JPS592109Y2 - スパッタ用回転ドラム式シャッタ - Google Patents

スパッタ用回転ドラム式シャッタ

Info

Publication number
JPS592109Y2
JPS592109Y2 JP8059079U JP8059079U JPS592109Y2 JP S592109 Y2 JPS592109 Y2 JP S592109Y2 JP 8059079 U JP8059079 U JP 8059079U JP 8059079 U JP8059079 U JP 8059079U JP S592109 Y2 JPS592109 Y2 JP S592109Y2
Authority
JP
Japan
Prior art keywords
shutter
rotating drum
sputtering
plate
ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8059079U
Other languages
English (en)
Japanese (ja)
Other versions
JPS55180761U (enExample
Inventor
敬三郎 倉増
孝道 服部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP8059079U priority Critical patent/JPS592109Y2/ja
Publication of JPS55180761U publication Critical patent/JPS55180761U/ja
Application granted granted Critical
Publication of JPS592109Y2 publication Critical patent/JPS592109Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP8059079U 1979-06-12 1979-06-12 スパッタ用回転ドラム式シャッタ Expired JPS592109Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8059079U JPS592109Y2 (ja) 1979-06-12 1979-06-12 スパッタ用回転ドラム式シャッタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8059079U JPS592109Y2 (ja) 1979-06-12 1979-06-12 スパッタ用回転ドラム式シャッタ

Publications (2)

Publication Number Publication Date
JPS55180761U JPS55180761U (enExample) 1980-12-25
JPS592109Y2 true JPS592109Y2 (ja) 1984-01-20

Family

ID=29313923

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8059079U Expired JPS592109Y2 (ja) 1979-06-12 1979-06-12 スパッタ用回転ドラム式シャッタ

Country Status (1)

Country Link
JP (1) JPS592109Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59178367U (ja) * 1983-05-10 1984-11-29 株式会社富士通ゼネラル スパツタリング装置

Also Published As

Publication number Publication date
JPS55180761U (enExample) 1980-12-25

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