other than Cr.

x+y+z+w+v=10θat%, of which y
Ha/6-3! rat%, 2 is ffat% or less, W is gat% or less, and (2) is 5at% or less. ) ■Specific structure of the invention The specific structure of the present invention will be explained in detail below.

The thin film in the present invention is substantially in an amorphous state with no long-range regularity.

The composition is shown in the above formula.

In the above formula, in T, if necessary, Co or other additive elements added in combination with Fe and CO include Fe, Co, Ru, and all other transitions other than B, VB% and VIB group. Element (5c-Zn: Y-Cd
; La-Hp: Ac or higher), for example Nil
Mn%Rh%Pd, Os, Ir.

Specific examples include seven or more types such as pt.

On the other hand, %X is B, Si and B1 or B or Si
It is preferable that B is combined with seven or more lath-forming elements.

In this case, if necessary, B or other vitrifying elements added in combination with St and B may be added in %
P, C%Ge%Sr1. Seven or more types, such as AN, can be mentioned.

Furthermore, in the composition in the present invention, Ru and C
r and other IVB, VB, and VIB group elements as essential components.

In this case, Ru is replaced by another platinum group metal element such as Pt,
Replace Cr with Rh, etc., with other IVB, VB.

Group VIB elements, such as Ti, Zr%V, Nb, T
a.

When the material is replaced with Mo, W, etc., the desired effects of the present invention will not be achieved.

On the other hand, in the above formula, x,'+y+z+w+v
= 100at%, Ru addition amount 2 is ga
t% or less.

This is because when gat% is exceeded, it becomes difficult to become amorphous, and conversely, high-speed wear resistance decreases, and the output decrease due to the use of metal tape increases.

In this case, if the Ru addition amount 2 is small, these effects will not be effective, so 2 is preferably 0.5-gat%, more preferably 0.33 at%.

On the other hand, the Cr addition amount curve is less than gat%.

This is because if it exceeds gat%, it becomes difficult to become amorphous, and conversely, high-speed abrasion resistance and storage stability, especially under high temperature and high humidity conditions, deteriorate.

In this case, when W becomes small, these effects become ineffective, so %W becomes 0. ! -6 at%, more preferably just 5-5 at%.

On the other hand, other IVB, VB, and VIB group elements M other than Cr include Ti, Zr, Hf%V, Nb, and T.
a.

It may be Mo, W, or more than these types.

In this case, M is particularly preferably one or more of Ti1Ta, Nb, V and Zr.

The addition amount V of 1M is 5 at% or less.

When V exceeds 5 at%, it becomes difficult to become amorphous, and conversely, the amount of high-speed wear increases under high temperature and high humidity conditions.

In this case, if ■ is small, the effect of reducing the amount of wear at high speed under high temperature and high humidity becomes ineffective, so V is 0. /-2at% is preferable.

Furthermore, the addition amount y of the vitrification element component X is /1--33
It is at%.

When y is less than 76 at%, it becomes difficult to make the material amorphous, and when y exceeds 33 at%, a sufficient saturation magnetic flux density cannot be obtained.

In this case, if y is 1g 30at%.

Get better results.

Note that the T content X is 100-y-z-w-
V and Hiroshi3 at% or more and gtl and less than at%, but preferably ly2 g/ and 9 at%.

In this case, T includes Co or Co and Fe.

The elemental composition ratio in T is selected so that the magnetostriction is close to zero.

For this reason, the Fe content is usually θ or Oat%.
The following is said. When the Fe content exceeds bat%, magnetostriction increases, and magnetic permeability decreases due to various stresses in the magnetic head manufacturing process.

Note that T contains Fe, and the Fe content is 0, / ”
b at%, preferably 5 at%,
Very favorable results are obtained in terms of magnetostriction.

On the other hand, the Co content is approximately Oat%, preferably 30
It is preferable that it be at % or more.

If the Co content is less than 'I Oat%, the saturation magnetic flux density Bs will decrease.

Furthermore, as mentioned above, within the above content range, T can be composed of only Co or Fe and CO;
The o6 fluorine may be composed of Fe, CO, and seven or more of the other elements listed above.

When T contains CO or Fe (!: 7 or more other elements in addition to Co, the 7 or more other transition metal elements can usually be contained up to a maximum of 10 at% in total. More than this) When the content of Bs decreases, problems such as poor surface properties occur.

Seven examples of such elements include Ni.

