JPS59218937A - パタ−ン検出装置 - Google Patents

パタ−ン検出装置

Info

Publication number
JPS59218937A
JPS59218937A JP58092304A JP9230483A JPS59218937A JP S59218937 A JPS59218937 A JP S59218937A JP 58092304 A JP58092304 A JP 58092304A JP 9230483 A JP9230483 A JP 9230483A JP S59218937 A JPS59218937 A JP S59218937A
Authority
JP
Japan
Prior art keywords
wiring
filter
light
irradiation means
wiring surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58092304A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0436335B2 (enrdf_load_stackoverflow
Inventor
Yasuhiko Hara
靖彦 原
Koichi Tsukazaki
柄崎　晃一
Noriaki Ujiie
氏家　典明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58092304A priority Critical patent/JPS59218937A/ja
Publication of JPS59218937A publication Critical patent/JPS59218937A/ja
Publication of JPH0436335B2 publication Critical patent/JPH0436335B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence

Landscapes

  • Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP58092304A 1983-05-27 1983-05-27 パタ−ン検出装置 Granted JPS59218937A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58092304A JPS59218937A (ja) 1983-05-27 1983-05-27 パタ−ン検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58092304A JPS59218937A (ja) 1983-05-27 1983-05-27 パタ−ン検出装置

Publications (2)

Publication Number Publication Date
JPS59218937A true JPS59218937A (ja) 1984-12-10
JPH0436335B2 JPH0436335B2 (enrdf_load_stackoverflow) 1992-06-15

Family

ID=14050667

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58092304A Granted JPS59218937A (ja) 1983-05-27 1983-05-27 パタ−ン検出装置

Country Status (1)

Country Link
JP (1) JPS59218937A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61278737A (ja) * 1985-06-03 1986-12-09 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション 螢光性基板上の薄膜中の欠陥検出方法
KR100880858B1 (ko) 2007-08-09 2009-01-30 한기수 피씨비 양면 동시 노광기 광원 구조

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61278737A (ja) * 1985-06-03 1986-12-09 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション 螢光性基板上の薄膜中の欠陥検出方法
KR100880858B1 (ko) 2007-08-09 2009-01-30 한기수 피씨비 양면 동시 노광기 광원 구조

Also Published As

Publication number Publication date
JPH0436335B2 (enrdf_load_stackoverflow) 1992-06-15

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