Addition of Ni has the effect of replacing Co and reducing material costs, but as the amount of Ni increases, Bs decreases, so the Ni content is preferably at most gat%.

On the other hand, as seven or more other elements, iron group (Fe%Co
%Ni), Ru, and transition metal elements other than the IVB-VIB group elements, it is preferable that the total amount of seven or more of these other transition metal elements is less than or equal to /θat%. At this time, the decrease in Bs is small and excellent effects unique to each additive element are realized.

Among these elements, Mn is particularly preferable.
etc. can be mentioned.

On the other hand, the vitrification element component X is B.

Alternatively, St and B are essential components.

In this case, when the B content is /b''3!;at% and the Si content is θ-6at%, Bs is high, wear resistance is improved, and favorable results are obtained.

Then, when the B content becomes /3-2''21 Iat% and the Si content becomes 0./-'1.g at%, Bs becomes even higher fi, ■B, yB1.WB group elements, Cr and.

The effect of adding Ru is also significant, and very favorable results are obtained.

In such a case, the Si/(Si+B) ratio (atomic ratio) in %X is preferably 0 or 0.2 or less.

When the Si/(Si+B) ratio exceeds 0.2, high-speed wear becomes large, and f-characteristic deterioration due to storage becomes large.

In particular, when the Si/(Si+B) ratio is 0.05-0, /S, even more favorable results can be obtained.

Note that the vitrification element component X may contain seven or more elements other than Si and B, if necessary. However, the total is 0! If it exceeds rat%, it becomes difficult to become amorphous, so its content should be 0-! ; It is preferably at % or less.

An amorphous magnetic alloy thin film having such a composition is deposited on a substrate at a thickness of about 0. It is formed to have a thickness of about /-100 μm.

The substrate used is usually non-magnetic.

In this case, there are no special restrictions on the material of the base.

Therefore, any of various oxides, carbides, nitrides, silicides, glasses, etc. can be used, and should be selected and used appropriately, taking into consideration the physical properties of the amorphous magnetic alloy thin film, workability, sliding properties, etc. Bye.

There is no particular limit to the thickness of such a substrate, but it is usually 0. /-3TItm.

To form an amorphous magnetic alloy thin film on such a substrate, a vapor phase deposition method, usually sputtering, is used.

The sputtering used is usually one in which a target is sputtered using bombarded ions.

Any known sputtering method that evaporates the tarded material at a kinetic energy of several eV to approximately 0.000 eV can be used.

Therefore, even if a plasma method is used in which tarded material is sputtered using ions such as Ar caused by abnormal glow discharge in an inert gas atmosphere such as Ar, Kr, or Xe, the target cannot be irradiated with an ion beam of Ar, Kr%Xe, etc. An ion beam method may also be used.

When using the plasma method, it may be so-called RF sputtering or so-called DC sputtering, and the device configuration may be either co-pole, dipole, etc.

Furthermore, so-called magnetron sputtering may be used. In some cases, so-called reactive sputtering may also be used. Furthermore, as the ion beam method, various methods can be used.For the tarded material used, in the normal case, a master alloy having a corresponding composition may be used.

Note that there are no particular restrictions on the operating pressure, the plate current, the gap between electrodes, etc., and these can be set to arbitrary values depending on one condition.

In such a case, an underlayer may be formed on one surface of the substrate, and an amorphous magnetic alloy thin film may be formed on this underlayer.
Further, an upper protective layer may be formed on the amorphous magnetic alloy thin film.

Furthermore, amorphous magnetic alloy thin films and non-magnetic thin films can be alternately laminated.

The substrates 3, 3' on which the amorphous magnetic alloy thin films 4, 4' are formed are processed into a predetermined shape, such as a 1-shape, a C-shape, etc., as shown in FIGS. core half 2,2
', and the front thickening part 11 and the rear gap part 1
3, they are brought together via gap materials 6 and 7 such as 5i02 to form the magnetic head 1.

It is also possible to further adhere a protective body made of the same type of microorganism as the substrates 3, 3' onto the thin films 4, 4' of the core halves 2, 2'.

In such a case, after the thin film is formed, heat treatment is performed in a non-magnetic field or in a self-rotating magnetic field without a static magnetic field, if necessary.

Next, grinding is performed to form a predetermined shape and, if necessary, to obtain a predetermined film thickness.

Furthermore, polishing is performed as necessary to give the core a half-day rest.

Then, winding is performed, alignment is performed as described above, and other necessary processing is performed to produce a magnetic head.

Note that the above heat treatment may be performed after shape processing and before winding.

■Specific effects of the invention Such magnetic heads are used for video recording.

It is extremely useful as a rotary head for recording/playback, audio, etc., a magnetic belly button P for computers, etc.

The magnetic head of the present invention has extremely little wear due to high-speed sliding of the medium. In particular, high-speed wear under high temperature and high humidity conditions is extremely low.

In addition, there is very little reduction in output due to the use of coated media such as metal tapes that use alloyed magnetic powder.

Furthermore, there is very little deterioration in f due to storage under high temperature and high humidity conditions.

(2) Specific Examples of the Invention Hereinafter, five specific examples of the present invention will be shown and the present invention will be explained in further detail.

Example: A 30μ thin film of each amorphous magnetic alloy and sendust having the composition shown in the table below was deposited on a 1mx thick alumina substrate.
It was formed to have a thickness of m.

The thin film was formed by sputtering.

In this case, a cast body of an alloy of the corresponding composition is used as the tarded, and the operating argon pressure! -! ;X10 Tor
r, plate voltage, 2KV.

RF magnetron sputtering was performed at input power lIW/CIFL2.

Next, this was ground and polished to obtain a half core 2.2' as shown in FIGS.
A predetermined winding was applied to produce a magnetic head.

Next, each magnetic head was mounted on a gwtn video deck, and the following measurements were performed.

/) Amount of wear (μm) At 25℃, 50% pressure and 7o%RH,
The coated metal tape was run at a rate of 7 m/sec for 100 hours, and the amount of wear after running was measured using a surface roughness meter.

The results are summarized as the amount of wear in the case of Sendust, and are shown in Table 1 as relative values.

, 2) Output drop of 5MHz signal (dB) 23oC%S
Applying metal tape at O%RH, 75m/s
The vehicle was run for q hours in EE mode, and the decrease in output after running was measured. The results are shown in Table/.

3) Change in fl# after storage After storage at 70°C and %RH for 2'IO hours, the change in fl# from before storage was 0. ! ; MHz/3 MHz f characteristic change (d
B) was measured.

The results are shown in Table/.

From the results shown in Table 1, the effects of the present invention are clear.

[Brief explanation of the drawing]

FIG. 1 is a front view showing seven examples of the structure of a magnetic head according to the present invention, and FIG. 1 is a right side view of FIG. 1...Magnetic head, 2.2'...Core half-off, 3...
・Substrate, 4... Amorphous magnetic alloy thin film applicant
Tokyo Denki Kagaku Kogyo Co., Ltd. Representative Patent Attorney Yo Ishii - Figure 1

Claims (1)

[Scope of Claims] 1. A magnetic head characterized in that an amorphous magnetic alloy thin film having a composition represented by the following formula is formed on a substrate. Formula TXXyRu2CrwMv (wherein T is Go, Co and Fe, or Co,
or represents a combination of CO and Fe with 7 or more types of other transition metal elements; , M represents 7 or more of +7)IvB%VBO and VIB group elements in addition to Cr. x y + z + w + v == /θθat
%, of which y is /l--, 33at%,
2 must be less than gat%, and less than wUgat%. V is 5 at% or less. ) 2. T is Co and Fe, or CO and Fe and other transition metal elements /S or more, F>, Fe content is 0
．． /-b at%. The magnetic head according to claim 1. 3. X is B, or B and Si, or a combination of B or B and Si and 7 or more other vitrifying elements, and the St/(Si+B) ratio in X is O or 0.2 A magnetic head according to claim 1 or 2 below. 4. St/(Si+B) ratio in X is o, s-i, s
A magnetic tool according to claim 3. 5. The magnetic head according to any one of claims 1 to 3, wherein y is Ig-30 at%. 6. The magnetic head according to any one of claims 1 to 5, wherein g is 0-3-bat%. 7. W is 0. ! ; -6 at %, the magnetic heel ratio 8 according to any one of claims 1 to 6, where v is 0. The magnetic head according to any one of claims 1 to 7, wherein the magnetic head is: /-2at%. 9. The magnetic head according to claim 1, wherein M is seven or more elements selected from the group consisting of TI, Ta, Nb, V, and Zr. 10. The thickness of the thin film is 0. The magnetic head according to any one of claims 1 to 9, which has a thickness of /-10θμ. 11. The magnetic head according to any one of claims 1 to 10, wherein the base is nonmagnetic and insulating.